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SEMI IN TERNA TIONA L STANDA RDS TRACE A BILITY Sem iconduct or Equipm ent and Materials Inte rnational
SEMI MF2166-0304 © SEMI 2004 11
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literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
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the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
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SEMI INTERNATIONAL STANDARDS
TRACEABILITY
Semiconductor Equipment and Materials International
SEMI T1-95 © SEMI 1993, 2003 1
SEMI T1-95 (Reapproved 0303)
SPECIFICATION FOR BACK SURFACE BAR CODE MARKING OF
SILICON WAFERS
This specification was technically approved by the Global Traceability Committee and is the direct
responsibility of the North American Traceability Committee. Current edition approved by the North
American Regional Standards Committee on October 25, 2002. Initially available at www.semi.org
December 2002; to be published March 2003. Originally published in 1993; previously published in 1995.
NOTICE: The user’s attention is called to the
possibility that compliance with this specification may
require use of an invention covered by patent rights.
By publication of this specification, SEMI takes no
position respecting the validity of any patent rights
asserted in connection with any item mentioned in this
specification. Users of this specification are expressly
advised that determination of any such patent rights,
and the risk of the infringement of such rights, are
entirely their own responsibility.
1 Scope
1.1 This specification defines the content and location
of a back surface bar code marking for silicon wafers.
The code is variable in length from 7 to 18 characters
which are user-definable. A character position is held
constant for the checksum character, but all else is
variable. No other information is encrypted into the
code. This allows the performance requirements of
related bar code reading equipment to be simplified. In
addition, provision is made for an optional
alphanumeric marking of the size specified in SEMI
M12 to enable operator identification of wafers. This
alphanumeric code is not intended to be machine
readable.
NOTE 1: The example as described in Table 1 and Figure 1
pertains to a hard mark applied by the silicon wafer
manufacturer.
1.2 This specification applies to flatted or notched
silicon wafers of nominal diameter 125 mm and larger,
as specified in SEMI M1.
1.3 The bar code can be read bi-directionally without
impairing its decodability.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
2 Referenced Standards
2.1 SEMI Standards
SEMI M1 — Specifications for Polished
Monocrystalline Silicon Wafers
SEMI M12 — Specification for Serial Alphanumeric
Marking of the Front Surface of Wafers
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
3 Terminology
3.1 Definitions
3.1.1 background — of a bar code symbol — the
uniform lighter or more reflective region, including
quiet zones, that provides contrast for the darker bars.
3.1.2 bar — in a bar code symbol — the darker or less
reflective element of the symbol.
3.1.3 bar code density — the number of characters,
exclusive of quiet zones, that can be represented in a
linear unit of measure.
NOTE 2: Bar code density can be expressed in characters per
inch (cpi) or characters per millimeter (cpmm).
3.1.4 bar code symbol — an array of rectangular bars
and spaces that are arranged in a predetermined pattern
following specific rules to represent elements of data
that are referred to as characters.
NOTE 3: The symbol is comprised of message characters and
start/stop characters, check characters, and quiet zones as
required by a particular symbology to form a complete
scannable entity.
3.1.5 bar code character — a single group of bars and
spaces which represent an individual number, letter,
punctuation mark, or other symbol.
3.1.6 bar height — of a bar code symbol — the bar
dimension perpendicular to the bar width.
3.1.7 bar width — of a bar code symbol — the
perpendicular distance across a bar between the points
on opposite edges that have a reflectance that is
midway between the background and bar reflectance.