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SEMI E54.3-0698 © SEMI 1998, 2004 22 8.13.1.1 Dat a — An attribute with the following list of attributes within its structure: Table 35 A ssembly-MFC Data List Data Index Source Object ID Source Attribute ID Description …

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SEMI E54.3-0698 © SEMI 1998, 2004 21
8.12.1.4 Initial and Default Values
Table 32 SISO-Setpoint Object Attribute Initial and Default Values
Attribute Initial Value Default Value Comment
Ramp Type LVV Disable
Ramp Rate LVV 0
Ratio LVV 1.0
8.12.2 SISO-Setpoint Object Behavior — The general behavior exhibited by the SISO-Setpoint object instance is
defined in SEMI E54.1. The specific behavior associated with this object is defined below.
8.12.2.1 SISO-Setpoint OPERATING Application Process–Ramp — The ramp type and ramp rate attributes
determine the conditions under which the value of the output attribute is calculated and modified by this application
process. The ramp rate attribute is defined to express the rate at which the output attribute is ramped to the value of
the input attribute based on the value of the ramp type attribute. Table 33 describes the behavior of the SISO-
Setpoint object instance based on the value of the ramp type attribute.
Table 33 SISO-Setpoint Object Behavior - Ramp
Ramp Type Value SISO-Setpoint Object Instance Behavior
Disabled Achieve a new output value in one step.
Time in Seconds Achieve a new output value in the time interval specified by the ramp rate attribute.
Amount per Second Achieve a new output value in the amount per second increments specified by the ramp rate
attribute.
8.12.2.2 SISO-Setpoint OPERATING Application Process–Ratio — Prior to the application of the Ramp
calculation, a multiplier is applied to the value of the input attribute. The value of the ratio attribute is multiplied to
the value of the input attribute, and the result becomes the value which is used in the ramp calculation.
The combined formula for the SISO-Setpoint object is as follows:
Output = F(x)
where: F is the function as defined by ramp type above
and: x = (ratio)(input)
8.13 Assembly-MFC Object — The Assembly-MFC object inherits attributes, services, and behavior from the
Assembly object. The Assembly object instance is the device component which provides a mechanism of grouping
more than one attribute from one or more object instances into a single data structure for communication over the
network.
8.13.1 Assembly-MFC Object Attributes
Table 34 Assembly-MFC Object Attributes
Attribute Name
Attribute
Identifier
Access Network
Required
Form
Data A1 R Yes Structure as defined below.
SEMI E54.3-0698 © SEMI 1998, 2004 22
8.13.1.1 Data — An attribute with the following list of attributes within its structure:
Table 35 Assembly-MFC Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 MFD8 A1 Controller
Status
3 MFD3 A4 Sensor-AI-MF
Value
4 MFD8 A4 Controller
Setpoint
5 MFD8 A6 Controller
Control Variable
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SEMI E54.4-0704 © SEMI 1997, 2004 1
SEMI E54.4-0704
STANDARD FOR SENSOR/ACTUATOR NETWORK
COMMUNICATIONS FOR DEVICENET
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North AmericanRegional Standards Committee on April 22, 2004. Initially available at www.semi.org June
2004; to be published July 2004. Originally published September 1997.
1 Purpose
1.1 This standard defines a communication
specification based on the DeviceNet protocol to enable
communications between intelligent devices on a
sensor/actuator network (SAN) that operate according
to SEMI- specified device models (common and device
specific) in a semiconductor manufacturing tool.
1.2 Background and Motivation — DeviceNet provides
for networking between simple industrial devices (e.g.,
sensors and actuators) and higher level devices such as
controllers. DeviceNet provides:
• A solution to low-level device networking.
• Access to intelligence present in low-level devices.
• Master/Slave and Peer-to-Peer capabilities.
1.2.1 DeviceNet is based on the Controller Area
Network (CAN) technology. CAN defines a Media
Access Control (MAC) methodology and physical
signaling characteristics. DeviceNet wraps a
communication model and protocol as well as a
complete Physical Layer definition around CAN to
provide a complete network definition.
1.3 This document enables communications between
intelligent devices on a SEMI-compliant SAN by
providing a presentation mapping of common and
specific device network visible structure and behavior
to a DeviceNet network.
2 Scope
2.1 This document specifies the protocol and services
that compliant intelligent devices must support to
interchange information over this semiconductor
equipment sensor/actuator network.
2.2 This document specifies the utilization of the
DeviceNet protocol to present externally visible device
structure and behavior, specified in the Common
Device Model (CDM) and appropriate Specific Device
Models (SDM' s), on a DeviceNet network.
2.3 This document is used in conjunction with a SEMI
standard SAN Common Device Model specification
and one or more SEMI standard-specific device model
specifications (e.g., for a mass flow controller).
Together, they describe the externally visible data
structure and behavior of devices using the DeviceNet
networking capability in a SEMI-compliant SAN
system.
2.4 This standard, together with a sensor/actuator
network interoperability guideline, the sensor/actuator
network common device model, one or more
sensor/actuator network specific device model
documents, and the DeviceNet specifications, form a
complete interoperability standard. The general
sensor/actuator network document architecture is
shown in the Sensor/Actuator Network Common
Device Model document in Figure 1.