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SEMI E54.4-07 04 © SEMI 1997, 2004 19 NOTICE: SEMI makes no warran ties or representations as to the suitability of the standards set forth herein for any particular application. The d etermination of the su itability of…

SEMI E54.4-0704 © SEMI 1997, 2004 18

❑ Extension to Open Object

❑ Vendor-Specific Object

OBJECT NAME____________________________________________ OBJECT ID_________________

Object Class ID Description Get Set Value Limits

Attributes _____ ____________________ ❑ ❑ ___________________

_____ ____________________ ❑ ❑ ___________________

Vendor

Specific

Object

Implementation

_____ ____________________ ❑ ❑ ___________________

Code (Hex) Service Description Parameter Type/Options

Services __________ ________________ ____________________________

__________ ________________ ____________________________

Object Instance ID Description Get Set Type/Value Limits

Attributes _____ ____________________ ❑ ❑ ___________________

_____ ____________________ ❑ ❑ ___________________

Code (Hex) Service Description Parameter Type/Options

Services __________ ________________ ____________________________

__________ ________________ ____________________________

Meaning of Zero Length I/O Data

Production_____________________________________________________

X Get to indicate that attribute value is returned by the use of Get_Attribute_Single service.

X Set to indicate that attribute value is written to by the use of Set_Attribute_Single service.

F_ 9

SEMI E54.4-0704 © SEMI 1997, 2004 19

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for

any particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. These standards are subject to change without notice.

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the risk of infringement of such rights, are entirely their own responsibility.

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consent of SEMI.

SEMI E54.5-0997 © SEMI 1997, 2004 1

SEMI E54.5-0997 (Withdrawn 0704)

STANDARD FOR SENSOR/ACTUATOR NETWORK

COMMUNICATIONS FOR THE SMART DISTRIBUTED SYSTEM (SDS)

NOTE: This document was previously designated SEMI E60. Because this document is part of a suite of documents, its

designation has been reassigned for ease of reference. Please note that the technical content of this document is unchanged from

the 0697 version.

NOTICE: This document was balloted and approved

for withdrawal in 2004.

1 Purpose

This standard defines a communication protocol based

on the Smart Distributed System (SDS) to enable

communications between intelligent devices on a

sensor/actuator network (SAN) to be used in

semiconductor manufacturing equipment.

1.1 Background and Motivation — SDS provides

interconnection of smart control devices such as

sensors, actuators, and controllers in a fast-response

time, low-cost network for industrial use. SDS enables

multiple devices to share a single bus, thereby

significantly reducing the point-to-point wiring between

controllers, sensors, and actuators. The SDS system is

based on CAN, the controller area network used in the

automotive industry and defined by Bosch.

2 Scope

This document specifies a SAN communications

standard based on the Smart Distributed System (SDS)

specification that is in compliance with the SEMI SAN

Common Device Model specification.

2.1 This document specifies the protocol and services

that compliant intelligent devices must support to

interchange information over this semiconductor

equipment sensor/actuator network.

2.2 This document is used in conjunction with a SEMI

standard SAN Common Device Model specification

and one or more SEMI standard specific device model

specifications (e.g., for a mass flow controller).

Together, the model documents describe the data

structure and behavior that are characteristic of the

various devices on the network. This SAN

communications standard identifies the protocol for the

interaction with such a device over the network to make

the data structures and behavior available to other

devices.

2.3 This standard, together with a sensor/actuator

network interoperability guideline, the sensor/actuator

network common device model, one or more

sensor/actuator network specific device model

documents, and the SDS specifications, form a

complete interoperability standard. The general

sensor/actuator network document architecture is

shown in the Sensor/Actuator Network Common

Device Model document in Figure 1.

Figure 1

Sensor/Actuator Network Related Documents