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SEMI S23-0705 © SEMI 2005 10 Data Title Description Test Location Where the measurement testing was done such as the p articular test laboratory or manufacturing lo cation. Principal Test Personnel The principal personne…
SEMI S23-0705 © SEMI 2005 9
RELATED INFORMATION 1
ADDITIONAL USE RATE MEASUREMENT AND CONVERSION
FACTOR INFORMATION
NOTICE: This related information is not an official part of SEMI S23 and was derived from the Japanese
Environmental, Health, & Safety committee. This related information was approved for publication by full letter
ballot on May 20, 2005.
NOTE: This RI is a summary of SEAJ document “SEAJ-E-002E Guideline for Energy Quantification on
Semiconductor Manufacturing Equipment and Utilities” and was approved to be published as related information of
this document as written.
R1-1 Other Use rate Measurements and Data
R1-1.1 Equipment recipes describe how the various controls of the equipment should be set in order to achieve a
desired effect on the substrate or other material being treated by the equipment. Because equipment control elements
are different from equipment to equipment, the parameters of a recipe will also be different even if the desired effect
on the substrate or other material is the same.
R1-1.2 Within this guide, “baseline recipe” should be understood as the collection of recipe parameters intended to
produce a specific desired effect. Therefore, the desired effect can be the same from equipment to equipment even
though the parameters of the recipes may be different.
R1-1.3 For processing measurements, the average value of each parameter over the course of the processing cycle
should be noted. If the equipment processes substrates, a 10 substrate average should be recorded. If the equipment
processes a material other than substrates (e.g. a vacuum pump), the average over a 30 minute processing period
should be recorded.
R1-1.4 For idle measurements, the average value of each parameter over a period of 30 minutes should be recorded
R1-1.5 A supplier may need to measure additional metrics for other purposes (e.g. to support other metrics-
gathering requirements and criteria relevant to supplier-user agreements). Adding those metrics to the energy
conservation utility and material use rate measurement effort may be beneficial.
R1-1.6 Semiconductor manufacturing equipment typically processes wafers or other substrates. It is useful to
characterize utility and material use rate during processing in terms of per-wafer amounts needed to achieve the
desired effect of the recipe.
R1-1.7 By providing an equipment throughput metric (i.e., substrates per hour) with supporting throughput
calculation information, the per hour processing metrics can be converted, approximately, into “per wafer” metrics.
With further calculations based on the useful area of the wafers processed, the utilities and materials used per cm
2
during processing can be estimated.
R1-1.8 The data described in Table R1-1 should be recorded in addition to the use rate data of Table 1 in the main
body of this guide. The goal is to record enough information to document the measurement event thoroughly so that
it can be reproduced at a later time, perhaps, for example, to analyze the effect of equipment changes.
R1-1.9 Some of the data (e.g. wafer size) in Table R1-1 may not be applicable to the equipment under
consideration.
Table R1-1 Recommended Additional Data to Record for the Measurement Event
Data Title Description
Date When the measurements were taken.
Equipment Under Test (EUT) The equipment from which the measurements taken. Provide
information such as general description, model number, and serial
number.
EUT Configuration The configuration of the equipment during the measurements, such as
sub-systems that were or were not used and optional hardware that was
installed.
SEMI S23-0705 © SEMI 2005 10
Data Title Description
Test Location Where the measurement testing was done such as the particular test
laboratory or manufacturing location.
Principal Test Personnel The principal personnel involved in developing the test plan and
conducting the testing.
Test Recipe The recipe used when conducting the test
Test Throughput (per hour) How many substrates or other material quantity was processed per hour
during the test.
Throughput Calculation Method How is throughput determined?
Wafer Size What size wafer is processed by the equipment.
Test Duration How long the equipment was operating for gathering the test data.
Test Setup How the several pieces of test equipment were connected to the EUT.
Test Equipment and relevant Calibration Information
for measuring;
Exhaust
Vacuum
Dry Air
Nitrogen
Process Gas (at or above atmospheric pressure)
Process Gas (below atmospheric pressure)
Process Solids
Process Liquids
Cooling Water
Ultra Pure Water
Electricity
Heat Load
The test equipment that was used to measure the use rate of each utility
or material and its relevant calibration information such as when the
test equipment was last calibrated and when it should be calibrated
again.
R1-2 Equivalent Energy Conversion Factors
R1-2.1 General
R1-2.1.1 The conversion factors given in Table 2 of this guide are based on the following factory model;
Clean room area: 4,400 m
2
,
Class 1: 20%,
Class 1000: 80%,
Wafer Size: 200 mm, and
Wafer Start per month: 10,000.
R1-2.1.1.1 While the conversion factors derived from this model will not be exactly correct for other facilities, they
can at least be used as a starting point for identifying the relative differences in energy impact among the utilities
and materials listed in Table 1 of the guide.
R1-2.1.2 The conversion calculations of this guide can be used to express the estimated total equivalent energy that
the equipment will consume in one year of use. The use rate measurements (units per hour) can be multiplied by the
number of hours per year the equipment is estimated to be in the processing or idle state. This yields a total volume
or mass of a utility or material consumed per year which is then multiplied by the energy conversion factor.
R1-2.1.3 Table R1-2 contains a calculation model and an example calculation.
R1-2.1.4 The heat load calculation follows a model that is different than the other items. It is shown in Table R1-3.
SEMI S23-0705 © SEMI 2005 11
R1-2.2 Estimated Hours per Year
R1-2.2.1 It is recommended that the hours per year the equipment spends processing and idling be estimated as
6,132 and 2,190 respectively. This assumes 8,760 hours per year of opportunity. And, it assumes the equipment will
be shut down (i.e. not consuming) for 5% of the 8,760 hours. To provide reporting commonality within the
semiconductor industry, it is strongly recommended that alternate values not be used.
NOTE 1: The number of hours per year a piece of equipment spends processing or idling are not solely related to the
equipment’s “availability” (described in SEMI E10). The number also depends on the processing demands of the end user, which
may be less than the equipment’s availability.
R1-2.3 Conversion Factor Basis
R1-2.3.1 A key basis for some conversion factors is the condition(s) under which the conversion factor was
developed. For example, the conversion factor for water supplied at 25C might be different from the conversion
factor for water supplied at room temperature because in addition to the energy used to distribute the water, energy
is used to refrigerate the water.
R1-2.3.2 Table 2 of the guide includes some of the basis conditions for the recommended conversion factors.
Where the actual conditions of the utility or material supply are different from these basis conditions, the conversion
factor is less valid. There is no recommended method for adjusting the factor in response to these differences in all
cases.
R1-2.4 Alternate Conversion Factors
R1-2.4.1 An equipment end user may have developed a set of conversion factors that they prefer for their business
model. It is recommended that these also be considered.
R1-2.4.2 An alternate set of conversion factors for different equipment use regions may be useful for analyzing the
impact of differing utility and material production efficiencies in those regions.
R1-2.4.3 A spreadsheet program can be used to show several different sets of conversion factors and the related
conversion outcomes for a given set of utility and materials use rate data.
R1-2.4.4 The development of meaningful conversion factors requires a certain amount of data gathering and
analysis. It is recommended that if alternate conversion factors are used, the supporting data and analysis be
prepared and made available to interested parties for review.
R1-2.5 Process Chemical Conversion Factors
R1-2.5.1 It is likely that any process chemical conversion factor (i.e. the energy consumed to produce one cubic
meter process chemical) is much greater than any other conversion factor listed in Table 3.
R1-2.5.2 A very rough analysis based on data from other industries, indicates, for example, that simple chemicals
such as K20 or ethanol have energy equivalents much greater than 1000 kWh/m3.
R1-2.6 Heat Load Calculation
R1-2.6.1 The provided heat load calculation is based on the idea that all electrical energy supplied to the equipment
becomes heat input which is transferred by one of three heat transfer modes.
R1-2.6.2 If there are other sources of heat within the equipment, such as chemical reactions, that are significant,
they should also be considered part of the heat input.
R1-2.6.3 The heat energy is typically transferred by radiation and convection into the environment surrounding the
equipment and remaining heat energy is transferred by convection to the process exhaust and conduction to the
process cooling water. Theoretically all three heat transfer modes may be involved in for all heat transfer practices
(tool to room, tool to exhaust, and tool to cooling water).
R1-2.6.4 The heat removed by the air and water is determined through calculations involving particular constants
(i.e. specific heat and specific gravity).
R1-2.6.5 The heat load calculation is taken in four steps. First estimate the electrical energy delivered to the
equipment per year. Next estimate the energy removed per year by exhausted air using the volume of air removed,
the input-output air temperature difference, and the “Removal via Air” conversion factor. Then estimate the energy