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SEMI S9-1101 © SE MI 1995, 2001 2 4.2 IEC Standard 1 IEC 61010- 1 — Safety Requirements for Electrical Equipment for Measurement, Control, an d Laboratory Use, Part 1: General Requirements NOTE 1: Unless otherwise indica…

SEMI S9-1101 © SEMI 1995, 20011

SEMI S9-1101

SAFETY GUIDELINE FOR ELECTRICAL DESIGN VERIFICATION

TESTS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

This guideline was technically approved by the Global Environmental Health and Safety Committee and is

the direct responsibility of the North American Environmental Health and Safety Committee. Current edition

approved by the North American Regional Standards Committee on August 27, 2001. Initially available at

www.semi.org September 2001; to be published November 2001. Originally published in 1995.

NOTICE: This document as balloted is intended to

replace SEMI S9-95 in its entirety.

NOTICE: Paragraphs entitled “NOTE” are not an

official part of this document and are not intended to

modify or supercede the official guideline. The task

force has supplied them to clarify and to enhance usage

of the guideline by equipment designers.

1 Purpose

1.1 The purpose of this document is to provide

electrical design verification tests, test methods, and

acceptance criteria for semiconductor manufacturing

equipment. Some of these tests are used as part of the

electrical safety evaluation in SEMI S2.

2 Scope

2.1 This safety guideline should be applied to one or

more representative samples of the equipment (or parts

of the equipment) used for the manufacturing,

measurement, assembly, and testing of semiconductor

products.

2.2 The following tests are discussed in this document:

• Leakage Current Test (Section 9.1)

• Grounding Continuity Test (Section 9.2)

• Starting Current Test (Section 9.3)

• Input Test (Section 9.4)

• Dielectric Test (Section 9.5)

• Strain Relief Test (Section 9.6)

• Transformer Output Short Circuit Test (Section

9.7)

• Power Supply Output Short Circuit Test (Section

9.8)

• Safety Circuit Function Test (Section 9.9)

• Safety Circuits Conductor Disconnection Test

(Section 9.10)

• Capacitor Stored Energy Discharge Test (Section

9.11)

• Temperature Test (Section 9.12)

2.3 This safety guideline does not purport to address all

of the safety issues associated with its use. It is the

responsibility of the user of this safety guideline to

establish appropriate safety and health practices and

determine the applicability of regulatory limitations

prior to use.

3 Limitations

3.1 This document is not intended to be a

comprehensive compilation of electrical tests specified

in product safety standards. This document is also not

intended to replace any test methods described in any

appropriate national or international product safety

standards.

3.2 It is not the intent of this guideline to require

repetition of tests where the equipment has been

certified or tested to other relevant electrical product

safety standards. Any applicable test from this

guideline that has been previously completed under an

applicable product standard and which satisfies the

intent of that test should be accepted, even if there are

differences in test methods.

3.3 Engineering analysis, when based on sound

engineering principles, may serve as an alternative to

conducting a test.

3.4 If it is evident from the design and construction of

the equipment that a particular test is not safety-

relevant, the test need not be performed.

3.5 This document is not intended to address

production line or routine testing.

4 Referenced Standards

4.1 SEMI Standards

SEMI S2 — Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

SEMI S9-1101 © SEMI 1995, 2001 2

4.2 IEC Standard

IEC 61010-1 — Safety Requirements for Electrical

Equipment for Measurement, Control, and Laboratory

Use, Part 1: General Requirements

NOTE 1: Unless otherwise indicated, all documents cited

shall be the latest published versions.

5 Terminology

5.1 1500 ohm impedance network — a network

consisting of a 1500 ohm resistor in parallel with a 0.15

µF capacitor.

5.2 accessible — capable of being contacted by an IEC

accessibility probe (IEC standard test finger, as

described in IEC 61010).

NOTE 2: The test finger is also known, in various IEC

documents, as the “jointed test finger” and “jointed standard

test finger”.

5.3 full load current — current when the equipment is

operated at the maximum manufacturer's specified

operating conditions including all motors and heaters

designed to operate simultaneously.

5.4 hazardous energy — energy of 20 J (Joules) or

more, or an available power level of 240 V*A or more.

5.5 least favorable condition — the condition which is

most likely to result in a test failure.

5.6 permanently connected equipment — Equipment

that is intended to be electrically connected to a supply

by means of connection which can be detached only by

the use of tools.

5.7 primary circuit — an internal circuit which is

directly connected to the external supply mains or other

equivalent source (such as a motor-generator set) which

supplies the electric power. It includes the primary

windings of transformers, motors, other load devices

and the means of connection to the supply mains.

5.8 safe condition  a condition in which all relevant

hazardous energy sources are removed or suitably

contained and all relevant hazardous production

materials are removed or contained, unless this results

in additional hazardous conditions.

5.9 PE Terminal — a terminal which is bonded to

conductive parts of a piece of equipment for safety

purposes and is intended to be connected to an external

protective earthing system.

1 International Electrotechnical Commission, 1, rue de Varembé,

Case Postale 131, CH-1211 Geneva 20, Switzerland. Website:

www.iec.ch

5.10 standby condition — condition in which

equipment is energized and in its idle state.

5.11 tool — an external device used to aid a person in

performing a mechanical function. As used in this

document, tool includes devices such as keys.

5.12 V*A — Volt-ampere.

6 Safety Precautions

6.1 The tests outlined in this document are to be

performed by trained and qualified personnel who have

knowledge of the techniques and the test apparatus

described herein.

7 Calibration and Standardization

7.1 All test equipment should be calibrated and

traceable to a calibration standards organization (e.g.,

National Institute of Standards and Technology (NIST)

in the United States or the National Metrology Institute

in Japan).

7.2 The calibration interval for test equipment should

not exceed one year.

8 Test Conditions

8.1 Except where noted otherwise, the equipment

should be tested under the least favorable conditions

within the manufacturer's operating specifications.

These conditions include:

• supply potential

• supply frequency

• position of movable parts

• operating mode (e.g. full temperature conditions,

motors in operation)

• adjustment of thermostats, regulating devices, or

similar controls in operator-accessible areas

8.2 Test Supply Potential — To determine the least

favorable supply potential for a test, consider:

• multiple-nominal rated potentials (e.g., 120/240 V)

• extremes of nominal rated potential ranges (e.g.,

208–240 V)

8.2.1 Consideration of the tolerance on a nominal rated

potential (e.g., 120 ± 5%) is not necessary.

NOTE 3: Some standards (e.g., IEC 61010-1 and IEC 60950)

may specify 90% and 110% of any rated supply voltage.

8.3 Test Supply Frequency — To determine the least

favorable supply frequency for a test, consider the

nominal frequencies as specified (e.g., 50 Hz, 60 Hz, or

50/60 Hz).

SEMI S9-1101 © SEMI 1995, 20013

NOTE 4: Consideration of the tolerance on a nominal rated

frequency (e.g., 50 ± 0.5 Hz) is not usually necessary.

8.4 As an alternative to carrying out tests on the

complete equipment, tests may be conducted on

circuits, components and sub-assemblies independent of

the equipment, provided that the results of the tests

would be representative of those performed as part of

the assembled equipment.

EXCEPTION: The leakage current and grounding

continuity tests identified in Sections 9.1 and 9.2 should

be completed only on fully assembled equipment.

9 Electrical Tests

9.1 Leakage Current Test for Cord-and-Plug

Equipment

9.1.1 Test Equipment  A 1500 ohm impedance

network and a true RMS voltmeter with an accuracy of

1.0%. The impedance network can be a separate

assembly or incorporated within a leakage current

measuring instrument.

9.1.2 Procedure  For equipment connected to the

facility branch circuit with a cord-and-plug (plug/socket

combination), ensure that the equipment is isolated

(e.g., by placing the equipment on a wooden or other

isolating surface). Connect the equipment to its rated

source of supply with the equipment grounding (PE)

conductor disconnected and operate it at the least

favorable conditions specified by the manufacturer.

Connect the 1500 ohm impedance network between

each accessible metal part and the supply equipment

grounding (PE) conductor. In determining accessibility

of live parts, remove all doors, panels, etc. that are to be

removed by the operator during normal operation.

Using a true RMS voltmeter, measure the voltage drop

across the impedance network. Calculate the leakage

current using the formula:

leaka

Voltage

measured

1500 ohms

9.1.3 Acceptable Results  The maximum calculated

leakage current does not exceed 3.5 mA.

9.2 Grounding Continuity Test

9.2.1 Test Equipment  Low range ohmmeter with a

range to measure 0.10 ohm with an accuracy of 1.0%.

9.2.2 Procedure



Disconnect the equipment from the

supply. For equipment installed with fixed wiring

methods, disconnect the supply equipment grounding

conductor (protective earthing conductor) from the

main equipment grounding terminal (PE Terminal).

Measure the resistance between the power supply

equipment grounding terminal (PE Terminal) and each

accessible metal part (handle, monitor, doors, etc.) on

the equipment using a low-range ohm-meter. Upon test

completion, reconnect the supply equipment grounding

conductor (protective earthing conductor).

EXCEPTION: Grounding Continuity Test is not

required to be measured where accessible metal

surfaces are not likely to become energized in a single

fault condition.

NOTE 5: Some standards (e.g., IEC 60204-1, IEC 61010-1)

may specify this test to be performed using a current injection

method.

9.2.3 Acceptable Results  The resistance between the

grounding conductor terminal and each accessible part

shall not exceed 0.1 ohm.

9.3 Starting Current Test

9.3.1 Test Equipment  None.

9.3.2 Procedure — Start the equipment in accordance

with manufacturer's instructions three times from a

completely stopped condition. Ensure that the time

interval between successive starts is sufficient to allow

the equipment return to ambient conditions.

9.3.3 Acceptable Results  None of the equipment's

overload or overcurrent protections activates during this

test.

NOTE 6: It is recommended that the peak inrush starting

current be measured using an appropriate current measuring

device and recorded in the test report.

9.4 Input Test

9.4.1 Test Equipment  True RMS current measuring

equipment, with accuracy of 3.0%.

9.4.2 Procedure — Measure the input current to the

equipment under the maximum normal operating load

conditions (i.e., with all motors, heaters, etc. running at

manufacturer’s specified maximum loading conditions).

9.4.3 Acceptable Results  The measured current does

not exceed 110% of the rated full load current value

specified on the equipment nameplate.

9.5 Dielectric Test

9.5.1 Test Equipment  Timer with accuracy of ± 5

seconds. Dielectric Withstand Tester with means of

indicating test potential, as well as an audible or visual

indicator of electrical breakdown, or an automatic-

reject feature for any unacceptable unit. In an

alternating current test, the test equipment should

include a transformer having sinusoidal output. This

transformer should have a rating of 500 VA or greater

unless it is provided with a voltmeter that directly

measures the applied output potential.