semi合集-English.pdf - 第2837页

SEMI E102-0600 © SEMI 2000 45 40: Transfer Comma nd Completed (Stocker SE M ) 41: Transfer Comma nd to Stk9 (carrier bbb, src s tk9/Bay_in, dest shelf) (Stocker S EM) 42: Transfer Comma nd Updates (Stocker SEM) 43: Trans…

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SEMI E102-0600 © SEMI 2000 44
R1-2.7 Scenario 7 — Batch Delivery to Internal Buffer Equipment
3: requestBatchTransportJob(JobType TransportJob, Priority 1, Deadline time1, container aaa, DestinationMachine Eq6, JobType
TransportJob, Priority 1, Deadline time1, container bbb, DestinationMachine Eq6, JobType TransportJob, Priority 1, Deadline time1,
container ccc, DestinationMachine Eq6, JobType TransportJob, Priority 1, Deadline time1,container ddd, DestinationMachine Eq6)
7: InformJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
MTSC reserves and manages AMHS
equipment capacity(internal)
MTSC determines AMHS
route(internal)
14: InformJobStateChange(Job TrJob2, previousState JobQueued, newState JobExecuting)
18: Transfer Command to Stk7 (carrier aaa, src. shelf, dest. Stk. 7/Bay_Out) (Stocker SEM)
19: Transfer Command Updates (Stocker SEM)
20: Transfer Completed (Stocker SEM)
21: Transfer Command to Stk7 (carrier bbb, src. shelf, dest. Stk. 7/ Bay_Out) (Stocker SEM)
22: Transfer Command Updates (Stocker SEM)
23: Transfer Completed (Stocker SEM)
24: Transfer Command to Ohs2 (carrier aaa, src. stk7/Bay_Out, dest. stk9/Bay_In) (IBSEM)
25: Transfer Command Updates (IBSEM)
28: Transfer Completed (IBSEM)
31: Transfer Command to Ohs2 (carrier bbb, src. stk7/Bay_Out, dest. stk9/Bay_in) (IBSEM)
32: Transfer Command Updates (IBSEM)
4: Return Job Handle TrJob1 TrJob2 TrJob3 TrJob4
8: makeInTransit()
15: makeInTransit()
16: MaterialContainerStateChangedEvent
26: setMaterialTrackingLocation(MaterialTrackingLocation Ohs2)
27: DurableLocationChangedEvent
29: setMaterialTrackingLocation(MaterialTrackingLocation Stk9)
30: DurableLocationChangedEvent
For clarity reasons only the
messages for containers aaa
and bbb are defined. The same
messages would also take
place for ccc and ddd.
5: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
12: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
9: MaterialContainerStateChangedEvent
6: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
13: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
17: getUnit()
10: getUnit()
1: setUnit(unitvalue)
2: setUnit(unitvalue)
11: getMachineType()
AMHS Equipment
Controllers
Factory
Operations
MTSCDurable
Management
Machine Object
Eq6
Figure R1-15
Scenario Case 7
SEMI E102-0600 © SEMI 200045
40: Transfer Command Completed (Stocker SEM)
41: Transfer Command to Stk9 (carrier bbb, src stk9/Bay_in, dest shelf) (Stocker SEM)
42: Transfer Command Updates (Stocker SEM)
43: Transfer Command Completed (Stocker SEM)
46: Transfer Command to stk9 (carrier aaa, src. shelf, dest stk9/Bay_Out) (Stocker SEM)
47: Transfer Command updates (Stocker SEM)
48: Transfer Command Complete (Stocker SEM)
49: Transfer Command to Oht1 (aaa, stk9/Bay_Out, eq6/port1) (IBSEM)
50: Transfer Command Updates (IBSEM)
53: Transfer Command Complete (IBSEM)
60: InformJobStateChange(Job TrJob1, previousState JobExecuting, newState JobCompleted)
35: Transfer Completed (IBSEM)
38: Transfer Command to Stk9 (carrier aaa, src stk9/Bay_in, dest shelf)(Stocker SEM)
39: Transfer Command Updates (Stocker SEM)
33: setMaterialTrackingLocation(MaterialTrackingLocation Ohs2)
34: DurableLocationChangedEvent
36: setMaterialTrackingLocation(MaterialTrackingLocation Stk9)
37: DurableLocationChangedEvent
51: setMaterialTrackingLocation(MaterialTrackingLocation Oht1)
52: DurableLocationChangedEvent
55: setMaterialTrackingLocation(MaterialTrackingLocation Eq6)
57: makeProcessing()
58: MaterialContainerStateChangedEvent
56: DurableLocationChangedEvent
Once all carriers of batch have
reached the stocker, the MTSC
will begin reserving ports for
delivery to the
Equipment (implementation specific).
As soon as either aaa or bbb has
been deliverd to the equip., the
reserve and following messages
would happen for ccc and then
ddd.
44: reservePortForTransferTo(MaterialContainer aaa, Port 1)
45: reservePortForTransferTo(MaterialContainer bbb, Port 2)
59: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
61: removeFinishedJob(Job TrJob1)
62: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
54: transferComplete(MaterialContainer aaa, Port 1)
AMHS Equipment
Controllers
Factory
Operations
MTSCDurable
Management
Machine Object
Eq6
Figure R1-16
Scenario Case 7 (continued)
SEMI E102-0600 © SEMI 2000 46
AMHS Equipment
Controllers
Factory
Operations
MTSCDurable
Management
Machine Object
Eq6
63: Transfer Command to stk9 (carrier bbb, src. shelf, dest stk9/Bay_Out) (Stocker SEM)
64: Transfer Command Updates (Stocker SEM)
65: Transfer Command Complete (Stocker SEM)
77: InformJobStateChange(Job TrJob2, previousState JobExecuting, newState JobCompleted)
66: Transfer Command to Oht1 (bbb, stk9/Bay_Out, eq6/port2) (IBSEM)
67: Transfer Command Updates (IBSEM)
68: setMaterialTrackingLocation(MaterialTrackingLocation Oht1)
69: DurableLocationChangedEvent
70: Transfer Command Complete (IBSEM)
72: setMaterialTrackingLocation(MaterialTrackingLocation Eq6)
73: DurableLocationChangedEvent
74: makeProcessing
75: MaterialContainerStateChangedEvent
76: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
78: removeFinishedJob(Job TrJob2)
79: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
71: transferComplete(MaterialContainer bbb, Port 1)
Figure R1-17
Scenario Case 7 (continued)