semi合集-English.pdf - 第5801页
SEMI P23-0200 © SEMI 1993 , 2000 24 50 u m 50 u m De t a i l 1 u m 1 u m 14. 0 5. 0 9.0 7. 0 3. 5 2. 0 1. 5 1.5 3. 5 3.5 3.5 2. 0 2. 0 2. 0 2. 0 5. 0 1. 5 E F ; Film Pattern ; Defect Position Figure 19 Sub Cell Wiring (T…
SEMI P23-0200 © SEMI 1993, 200023
50 um
50 um
Det ail
1 um
1 um
2.0
14.0
8.5 5.5
7.0
3.5
2.0
3.5
3.5
2.0
2.0
1.5
1.5
2.0
I/ J
; Film Pattern
; Defect Position
Figure 18
Sub Cell
Wiring (Type D)
SEMI P23-0200 © SEMI 1993, 2000 24
50 um
50 um
Detai l
1 um
1 um
14.0
5.0 9.0
7.0
3.5
2.0
1.5
1.5
3.5
3.5
3.5
2.0
2.0
2.0
2.0
5.0 1.5
E
F
; Film Pattern
; Defect Position
Figure 19
Sub Cell
Wiring (Type E)
SEMI P23-0200 © SEMI 1993, 200025
50 um
50 um
Detail
1 um
1 um
14.0
5.258.75
7.0
2.5
2.0
2.5
3.0
2..0
2.0
7.0
1.5
(45deg.)
<1.590>
3.25
M
N
; Film Pattern
; Defect Position
Figure 20
Sub Cell
Wiring (Type F)