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SEMI S16-0600 © SEMI 2000 1 SEMI S16-0600 ENVIRONMENTA L, HEALTH A ND S A FETY GUIDELINES FOR SEMICONDUCTOR M ANUFACTURING EQUIPM ENT DISPOS A L These guidelines w ere technically approved by the Global Environm ental, H…

SEMI S15-0200 © SEMI 2000 8

Performance Manufacturer/Technology

Characteristics A. B. C. D E.

Reliability

Replacement/

Replenishment

Resolution

Response Time

RFI/EMI Susceptibility

Self-test

Sensor Exchange

Sensor Specificity

Service and Support

Spare Parts Availability

Special Handling

Considerations

Storage and Shelf-life

Requirements

System Check

System Flexibility

Wake Up Requirements

Warm Up Period

Warranty

NOTICE: SEMI makes no warranties or representations as to the suitability of the guidelines set forth herein for

any particular application. The determination of the suitability of this guideline is solely the responsibility of the

user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other

relevant literature respecting any materials mentioned herein. This guideline is subject to change without notice.

The user’s attention is called to the possibility that compliance with this guideline may require use of copyrighted

material or of an invention covered by patent rights. By publication of this guideline, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

guideline. Users of this guideline are expressly advised that determination of any such patent rights or copyrights,

and the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI S16-0600 © SEMI 20001

SEMI S16-0600

ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINES FOR

SEMICONDUCTOR MANUFACTURING EQUIPMENT DISPOSAL

These guidelines were technically approved by the Global Environmental, Health and Safety Committee and

are the direct responsibility of the Japanese Environmental, Health and Safety Committee. Current edition

approved by the Japanese Regional Standards Committee on April 28, 2000. Initially available on

www.semi.org June 2000; to be published June 2000.

1 Purpose

1.1 This document provides guidelines to minimize

hazards to workers and impacts to the environment

during equipment and component disposal.

2 Scope

2.1 These guidelines apply to the disposal of

semiconductor manufacturing equipment, its materials

and components and equipment design consideration to

facilitate disposal.

2.2 These guidelines are intended to be voluntary best

practices for this industry. These guidelines apply to

disposal parties, equipment designers, equipment

manufacturers, equipment suppliers and equipment

owners. The information should be provided to the

disposal party by the equipment owner prior to contract

negotiations.

2.3 These safety guidelines do not purport to address

all of the safety issues associated with its use. It is the

responsibility of the users of these guidelines to

establish appropriate safety and health practices and

determine the applicability of regulatory limitations

prior to use.

3 Limitation

3.1 These guidelines are not intended to supersede the

applicable codes and regulations of the region where

the equipment is disposed.

3.2 Section 6 in these guidelines should be applied not

to existing models and subsystems but to newly

designed models and subsystems after publication of

these guidelines.

4 Referenced Standards

4.1 SEMI Standards

SEMI S1  Safety Guidelines for Visual Hazard Alerts

SEMI S2  Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

SEMI S10  Safety Guideline for Risk Assessment

SEMI S12  Environment, Health and Safety

Guidelines for Equipment Decontamination

SEMI S13  Safety Guidelines for Operation and

Maintenance Manuals Used with Semiconductor

Manufacturing Equipment

4.2 ISO Documents

ISO11469  Plastics; Generic Identification and

Marking of Plastic Products

ISO14001  1996 Environment Management Systems,

Specifications with Guideline for Use

4.3 CEN

/ CENELEC

Document

EN1050  Safety of Machinery—Principles for Risk

Assessment

4.4 OSHA Document

29 CFR 1910. 1200  Labor

NOTE 1: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

5 Terminology

5.1 Terminology defined in SEMI S1, S2, S12, and

S13 should be referred to except if otherwise specified

below.

5.1.1 decontaminate



to remove all known hazards

from equipment, including chemical, physical,

electrical, to a level that will not pose a threat or harm

to humans or the environment. This level may be set by

each country, state and local regulations or industry

practice.

5.1.2 decontamination



the process required to

remove hazards to an acceptable level of risk (see

Section 5.1).

1 International Standards Organization, 1, rue de Varembe, Case

postale 56, CH-1211 Geneve 20, Switzerland.

2 European Committee for Standardization, 36, rue de Stassart, B-

1050 Brussels, Belgium

3 European Committee for Electrotechnical Standardization, Rue de

Stassart, 35, B-1050 Brussels, Belgium

4 US Government Printing Office, Washington, D.C. 20402

SEMI S16-0600 © SEMI 2000 2

5.1.3 disposal



to dispose of equipment and/or

component/material based on legislation or

industry/regional standard practices.

5.1.4 disposal party



a party who disposes of

equipment and its components.

5.1.5 EMAS



Eco-Management and Audit Scheme

which came into force in July, 1993 and operational in

the EU Member States in April, 1995.

5.1.6 equipment owner



a party who surrenders

equipment to a disposal party or disposals of potentially

contaminated materials or components.

5.1.7 hazardous energy



energy with the potential to

affect human health or the environment.

5.1.8 hazardous material



materials including

chemicals (solid, liquid or gas) that pose a threat to the

environment or human health as defined by

international, each country and local regulations.

5.1.9 Material Safety Data Sheet (MSDS)



written or

printed material concerning chemical elements and

compounds, including hazardous materials, prepared in

accordance with applicable standards such as the

International Labor Convention (ILC) No. 170,

provisions of USA government regulation 29 CFR

1910,1200, or Canadian WHMIS (Workplace

Hazardous Material Information System).

6 Equipment Design for Disposal

6.1 The equipment design should comply with

environment section of SEMI S2.

6.2 The equipment design should consider the

following regarding disassembly prior to waste

treatment:

6.2.1 The equipment design should encourage

refurbishing, reuse or recycling.

6.2.1.1 The equipment design should enable

disassembly down to the component or subassembly

size to facilitate refurbishing or recycling.

6.2.1.2 The equipment design should provide for the

ability to appropriately decontaminate all components.

6.2.2 The equipment design should consider enabling

all hazardous energies in/on the equipment to be

reduced to a non-hazardous level upon equipment

disassembly. If a hazardous energy still remains, see

Section 7 of this document.

6.2.2.1 This includes the ability to release or remove

any trapped materials.

6.2.3 The equipment design should avoid mixing of

incompatible chemicals upon equipment disassembly.

If this is not feasible, an appropriate hazard alert label

based on SEMI S1 should be affixed at each applicable

position (see Section 7 of this document).

6.2.4 The equipment design should prevent release of

hazardous materials to the environment upon equipment

disassembly. If this is not feasible, see Section 7 of this

document.

6.3 Chemicals used to maintain the equipment or

chemicals used in the baseline process should comply

with following sub-sections.

6.3.1 Materials for which special disposal procedures

are required, such as batteries (lithium, ni-cad, mercury

and silver), mercury and fluorescent lamps, and other

potentially hazardous material should be accompanied

by material safety data sheet (MSDS) or other

document describing necessary information for disposal

and instructions for safe handling and disposal.

6.3.2 Additional information on proper disposal of

materials, designed into the equipment with the intent

of being contaminated but disposable, but not

hazardous themselves until contaminated, such as

absorbents and adsorbents, should also be provided

with disposal procedures which minimize

environmental impact and personnel effect.

6.3.3 Equipment containing ionizing radiation sources

subject to licensing by federal or local agencies should

be constructed so as to allow the easy removal of

ionizing radiation sources. Disposal of ionizing

radiation sources must be in compliance with applicable

each country, state and local regulations.

6.4 Construction materials and components of

equipment should be selected by considering their

environmental impacts based on the supplier’s

environment management program. Environment

management programs should be constructed based on

ISO14001, EMAS or other environment management

system.

6.5 The hazardous and primary construction materials

of equipment should be provided in document such as

operation and/or maintenance manuals based on the

supplier’s environment management program.

6.5.1 Recycling category identification should be

molded as part of the material or labeled on the

material. This requirement should only be applied to

non-metallic materials which are capable of being

molded or labeled.

6.5.2 Identification and marking of plastics should

comply with ISO11469 unless local regulations differ.

This requirement should be applied to only materials

which are able to be molded or labeled.