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SEMI E116-0705 © SEMI 2002, 2005 8 Table 1 Basic EPT State Transitions – Module Level # PREVIOUS STATE TRIGGER NEW STATE ACTIONS COMMENTS 1 (No state) EPT Module i initializa tion completed. IDLE [OR] BLOCKED No EPT ev…
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No BLOCKED EPT modules prevent an EPT module from starting a new task, and
There is no EPT module in the BUSY state with a task type of 1, 2, 3, 4 or 5.
9.4.1.3 For both the equipment and modules the following conditions may
exist in the IDLE State:
The equipment or module is maintaining and monitoring environmental requirements (e.g., background
temperature, particle monitoring, etc).
9.4.2 BUSY
9.4.2.1 EPT Module — The following conditions are required for the module to be in the BUSY state:
The module is executing a task and
No fault condition exists in the module that prevents the execution of a task.
9.4.2.2 Equipment — The following condition is required for the equipment to be in the BUSY state:
At least one EPT module is BUSY with a task type of 1, 2, 3, 4, or 5.
9.4.2.3 For both the equipment and modules the following conditions may
exist in the BUSY State:
Material is present.
9.4.3 BLOCKED
9.4.3.1 EPT Module — One or more of the following conditions are required for the module to be in the
BLOCKED state:
Conditions exist that do not allow the EPT module to continue or start execution of a task:
A fault condition(s) exists that prevents the EPT module from completing its task.
A fault condition(s) exists that prevents the EPT module from starting a new task.
The EPT module is pausing (or aborting) as the result of a pause (or abort) directive.
The EPT module has paused its task and is awaiting a resume directive.
The EPT module fails to initialize upon start-up.
9.4.3.2 Equipment — The following condition is required for the EPT equipment to be in the BLOCKED state:
No EPT module is BUSY with task type of 1, 2, 3, 4 or 5, and
At least one BLOCKED EPT module prevents any EPT module from starting a new task or completing a
current task.
9.4.3.3 For both the EPT equipment and modules the following conditions may
exist in the BLOCKED State:
Material is present.
9.5 EPT State Transition Table – Module Level
9.5.1 This section defines the state transitions for the EPT modules within the equipment.
9.5.2 For each status variable updated with the event change, the corresponding event variable shall also be updated
(see Table 4).
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Table 1 Basic EPT State Transitions – Module Level
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
1 (No state) EPT Module
i
initialization
completed.
IDLE
[OR]
BLOCKED
No EPT event is triggered
EPTState
i
= IDLE or
BLOCKED
PreviousEPTState
i
= NoState
PreviousTaskName
i
= “No
Task”
PreviousTaskType
i
= 0
EPTStateTime
i
= 0
If no Fault
conditions exist
and no material is
present, transition
to IDLE
If Fault conditions
exist, or EPT
module cannot be
initialized, then
transition to
BLOCKED
If Material is
present, then
transition to
BLOCKED
2 IDLE EPT Module
i
starts
execution of a new task.
BUSY
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
EPTState
i
= BUSY
PreviousEPTState
i
=IDLE
TaskName
i
is set
TaskType
i
is set
3 BUSY EPT Module
i
completes
execution of task.
[AND]
Material is removed from
the EPT Module
i
.
IDLE
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
EPTState
i
= IDLE
PreviousEPTState
i
=BUSY
TaskName
i
= “No Task”
TaskType
i
= 0
PreviousTaskName
i
is set
PrevoiusTaskType
i
is set
4 BUSY EPT Module
i
starts
execution of a new task
upon the normal completion
of the previous task.
BUSY
EPTStateChange
i
event is
triggered
TaskName
i
is set
TaskType
i
is set
EPTStateTime
i
does not
change. Thus when the
module transitions out
of BUSY state, the
value of EPTStateTime
i
will reflect the total
time the module was
BUSY.
PreviousEPTState
i
does
not change. Thus,
PreviousEPTState
i
will
continue to reflect the
state of the module
before it was BUSY.
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# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
5 BUSY A pause command is
received that pauses the EPT
Module
i
.
[OR]
An abort command is
received that aborts the EPT
Module
i
.
[OR]
A Fault condition occurs
that prevents the EPT
Module
i
from executing its
task.
BLOCKED
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
BlockedReason
i
is set
BlockedReasonText
i
is set
EPTState
i
=BLOCKED
PreviousEPTState
i
=BUSY
TaskName
i
and
TaskType
i
do not
change. The variables
continue to reflect the
information of the task
that is currently blocked
from executing.
6 BLOCKED All fault conditions that
prevented task execution are
cleared and the EPT
Module
i
resumes execution
of its task or starts execution
of a new task.
[OR]
A resume command is
received that enables the
EPT Module
i
to resume its
task.
BUSY
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
EPTState
i
= BUSY
PreviousEPTState
i
=BLOCKED
TaskName
i
is set
TaskType
i
is set
BlockedReason
i
= 0
BlockedReasonText
i
= “Not
Blocked”
7 BLOCKED All fault conditions that
prevented task execution are
cleared.
[AND]
All material is removed
from the EPT Module
i
.
[AND]
EPT Module
i
can begin a
new task.
IDLE
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
EPTState
i
=IDLE
PreviousEPTState
i
=BLOCKED
TaskName
i
= “No Task”
TaskType
i
= 0
PreviousTaskName
i
is set
PrevoiusTaskType
i
is set
BlockedReason
i
= 0
BlockedReasonText
i
= “Not
Blocked”