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SEMI T3-0302 © SEMI 1995, 2002 6 b. the concatenation character (“+ ”) and Data Identifier for th e ID of the w afer in that s lot (“32T”) and the ten - character waf er ID including the two-ch aracter vendor identif ica…
SEMI T3-0302 © SEMI 1995, 2002 5
6.1.7 Print Quality — The Code 39 print quality shall be B/03/630 or better in accordance with ANSI X3.182. To
assure reading efficiency, the minimum reflectance of the quiet zones shall be 60%, the minimum reflectance of
spaces shall be 51%, and the maximum reflectance of bars shall be 10%.
6.1.8 Symbol Dimensions — Bar code symbol dimensions shall be as listed in Table 3.
6.1.9 Other Bar Code Symbology — Code 128 may be used in lieu of Code 39. Users must verify that this code fits
within the available label space.
6.2 Human-Readable Interpretation Symbols
6.2.1 Each bar code symbol data field on the label shall have an associated human-readable data field either
immediately above or immediately below it. The symbol in each of the human-readable data fields shall contain all
the message characters contained in the associated bar code data field. Start and stop characters shall not be
included, but the data field identifiers and concatenation symbols shall be included.
6.2.2 The nominal height of the human-readable characters shall be 2.0 mm (0.08 in.).
6.2.3 There shall be a clear space of 0.5 mm (0.02 in.) above and below each human-readable symbol.
6.3 Data Matrix Code Symbol
6.3.1 The label may contain up to two identical square two-dimensional matrix code symbols each with up to 682
message characters when six-bit characters are encoded using the EDIFACT encodation scheme described in
Annexe J3 of ISO/IEC 16022 (see also Table 11 in ISO/IEC 16022 ).
6.3.2 The first six characters shall contain the message header, in accordance with EIA 706; this header identifies a
message that contains data identifiers that are in accordance with ANSI MH10.8.2. The header content is not
printed.
6.3.3 The next 71 characters in the matrix code symbol shall contain the information included in the two bar code
symbols on the label, together with additional concatenation symbols, as summarized in Table 4. In the absence of a
character at any assigned location, a dash (-) shall be used. This information shall also be included if the bar codes
are not printed.
Table 3 Nominal Dimensions of Bar Code 39 Symbols
Symbol Dimension Metric (SI) Value U.S. Customary Value
- number of message characters 35 35
X width of narrow bar 0.125 mm 0.00493 in.
N ratio of wide to narrow bar width 2.0 2.0
I nominal intercharacter gap 0.1251 mm 0.00493 in.
H bar height (See Note 1.)
9.0 mm 0.35 in.
L' bar code symbol length (excl. quiet zones) 60.06 mm 2.365 in.
- bar code density (excl. quiet zones) 0.583 cpmm 14.80 cpi
Q width of quiet zone (See Note 1.)
6.35 mm 0.25 in.
L total length of bar code symbol 72.76 mm 2.865 in.
NOTE 1: The metric (SI) and U.S. Customary values of this dimension are not exact equivalents; the dimension has been rounded to obtain
rational values in both systems.
6.3.4 For boxes to be used for wafers between 100 and 200 mm in diameter, the content of the remainder of the data
matrix code symbol is optional, as agreed between the customer and supplier. However, it is recommended that the
remaining message characters in the Data Matrix code symbol include the following 500-character wafer
identification information. For labels to be used on 300 mm FOSBs, the wafer identification information is
required, in accordance with SEMI M45.
6.3.4.1 These next 500 characters identify the slot number and individual wafer identification of each wafer in the
box, with a string of 25 twenty-character fields. Each of these fields contains:
a. The concatenation character (“+ ”) and Data Identifier for the slot ID (“31T”) and a two-digit number of the slot,
and
SEMI T3-0302 © SEMI 1995, 2002 6
b. the concatenation character (“+ ”) and Data Identifier for the ID of the wafer in that slot (“32T”) and the ten-
character wafer ID including the two-character vendor identification code. The wafer ID number is comprised
of
i) the first ten characters of the marking codes specified in SEMI M12, SEMI M13, or SEMI T2, or
ii) all ten characters of the marking code specified in SEMI T7.
NOTE 4: The content of the marking code specified in SEMI T1 is not specified. This standard may not be suitable for use with
wafers marked with the marking code specified in SEMI T1.
6.3.4.2 The cassette/box slot sequence assumes slot 01 at the bar end and slot 25 at the other end of the box. Data
matrix code symbols on labels on boxes or cassettes with less than 25 slots shall have one field for each slot.
Table 4 Message Character Content of Matrix Code Symbols
Character
Location Count
Symbol Content Notes
General Information
1–6 6 Message Header <d237>
7 1 Data Identifier “P”
8–41 34 Customer Information (see Table 2) (Customer-assigned)
42–44 3 Concatenation Symbol and Data Identifier “+ 1T”
45–60 16 Lot Number (Supplier-assigned)
61–63 3 Concatenation Symbol and Data Identifier “+ 1V”
64–65 2 Vendor Identification Code (SEMI)
66–67 2 Concatenation Symbol and Data Identifier “+ D”
68–73 6 Labeling Date (YYMMDD) (See Related Information 1)
74–75 2 Concatenation Symbol and Data Identifier “+ Q”
76–7 2 Quantity (unit, EA, implied) (numeric)
77 Subtotal for general information
Wafer Information (Optional, see 6.3.4 and 6.3.4.1)
78–81 4 Concatenation Symbol and Data Identifier “+ 31T”
(See Note 8)
82–83 2 Slot Number (numeric, 01-25)
84–87 4 Concatenation Symbol and Data Identifier “+ 32T”
88–97 10 Wafer Identification Number
20 Subtotal for one wafer
98–577 480 Subtotal for next 24 wafers
500 Subtotal for wafer information
577 Total for General + Wafer Information
Encrypted or Customer-specific Data (Optional)
577–682 up to 105 As needed Otherwise unused character locations (See
Note 9)
NOTE 1: If wafer identification data are not available or are not desired for a particular application, additional supplier-specified and/or
customer-specified data fields may be included in these character locations as agreed upon between customer and supplier. Begin each supplier-
specified field with a data identifier from the series 31T to 34T and each customer-specified field with a data identifier from the series 20T to
24T. Separate adjacent fields with the concatenation symbol (+ ).
NOTE 2: These unused character locations are available for encrypted or unencrypted supplier-specified information or for customer-specified
information. These characters do not appear in the bar code symbol, but only in the Data Matrix Code Symbol. Begin the field with the
concatenation symbol (“+ ”) followed by an appropriate data identifier as defined in Note 1; in the unlikely event that more than one field is
included, begin each field with an appropriate identifier and separate adjacent fields with the concatenation symbol. If the field is not filled
completely with characters it is not necessary to pad with dashes; the encoding software will pad it automatically.
6.3.4.3 All slots shall be represented in the Data Matrix code. The first identification number shall be that of the
wafer in slot 01 at the bar end; the second, that of the wafer in slot 02; and so on. An empty slot shall be designated
SEMI T3-0302 © SEMI 1995, 2002 7
by dashes. For shipping boxes containing 100 to 200 mm diameter wafers, slot 01 is at the bar end of the box. For
300 mm FOSBs, slot 1 is specified by SEMI M31 to be at the bottom of the FOSB.
6.3.5 Any character locations not otherwise used may contain information whose content shall be agreed to between
supplier and customer. These characters may consist of customer-specified data or supplier-specified data (which
may be encrypted) or both.
6.3.6 The data matrix code shall be a square field, constructed in accordance with ISO/IEC 16022, using error
correction code ECC200.
6.3.7 Dot Size — The nominal shape of the dot produced in the matrix may be circular or square, depending on the
printing technique. It is recommended that each " cell" of the data matrix symbol be composed of at least four dots
(a cell with two dots per edge). When printed at 203 dpi, the dot diameter or edge length is 0.125 mm (0.00985 in.).
6.3.8 Symbol Dimensions — Each matrix code symbol shall be composed of 80 rows and 80 columns of cells
spaced equally with cell spacing S (see Figure 3). The nominal outside dimensions of the matrix (C2 and R2 in
Figure 4), printed with 4 dots per cell at 203 dpi is 20 mm.
6.3.9 Border Rows and Columns (see Figure 4)
6.3.9.1 The leftmost border row and the bottom border column shall contain dots in each cell. These are identified
as the primary border row and the primary border column.
6.3.9.2 The opposing (secondary) border row and column shall contain dots in every other cell.
6.3.9.3 These border rows and columns are used by the code reader to determine the origin, size, and orientation of
the matrix.
6.3.9.4 The origin of the matrix code symbol shall be the physical center point of the cell common to the primary
border row and the primary border column.
NOTE 5: This origin location differs from that used in SEMI T2.
6.3.10 Message Characters — The matrix code symbol contains 682 8-bit message characters.
Table 5 Nominal Dimensions of Wafer Box Labels and All Data Fields
Dimension Metric (SI) Value U.S. Customary Value
A (see Note 11) 25 mm 1 in.
B (see Note 11) 0.75 mm 0.04 in.
C (see Note 11) 1.0 mm 0.04 in.
D (see Note 11) 0.50 mm 0.02 in.
E (see Note 11) 2.0 mm 0.08 in.
F (see Note 11) 24.24 mm 0.95 in.
H (see Note 11) 9.0 mm 0.35 in.
J 2.0 mm 0.08 in.
K (see Note 12)
20.0 mm 0.788 in.
L´ 60.06 mm 2.365 in.
L 72.76 mm 2.865 in.
P 119.0 mm 4.69 in.
Q 6.35 mm 0.25 in.
S (see Note 11) 30.0 mm 1.19 in.
T (see Note 11) 24.0 mm 0.95 in.
U (see Note 11) 2.5 mm 0.106 in.
NOTE 1: The Metric (SI) and U.S. Customary values of this dimension are not exact equivalents; the dimension has been rounded to obtain
rational values in both systems.
NOTE 2: Printed at 4 dots/cell and 203 dpi.