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SEMI 30.1-0200 © SEMI 1998, 2000 38 15 GEM Capabilities The purpose of this section is to speci fy any SEMI E3 0 additional capabilities that are required to be supported by this class o f equipment. 15.1 Requi rement s …

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SEMI 30.1-0200 © SEMI 1998, 200037
14.4 Event Report and ISEM Table Transfer Command Scenario
COMMENT HOST EQUIPMENT COMMENT
The equipment is in the IDLE
processing state and in the
ONLINE REMOTE control state.
Host defines report S2,F33-->
with AnomalyTableName
and AnomalyTableType
<--S2,F34 Define Report Acknowledge
Link report to S2,F35-->
RunDataComplete event
<--S2,F36 Link Event Report Acknowledge
Enable event S2,F37-->
<--S2,F38 Enable Event Acknowledge
Host sends an ISEM S13,F13-->
table to the equipment.
<--S13,F14 Table Data Acknowledge
Host sends more tables S13,F13-->
if needed.
<--S13,F14 Table Data Acknowledge
Host sends a PP-SELECT S2,F49-->
command specifying a
”CARRIERBLD” <--S2,F50 Remote Command Acknowledge
The equipment transitions
from IDLE -> SETTING UP ->
READY.
START S2,F41-->
<--S2,F42 Host Command Acknowledge
READY -> LOAD.
[WHILE] Not End of Run
LOAD -> WORKING
WORKING -> UNLOAD
UNLOAD -> LOAD
[END WHILE]
LOAD -> STOPPING
STOPPING -> IDLE
<--S6,F11 RunDataComplete event with
AnomalyTableName and
AnomalyTableType.
Event Report Acknowledge S6,F12-->
Host sends Table S13,F15-->
DataRequest
<--S13,F16 Equipment sends requested
table TBLACK=0ifno
errors.
SEMI 30.1-0200 © SEMI 1998, 2000 38
15 GEM Capabilities
The purpose of this section is to specify any SEMI E30
additional capabilities that are required to be supported
by this class of equipment.
15.1 Requirements
15.1.1 This standard requires that the SEMI E30
fundamental requirements and additional capabilities
have been implemented on the ISEM equipment with
the exception of limits monitoring and trace reporting.
If these capabilities are implemented, they shall be
implemented as required by the SEMI E30 document.
The following SEMI E30 additional capabilities
required by ISEM are:
• Dynamic Event Report Configuration
• Variable Data Collection
• Status Data Collection
• Alarm Management
• Remote Control
• Equipment Constants
• Process Program Management
• Spooling
• Trace Data Collection (optional)
• Control (Host-Initiated)
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
SEMI 30.1-0200 © SEMI 1998, 200039
RELATED INFORMATION 1
NOTE: This related information is not an official part of
SEMI E30.1 and was approved for publication by full letter
ballot procedures on September 3, 1999.
R1-1 Defect Classification Code Management
The purpose of this section is to provide a method and
specific formats to define, identify, and communicate
coordinate systems and site locations on substrates for
alignment sites, anomaly locations, and other sites used
by the ISEM equipment.
R1-1.1 Classification Codes and Defect Classification
— One function of review equipment is to view
previously identified anomalies and to associate a
defect classification code with each anomaly. A
classification code is an identifier for a classification
description.
Typically, the review equipment has a set of defect
classification codes and their descriptions available to
the operator. Then, for each anomaly, the operator
selects a particular code to be associated with that
anomaly. This action is defect classification.
The set of valid classification codes and their
descriptions may change from one run to another. For
example, the same main process program could be used
with different substrate levels, and each level may use a
different set of classification codes. The purpose of this
section is to provide the requirements so that a user can
both define several sets of classification codes and their
descriptions and can also manage these sets on ISEM
equipment.
R1-1.2 Requirements
• Each set of classification codes and their
descriptions shall have an identifier, known as a
classification code set ID.
• Review equipment shall provide a means for the
user (the host or the operator) to define a
classification code set, consisting of (a) the
classification code set ID and (b) the list of
classification codes and their descriptions.
• Equipment shall provide a means to manage the
various classification code sets.
• A main process program shall include a process
program variable that specifies the particular
classification code set ID to be used.
• Equipment vendor shall provide documentation to
the user regarding how to define and manage
classification code sets.
Comment: In one implementation, the equipment
considers a classification code set to be a sub-process
program or an ISEM table. This would allow the user to
identify a classification code set by name (using a
PPID) or a table name and thereby managing this sub-
process program with the SEMI E30 Process Program
Capability or with SEMI E58 ARAMS tables.
R1-2 Reporting Coordinates and Coordinate
Systems
The purpose of this section is to provide a method and
specific formats to define, identify, and communicate
coordinate systems and site locations on substrates for
alignment sites, anomaly locations, and other sites used
by ISEM equipment.
The ISEM-required formats are intended to minimize
the number and type of site location format
transformations needing to be supported by both
equipment suppliers and users.
All ISEM-required site location formats involve the use
of an ISEM-defined right-handed Cartesian coordinate
system, established on substrates in an ISEM-defined
manner. The scope of the detailed methods in this
section are specific to unpatterned and patterned wafers
in this release, but the section is intended to be general
enough in methodology so that it can be extended to
other substrate types in future revisions of ISEM, if
required.
The purpose of inspection and review equipment is to
locate, evaluate, classify, and report anomalies on
substrates. ISEM equipment may deal with either
unpatterned or patterned substrates or both. In most
cases, the anomaly location is part of the information
reported and/or used by ISEM equipment. An anomaly
location is reported at a particular site with x,y
coordinates in a particular coordinate system. Site
coordinates are also used by ISEM equipment for the
alignment sites for defining a coordinate system on a
substrate. A standard method is needed to define a
coordinate system and to report site coordinates for
both alignment sites, anomaly locations, and any other
reference sites needed by ISEM equipment. A standard
method is essential in order to transfer the anomaly site
information from one equipment to another.
R1-2.1 Site Location Accuracy — Each equipment has
an accuracy with which it can define or locate a site as
being within a certain area. This area associated with a
site is determined by the equipment accuracy, based on
the accuracy of its motion and imaging systems to
locate a site, as well as on the accuracy with which it
can define the coordinate system on the substrate.