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SEMI E84-0305 © SEMI 1999, 2005 11 Table 2 Example of the Load Port Specified by CS_0/CS_1 Signal (one PI/O per 2 load ports) PI/O# CS_0 CS_1 Load Port Comment 1 ON OFF LP1 Single Handoff or Continuous Handoff 1 OFF ON L…

SEMI E84-0305 © SEMI 1999, 2005 10

NOTE 1: This figure shows logical concept only. Physical location is not defined by this standard.

Figure 6

Common Parallel I/O for Two Load Ports

OHS (passive type)

PI/O

active equipment

Left

Right

Left

Right

STOCKER

NOTE 1: This figure shows the logical concept only. Physical location is not defined by this standard.

NOTE 2: Decide the left side and right side according to the direction of the equipment from the vehicle.

Figure 7

Common Parallel I/O for Two Load Ports (Interbay AMHS Scenario)

LP1 LP3LP2

Passive Equipment

PI/O#1 PI/O#2

LP4

AGV/RGV/OHT

at PI/O#1 CS_0 specifies LP1 and CS_1 specifies LP2.

at PI/O#2 CS_0 specifies LP3 and CS_1 specifies LP4.

NOTE 1: This figure shows logical concept only. Physical location is not defined by this standard.

Figure 8

Example of Correspondence of CS_0/CS_1 and Load Ports (Top View) - Single PI/O Controls 2 Load Ports

SEMI E84-0305 © SEMI 1999, 2005 11

Table 2 Example of the Load Port Specified by CS_0/CS_1 Signal (one PI/O per 2 load ports)

PI/O# CS_0 CS_1 Load Port Comment

1 ON OFF LP1 Single Handoff or Continuous Handoff

1 OFF ON LP2 Single Handoff or Continuous Handoff

1 ON ON LP1 & LP2 Simultaneous Handoff

2 ON OFF LP3 Single Handoff or Continuous Handoff

2 OFF ON LP4 Single Handoff or Continuous Handoff

2 ON ON LP3 & LP4 Simultaneous Handoff

Table 3 Example of the Load Port Specified by CS_0/CS_1 Signal (one PI/O per load port)

PI/O# CS_0 CS_1 Load Port Comment

1 ON OFF LP1

2 ON OFF LP2

3 ON OFF LP3

4 ON OFF LP4

When a PI/O is dedicated to a single load port, CS_0 is always

on, CS_1 is always off.

Table 4 Example of the Load Port Specified by VS_0/VS_1 Signal (One PI/O per 2 load ports)

Left Load Port Right Load Port

VS_0 ON

OFF





VS_1 ON

OFF





 = Select

× = Not Select

 = Do not care

6.2 Carrier Handoff Sequences

6.2.1 The signals of the enhanced carrier handoff parallel I/O interface compliant to this specification must follow

these defined sequences. The time diagrams of the carrier handoff sequences are shown in Figures 10–29. Figure 10

is a summary of various handoffs including load/unload and single/simultaneous/continuous handoff sequences.

Figure 11 is a transition model of zones. Each change in signal state is numbered in the time diagrams. These

numbers are for reference only and may not correspond with the handoff steps or signal order requirements in ¶6.2.

Event A Event B

signal on

signal off

Figure 9

Key for Timing Diagram Signal States

6.2.2 Load/Unload Boundaries

6.2.2.1 Changes in the signal state are shown and described as boundaries to clarify each step during handshake and

transfer as seen in the signal time diagram in Figure 10 and Tables 5 and 6.

SEMI E84-0305 © SEMI 1999, 2005 12

Table 5 Boundary Description

Description

A Active equipment starts specifying the port.

B Active equipment tries to engage with the passive equipment in a transfer validating its request.

C Passive equipment indicates to the active equipment that it accepts to be engaged in a transfer based in its load port

condition (Load or unload).

D Active equipment agrees with passive equipment intent and indicates is ready for the transfer.

E Passive Equipment replies it is also ready for transfer.

F Start of physical handoff (Assign/resign continuous handoff).

G Passive equipment detects that a carrier has been placed/removed.

H Active equipmrent signals the end of physical handoff.

I Active equipment terminates request for transfer.

J Active equipment signals that the transfer engagement has completed.

K Passive equipment indicates that no further transfer activity will occur between them.

L Active equipment signals acknowledgement of completion of intent to transfer.

M Active equipment indicates passive equipment no intent of further handshake.

N Active equipment drops port request signal to leave.

6.2.3 Zone

6.2.3.1 Specific time intervals are clarified in nesting structure and defined as zones. Each zone is defined in Figure

10 and Table 6.

Table 6 Zones

Zone Definition/Description

Handshake

Active

B to M

This zone indicates the state of communication that active equipment is intending to communicate with passive

equipment.

Start at: VALID ON

End at: VALID OFF (last VALID OFF for continuous handoff)

Requirements – Passive equipment is not bounded to any transfer activity previous to or after these transitions.

Handshake

Engaged

C to L

This zone is included in “Handshake Active”. This zone indicates the state of communication that passive

equipment is responding to active equipment.

Start at: L_REQ ON or U_REQ ON

End at: COPY OFF (last COMPT OFF for continuous handoff)

Requirement – Passive equipment does not perform any physical activity that changes the load or unload

conditions in the equipment after setting L-REQ or U-REQ. Passive equipment shall perform necessary operation

such as clamping or docking after the load operation only after it sets Ready signal OFF.

Handoff

Request

C to L

This zone is included in “Handoff Engaged”. The zone indicates the state of communication that load or unload is

engaged between active equipment and passive equipment.

Load Motion is engaged if L_REQ is ON and unload motion is engaged if U_REQ is ON.

Start at: L_REQ ON or U_REQ ON

End at: COMPT OFF

Requirement – FOUP shall be kept Docked/Clamped while this request is becoming active and passive equipment

shall not perform any physical action during the physical handoff other than the actions required to be ready for

active handoff.

Handoff

Active

E to J

This zone is included in “Handoff Request”. This zone indicates the state if communication and physical condition

that passive equipment is ready for active equipment to perform “Physical Handoff”.

Start at: READY ON

End at: COMPT ON

Requirement – Passive equipment is required to undock/unclamp the FOUP and place it at the load port if the

FOUP is not at the port prior to enter this zone during unload. Passive equipment shall not activate dock/undock

motion and clamp/unclamp motion during loading in this zone.