semi合集-English.pdf - 第3047页

SEMI E122.1-0703 © SEMI 2003 2 Service Name Stream, Function SECS-II Message Name START S2,F49/F50 Enhanced Re mote Command Send/Acknowledge START-EXEC S2,F41/F42 Ho st Command Send/Acknowledge STOP S2,F41/F42 Host Comma…

100%1 / 7923
SEMI E122.1-0703 © SEMI 2003 1
SEMI E122.1-0703
SPECIFICATION FOR SECS-II PROTOCOL FOR TESTER SPECIFIC
EQUIPMENT MODEL (TSEM)
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on April 11, 2003. Initially available at www.semi.org May
2003; to be published July 2003.
1 Purpose
1.1 This document maps the services and data of SEMI
E122 to SECS-II streams and functions, and data
definitions.
2 Scope
2.1 This is a specification covering equipment
supporting automated control job management.
2.2 This document applies to all implementations of
SEMI E122 that use the SECS-II message protocol
(SEMI E5). Compliance to this standard requires
compliance to both SEMI E122 and SEMI E5.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This specification applies to semiconductor
equipment that also use SEMI E30 GEM standard.
4 Referenced Standards
4.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and
Control of Manufacturing Equipment (GEM)
SEMI E122 — Standard for Tester Equipment Specific
Equipment Model (TSEM)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Services Message Mapping
5.1 This section shows the specific SECS-II streams
and functions that shall be used for SECS-II
implementation of the services defined in SEMI E122,
as well as the parameter mapping for data attached to
services.
5.2 Services Message Mapping
5.2.1 Table 1 defines the relationships between SEMI
E122 services and SECS-II messages. Mapping of
service parameters to the SECS-II data items is
provided in a separate table. Conventions and
definitions of table fields are as described below.
5.2.2 Service Name — Name of the service or remote
command defined in SEMI E122.
5.2.3 Stream, Function — Specifies the SECS-II
stream and function (SxFx) mapped to the service
messages. Following convention of SECS-II, request
and notification messages are mapped to the odd-
numbered functions and response or acknowledgement
messages are mapped to the corresponding even-
numbered functions.
5.2.4 SECS-II Message Name — Name of the SECS-II
message.
Table 1 Services Message Mapping Table
Service Name Stream, Function SECS-II Message Name
ABORT S2,F41/F42 Host Command Send/Acknowledge
DEFINE-DATALOG-PLAN S2,F49/F50 Enhanced Remote Command Send/Acknowledge
DISABLE-SITE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
ENABLE-SITE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
PAUSE S2,F41/F42 Host Command Send/Acknowledge
PP-SELECT S2,F49/F50 Enhanced Remote Command Send/Acknowledge
RESET-SITE-CNT S2,F41/F42 Host Command Send/Acknowledge
RESUME S2,F41/F42 Host Command Send/Acknowledge
SEMI E122.1-0703 © SEMI 2003 2
Service Name Stream, Function SECS-II Message Name
START S2,F49/F50 Enhanced Remote Command Send/Acknowledge
START-EXEC S2,F41/F42 Host Command Send/Acknowledge
STOP S2,F41/F42 Host Command Send/Acknowledge
STOP-EXEC S2,F41/F42 Host Command Send/Acknowledge
5.3 Data Collection Service Mapping
5.3.1 Table 2 defines the relationships between SEMI E122 online test data collection services and SECS-II
messages. These services maps to a subset of the SECS-II stream 13 functions, further usage and formatting details
are as defined in stream 13 section of SEMI E5.
Table 2 Data Collection Service Message Mapping Table
Service Name Stream, Function SECS-II Message Name
SEND S13,F1/F2 Send Data Set Send/Acknowledge
OPEN S13,F3/F4 Open Data Set Request/Acknowledge
READ S13,F5/F6 Read Data Set Request/Acknowledge
CLOSE S13,F7/F8 Close Data Set Send/Acknowledge
RESET S13,F9/F10 Reset Data Set Send/Acknowledge
5.4 Event Message Mapping
5.4.1 Table 3 defines the relationships between SEMI E122 collection events and SECS-II messages. Conventions
and table field definitions similar to mapping table for the services, here Event Name specifies the event defined in
SEMI E122.
5.4.2 Format and structure are as defined in SEMI E30 (GEM), including attached reports.
Table 3 Event Message Mapping Table
Event Stream, Function SECS-II Message Name
All state model transitions and all
events defined in SEMI E122.
S6F11/12 Event Report Send/Acknowledge
5.5 Service Parameter Mapping
5.5.1 Table 4 defines the relationships between SEMI E122 service parameters and SECS-II data definitions or
parameter fields in the mapped streams and functions. Parameters for acknowledgements or responses will follow
SECS-II specification for that stream and function, no service specific error codes are defined in this specification.
Descriptions of each table column are described below.
5.5.2 Service — Specifies the service whose parameters are described.
5.5.3 SECS-II Field — Specifies the SECS-II data item or message parameter used by the service. In this
specification, the DATAID and OBJSPEC fields are unspecified for services using the S2F49 SECS-II message.
Their values are to be ignored or used for implementation specific purposes.
5.5.4 Values — Value or SECS II format for the specified field. Formats are specified using the SML notation as
defined in appendices of SEMI E30 (GEM).
5.5.5 Req. — Indicates whether the specified field or parameter is required or not. If an optional CPNAME
parameter is used, the corresponding CPVAL must also be given.
SEMI E122.1-0703 © SEMI 2003 3
Table 4 Service Parameter to SECS-II Data Items Mapping
Service SECS-II Field Values Req. Description
ABORT RCMD “ABORT” Y
RCMD “DEFINE-DATALOG-PLAN” Y
CPNAME
1
“DATALOGPLANNAME” Y DATALOGPLANNAME parameter.
CPVAL
1
A[80] Y Name of datalog plan.
CPNAME
2
“DATALOGDATASETS” N DATALOGDATASETS parameter.
CPVAL
2
L, n (n - # of datasets)
1. L, 2
1. A[80]
2. L, p
1. U4
…
p. U4
n. L, 2
1. A[80]
2. L, q
1. U4
…
q. U4
N Datalog output can be directed to separate
datasets on a per-test-site basis.
L, n (n - # of datasets)
1. L, 2
1. Dataset Name
1
2. L, p (Zero-length list = all test-sites)
1. SiteID
11
…
p. SiteID
1p
n. L, 2
1. Dataset Name
n
2. L, q (Zero-length list = all test-sites)
1. SiteID
n1
…
q. SiteID
nq
CPNAME
3
“DATALOGBYTESTTYPE” N DATALOGBYTESTTYPE parameter
CPVAL
3
L, b
1. L, 3
1. U4
2. U4
3. U4
…
b. L, 3
1. U4
2. U4
3. U4
N Specifies datalog options by general TestType.
L, b (b = # of (TestType, TestStatus) pairs
being assigned reports.)
1. L, 3
1. TestType
1
2. TestStatus
1
3. ReportID
1
(If omitted, the default report
is assigned.)
…
b. L, 3
1. TestType
b
2. TestStatus
b
3. ReportID
b
DEFINE-
DATALOG-PLAN
CPNAME
4
“DATALOGBYTESTID” N