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SEMI G6-89 © SEMI 1 983, 199 6 1 SEMI G6-89 TEST METHOD FOR SEA L RING FL AT NESS 1 Purpose This specification covers t he method for determining the maxi mu m d evi atio n be tween t he sea l ri ng and a reference plan …

SEMI G5-87 © SEMI 1980, 1996 6

Figure 5

Glass Misalignment

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI G6-89 © SEMI 1983, 19961

SEMI G6-89

TEST METHOD FOR SEAL RING FLATNESS

1 Purpose

This specification covers the method for determining

the maximum deviation between the seal ring and a

reference plane defined by three fixed points on the seal

ring. This method will not work on parts smaller than

0.330" × 0.330".

2 Equipment

2.1 Flat plate (black granite calibrated at ± 0.000025"

(± 0.000835 mm) or equivalent).

2.2 Fixture Clamps — Three required (See Figure 1).

2.3 Fixture Base — (See Figure 1).

2.4 Test Indicator — (Hamilton Kwik Check or

equivalent).

Figure 1

Fixture Base and Clamp Assembly

3 Preparation

3.1 Fixture clamps shall be adjusted for part to be

measured (see Figure 2).

3.2 The gaging fixture is to be calibrated with a

precision ground gage block before each sample is

measured.

3.2.1 Place gage block under the three fixture clamp

points and release center cylinder to hold in place.

3.2.2 Position fixture base so the point of the test

indicator is on the gage block.

3.2.3 Move fixture base so the point of the test

indicator traverses the entire surface of the gage block.

The total deviation read on the test indicator shall not

exceed 0.0005" (0.013 mm).

Figure 2

Fixture Clamp Orientation

4 Procedure

4.1 Place the package under the three fixture clamp

points and release cylinder to hold in place (see Figure

2) for orientation of package seal ring and fixture clamp

points.

4.2 Position fixture base so the point of the test

indicator is on the package seal ring.

4.3 Move fixture base so the point of the test indicator

traverses the length of the seal ring.

4.3.1 Move fixture base so the point of the test

indicator stays in the middle of the seal ring.

4.3.2 Test indicator shall be relocated twice to get

around fixture points.

5 Evaluation

If material buildup on the seal ring is visible with the

unaided eye, the part shall not be used for this

measurement.

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.