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SEMI E79-0304 © SEMI 1999, 2004 12 Flexible-Sequence Cluster T ool Operational Efficiency = (Flexible-Sequence Cluster Tool Production Time)/(Flexible-Sequence Cluster Tool Equipment Uptime) = (378.00 hours)/(489.00 hour…

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SEMI E79-0304 © SEMI 1999, 2004 11
Virtual Machine Theoretical Production Time for Effective Units
= ∑
i
(Effective Units of Recipe i × THT
i
)
Sequence
Effective
Units
Virtual Machine A
VirtualMachine B
Virtual Machine C
S1 275 275 units × 0.3000 hr/unit 275 units × 0.2000 hr/unit
S2 100 100 units × 0.2000 hr/unit 100 units × 0.1500 hr/unit
S3 240 240 units × 0.2000 hr/unit 240 units × 0.1000 hr/unit
S4 400 _____________________ 400 units
× 0.1000 hr/unit 400 units × 0.1500 hr/unit
Virtual Machine
Theoretical Production
Time for Actual Units =
Σ
=
130.50 hours
Σ
=
139.00 hours
Σ
=
75.00 hours
Flexible-Sequence Cluster Tool Theoretical Production Time for Effective Units
= ∑
j
(Theoretical Production Time for Effective Units for Virtual Machine j)
= (130.50 hours) + (139.00 hours) + (75.00 hours) = 344.50 hours
Virtual Machine Production Time (given)
Flexible-Sequence Cluster Tool Production Time
= ∑
j
(Production Time for Virtual Machine i)
= (150.00 hours) + (148.00 hours) + (80.00 hours) = 378.00 hours
Virtual Machine Equipment Uptime
= (Virtual Machine Production Time) + (Virtual Machine Standby Time)
+ (Virtual Machine Engineering Time)
Virtual Machine A
Virtual Machine B Virtual Machine C
Engineering Time 3.00 hours 5.00 hours 0.00 hours
Standby Time 10.00 hours 5.00 hours 88.00 hours
Production Time
+150.00 hours +148.00 hours +80.00 hours
Equipment Uptime 163.00 hours 158.00 hours 168.00 hours
Flexible-Sequence Cluster Tool Equipment Uptime = ∑
j
(Equipment Uptime for Virtual Machine j)
= (163.00 hours) + (158.00 hours) + (168.00 hours) = 489.00 hours
Virtual Machine Total Time (given)
Flexible-Sequence Cluster Tool Total Time = (Number of Virtual Machines) × (Total Time Observed)
= (3 Virtual Machines) × (168 hours) = 504 hours
A1-2.3 Productivity Metrics
Virtual Machine Availability Efficiency = (Virtual Machine Equipment Uptime)/(Total Time)
Virtual Machine A
Virtual Machine B Virtual Machine C
= (163.00 hours)/(168.00 hours)
= 0.9702
= (158.00 hours)/(168.00 hours)
= 0.9405
= (168.00 hours)/(168.00 hours)
= 1.000
Flexible-Sequence Cluster Tool Availability Efficiency
= (Flexible-Sequence Cluster Tool Equipment Uptime)/(Flexible-Sequence Cluster Tool Total Time)
= (489.00 hours)/(504.00 hours)
= 0.9702
Virtual Machine Operational Efficiency
= (Virtual Machine Production Time)
÷
(Virtual Machine Equipment Uptime)
Virtual Machine A Virtual Machine B Virtual Machine C
= (150.00 hours)/(163.00 hours)
= 0.9202
= (148.00 hours)/(158.00 hours)
= 0.9367
= (80.00 hours)/(168.00 hours)
= 0.4762
SEMI E79-0304 © SEMI 1999, 2004 12
Flexible-Sequence Cluster Tool Operational Efficiency
= (Flexible-Sequence Cluster Tool Production Time)/(Flexible-Sequence Cluster Tool Equipment Uptime)
= (378.00 hours)/(489.00 hours)
= 0.7730
Virtual Machine Rate Efficiency
= (Virtual Machine Theoretical Production Time for Actual Units)/(Virtual Machine Production Time)
Virtual Machine A
Virtual Machine B Virtual Machine C
= (140.00 hours)/(150.00 hours)
= 0.9333
= (145.00 hours)/(148.00 hours)
= 0.9797
= (75.00 hours)/(80.00 hours)
= 0.9375
Flexible-Sequence Cluster Tool Rate Efficiency
= (Flexible-Sequence Cluster Tool Theoretical Production Time for Actual Units)
/(Flexible-Sequence Cluster Tool Production Time)
= (360.00 hours)/(378.00 hours)
= 0.9524
Virtual Machine Quality Efficiency
= (Virtual Machine Theoretical Production Time for Effective Units)
/(Virtual Machine Theoretical Production Time for Actual Units)
Virtual Machine A
Virtual Machine B Virtual Machine C
= (130.50 hours)/(140.00 hours)
= 0.9321
= (139.00 hours)/(145.00 hours)
= 0.9586
= (75.00 hours)/(75.00 hours)
= 1.0000
Flexible-Sequence Cluster Tool Quality Efficiency
=(Flexible-Sequence Cluster Tool Theoretical Production Time for Effective Units)
/(Flexible-Sequence Cluster Tool Theoretical Production Time for Actual Units)
= (344.50 hours)/(360.00 hours)
= 0.9569
Virtual Machine Overall Equipment Efficiency (OEE)
= (Virtual Machine Theoretical Production Time for Effective Units)/(Virtual Machine Total Time)
Virtual Machine A
Virtual Machine B Virtual Machine C
= (130.5 hours)/(168.00 hours)
= 0.7768
= (139.00 hours)/(168.00 hours)
= 0.8274
= (75.00 hours)/(168.00 hours)
= 0.4464
Flexible-Sequence Cluster Tool Overall Equipment Efficiency (OEE)
=(Flexible-Sequence Cluster Tool Theoretical Production Time for Effective Units)
/(Flexible-Sequence Cluster Tool Total Time)
= (344.50 hours)/(504.00 hours)
= 0.6835
SEMI E79-0304 © SEMI 1999, 2004 13
APPENDIX 2
SUPPLEMENTAL PRODUCTIVITY METRICS FOR FOCUSED
PRODUCTIVITY STUDIES
NOTICE: The material in this appendix is an official part of SEMI E79 and was approved by full letter ballot
procedures on December 15, 1999 by the North American Regional Standards Committee.
A2-1 Supplemental Productivity Metrics with
Total Time as the Denominator
A2-1.1 OEE is based on “as-is” assumptions with
respect to process specifications (recipes), equipment
type, and equipment design. In this way, OEE measures
the performance of the organizations of the
manufacturer and the equipment supplier as they
attempt to drive equipment performance to a potential
defined by given process specifications and a given
equipment type and design.
A2-1.2 This section presents three variations on the
OEE calculation that additionally measure the
performance of engineering and design organizations as
they attempt to improve equipment selection, process
specifications and equipment design. These three
variants are each based on more discriminating
definitions of the theoretical production time per unit,
as shown in Figure A2-1. Total time is the denominator
for each metric.
A
vailability Efficiency
L
osses
(Supplier and User Domain)
N
on-Scheduled Time
Scheduled Downtime
Unscheduled Downtime
Engineering
Standby
Production
Time
E
10 States
Theoretical
Production
Time for
Actual Units
Operational
E
fficiency Losses
(User Domain)
R
ate Efficiency
Losses
(Supplier and User Domain)
P
erformance
E
fficienc
y
L
osses
(Supplier and
User Domain)
A
ssignable Quality
E
fficiency Losses
(Supplier and User Domain)
Theoretical
Production
Time for
Effective
Units
E
79 Productivit
y
Losses and
P
rimar
y
Im
p
rovement Domains
Engineering
Theoretical
Production
Time for
Effective
Units
P
rocess Specification Losses
(Process and Product
E
ngineering Domain)
E
quipment Overhead
D
esign Losses
(Supplier Domain)
Value-Added In-Process
Theoretical Production Time
for Effective Units
B
enchmark Equipment
P
roductivity Losses
(Supplier and User Domain)
Reference
Theoretical Production
Time for
Effective Units
Figure A2-1
Incompatibility of R-OEE with E-OEE and VA-OEE
(Data for sample calculations are given on the following page.)