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SEMI F20-0305 © SEMI 1995, 2005 3 6.2.2 The annealing temperature used to ac hieve the grai n size requirements of ¶6.4.1 s hall be 982 o C (1800 o F) min imu m. 6.3 Composition 6.3.1 Material shall be type 316L stainles…
SEMI F20-0305 © SEMI 1995, 2005 2
E 45 — Recommended Practice for Determining the Inclusion Content of Steel
E 112 — Test Methods for Determining Average Grain Size
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Terminology
4.1 Definitions
4.1.1 inclusion — Indigenous or foreign material within the metal, usually referring to non-metallic compound
particles such as oxides, alumina, sulfides or silicates.
4.1.2 Grades
4.1.2.1 General Purpose (GP) Grade — For components intended for use in chemical distribution systems of
semiconductor manufacturing facilities that do not have stringent cleanliness requirements. Examples are clean dry
air and vacuum lines.
4.1.2.2 High Purity (HP) Grade — For components intended for use in high performance capability chemical
distribution systems of semiconductor manufacturing facilities.
4.1.2.3 Ultra High Purity (UHP) Grade — For components intended for use in advanced chemical distribution
systems of semiconductor manufacturing facilities in which optimum resistance to corrosion and contamination in
critical process chemicals are required.
5 Ordering Information
5.1 Orders for bar, forgings, extruded shapes, plate, or tubular products under this specification shall include:
5.1.1 Grade – General purpose, high purity, or ultra-high purity,
5.1.2 Quantity (kilograms, pounds, meters, inches, or feet),
5.1.3 Cross section description (round, square, hex, etc. or detailed drawing),
5.1.4 Size (nominal diameter or shape dimensions for other than those identified with an extrusion drawing),
5.1.5 Wall thickness (for tubing),
5.1.6 Length (specific or random),
5.1.7 Reference to this specification number, and
5.1.8 Any special and/or supplementary requirements such as melting and refining processes.
6 Requirements
6.1 General
6.1.1 Bar stock, forgings, or extruded shapes furnished under this specification shall conform to the requirements of
ASTM A 182/A 182M, ASTM A 276, ASTM A 479/A 479M, or ASTM A 484/A 484M, and the additional
requirements of this specification.
6.1.2 Plate stock furnished under this specification shall conform to the requirements of ASTM A 240 or A 480/A
480M, and the additional requirements of this specification.
6.1.3 Tubing furnished under this specification shall conform to the requirements of ASTM A 269 or A 632, and
the additional requirements of this specification.
6.1.4 Where the requirements of this specification conflict with referenced specifications, the requirements of this
specification take precedence.
6.2
Manufacture
6.2.1 The stainless steel billet material used for processing shall be manufactured by such melting, casting and
refining processes required to conform to the composition and metallurgical requirements of this specification.
SEMI F20-0305 © SEMI 1995, 2005 3
6.2.2 The annealing temperature used to achieve the grain size requirements of ¶6.4.1 shall be 982
o
C (1800
o
F)
minimum.
6.3 Composition
6.3.1 Material shall be type 316L stainless steel, as specified in Table I of ASTM A 182/A 182M, ASTM A 240,
ASTM A 269, ASTM A 276, ASTM A 479/A 479M, or ASTM A 632, except where otherwise specified herein.
6.3.2 General purpose grade material shall have a composition per ASTM A 269 and ASTM A 632, with the
exception of limited Sulfur 0.012% maximum.
6.3.3 Additional composition requirements for the high purity and ultra-high purity grades are shown in Table 1.
Table 1 Additional Composition Requirements
Element Range – Wt %
Carbon 0.030 Max
Sulfur 0.010 Max
Manganese 1.5 Max
Copper 0.30 Max
#1
Niobium 0.05 Max
Aluminum 0.01 Max
Calcium 0.02 Max
Titanium 0.02 Max
Selenium 0.02 Max
#1
Agreement may be reached between the supplier and the customer to accept a higher level of copper.
6.3.4 Effects of Sulfur content on welding are significant, as discussed in Appendix 1.
6.3.5 Effects of Copper content on welding are discussed in Appendix 2.
6.3.6 No deviations in material composition from the minimum or maximum values specified in the appropriate
ASTM document or herein shall be allowed without approval by the purchaser.
6.4 Metallurgy
6.4.1 Grain size per ASTM E 112 shall be 5 or finer for hot or cold finished product and tubing of nominal size 3
inches in diameter and smaller, and 3 or finer for material stock greater than 3 inches. These requirements may be
modified as agreed upon between supplier and user. Grain size on flats and squares shall be as agreed upon by the
supplier and the user.
6.4.2 The inclusion content of the material shall be determined from representative samples of the material heat in
accordance with ASTM E 45, Method A, but with ratings based on Plate III. Maximum allowable JK ratings at the
billet stage are shown in Table 2.
Table 2 Maximum JK Inclusion Ratings
General Purpose
Grade High Purity Grade
Ultra-High Purity
Grade
Type
Thin Heavy Thin Heavy Thin Heavy
A 2.5 1.0 2.0 1.0 1.5 1.0
B 2.5 1.0 2.0 1.0 1.0 1.0
C 2.5 1.0 2.0 1.0 1.0 1.0
D 2.5 1.0 2.0 1.0 1.0 1.0
6.4.3 Material shall meet the intergranular corrosion test specified in Practice E of ASTM A 262. This requirement
shall apply in the sensitized condition (1 hour at 677°C [1250°F]).
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7 Certification
7.1 A certified copy of the material test report shall be provided at the time of shipment. The material test report
shall include:
7.1.1 The results of the composition analysis, to include all elements required to be controlled by this specification,
made in accordance with ASTM A 751.
7.1.2 Grain size.
7.1.3 JK ratings of inclusion content.
7.1.4 Mechanical properties.
8 Product Labeling
8.1 Material shall be identified with the following information:
8.1.1 Manufacturer’s name,
8.1.2 Purchaser’s name and order number,
8.1.3 ASTM specification number(s),
8.1.4 This specification number,
8.1.5 Heat number, and
8.1.6 Material type (i.e., 316L).