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SEMI E127-0705 © SEMI 2003, 2005 42 16 Requirements for Objects Defined in Other Stand ards 16.1 Substr ate Object 16.1.1 SEMI E90 de fines a generic s et of substrate attributes need ed for basic manu facturing and subs…

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SEMI E127-0705 © SEMI 2003, 2005 41
Attribute Name Definition Access Reqd Form
DataType Identifies the format of the value of the
Data Row attribute DataItem
i
.
RO Y Enumerated:
binary
Boolean
text
integer
unsigned integer
floating point IEEE 754
array
list
structure
Description Describes the type of entry. RO N Text.
Interdependency
Rule
Describes interdepencies with other
entry types.
RO N Text.
Units Units of measurement. RO Y Enumerated.
Use Descibes how the entry type is used. RO N Text.
ValidityRule Describes the conditions, such as
boundaries, where the entry is valid.
RO N Text.
Table 24 Assurance Element Definitions
Element Name Description Form
AssuranceName The name of the assurance data used. Text.
AssuranceDataType Identifies the form of AssuranceValue. Enumerated:
binary
Boolean
text
integer
unsigned integer
floating point IEEE 754
array
list
structure
AssuranceValue The actual measured or calculated value. Per AssuranceDataType.
AssuranceUnits Identifies the units (if any). Enumerated text.
15.3 Master Data Table Objects
15.3.1 A Master Data Table Object is an empty table that provides a full set of Data Row Templates and Data
Information for all of the possible row items (the superset) that the IMM is capable of producing. The existence of
this table allows the client to obtain the description of data contained in Data Information beforehand. Actual row
contents, and related Data Information, for an actual IMM Data Table Object must be a subset of those provided by
the Master Data Table Object, and the order of data within a row may vary from table to table.
15.3.2 Exactly three Master Data Table Objects are required, one for each of the three types of tables. Their ObjIDs
shall be defined as “RawDataMaster”, “ConvertedDataMaster”, and “CalibratedDataMaster”.
15.3.3 A scenario for obtaining Row Templates and Data Information from a Master Data Table Object is provided
in Related Information.
15.3.4 Provision of Master Data Table Objects is an optional capability. In some implementations, due to the
possible variation of Data Information attributes (for example, the Units attribute) and their dependence on recipes,
it would be difficult to implement without having a specific recipe.
SEMI E127-0705 © SEMI 2003, 2005 42
16 Requirements for Objects Defined in Other Standards
16.1 Substrate Object
16.1.1 SEMI E90 defines a generic set of substrate attributes needed for basic manufacturing and substrate tracking.
The integration of measurement into a process tool requires additional information be available, both to the IMM
itself when a substrate is received and to advanced process control systems that depend on the measurement results.
16.1.2 Substrate Attributes
16.1.2.1 Table 25 defines the additional substrate attributes required by this standard. By providing them with the
substrate, they are available as context information for the IMM measurement tables defined below.
Table 25 Additional Substrate Attribute Definitions
Attribute Name Definition Access Reqd Form
ProcessFlowStep Identifies exposure-level step in product
fabrication process.
RW Y User-supplied text.
OrientationIn Shows the orientation of the substrate as
loaded.
RO Y Floating point, in radians.
OrientationOut Shows the orientation of the substrate as
unloaded.
RO Y Floating point, in radians.
ProcessToolID Name of last process tool or ObjID of
last tool process module.
RW Y User-supplied text. Shall conform to SEMI E39
restrictions on ObjID.
ProcessRecipeID Name of recipe used in last process step. RW Y User-supplied text.
SubstSide Indicates the side of the substrate
measured, as determined by the
measurement recipe.
RO Y Enumerated:
Front
Back
Both
Unknown
16.2 Process Job Management
16.2.1 Requirements
16.2.1.1 The IMM shall be able to receive a Process Job Create request specifying a recipe, variable parameters,
and list of one or more substrates, and it shall either accept or reject the request.
16.2.1.2 A Process Job Create request may be rejected if another Process Job still is active, or if there is an error in
the request message.
16.2.1.3 A Process Job in the PROCESSING state shall transition to PROCESS COMPLETE when it has
completed all measurement activities and stored the raw data. Upon this transition, the substrate may be removed
from the IMM, and all IMM Raw Data objects generated are ready for use. The conversion of data may still be in
process at this point.
17 Event and Exception Management
17.1.1 All data is defined either as the attributes of an object or as the attributes of an event. Data that must be
available at the time of an associated event is defined for each type of object. The data provided with an event or
alarm report shall be the new value that results from the event.
18 Message Service Definitions
18.1 List of Services
18.1.1 This section defines the content of service messages specified in this document and details the parameters for
each message. Table 26 provides an alphabetical list of all services specified in this standard. Services marked with
a Y in the column labeled “Control” shall be rejected if received from a Data Client.
SEMI E127-0705 © SEMI 2003, 2005 43
Table 26 List of Services
Operation Description Type Reqd Control
#1
ChangeService The Control Client requests to change the Service state of the
IMM.
R Y Y
ClientConnect Request to be a client for either control or data services. R Y —
ClientDisconnect Request to discontinue client relationship. R Y —
Delete Request by Control Client to delete a Substrate Object
(SEMI E39). (See ¶12.6.7 for detail.)
R Y
Y
RequestRetentionConditions Request for the current retention rules and retention time for the
requesting client.
R Y —
SetRetentionConditions Request to set or clear the client’s current retention conditions. R Y —
SetAutoTableSend Set or clear automatic sending of completed tables for this
client.
R Y —
TableRequest Request for a table or table subset (SEMI E58). R Y —
TableSend Request to send a table or table subset (SEMI E58). R Y —
TransferPathCalibration R Y Y
UpdateSubstrateObject Request by Control Client to create a Substrate Object and
p
opulate its attributes with the attributes provided. Also sent by
the STPO for unloading the substrate.
R Y Y
XfrCmdListRequest Request to send an ordered list of micro commands to be
returned individually to the IMM STPO to affect a substrate
hand-off.
R Y Y
XfrCommand Message sent by the Control Client to an STPO to request a
certain action (micro command) be performed. A response is
sent when the action has been completed.
R Y Y
XfrVerify Message sent by the Control Client to a STPO when all
necessary actions have been completed to effect a transfer of a
substrate and asking for confirmation.
R Y Y
XfrHalt Message sent by either partner to stop all activities. This
message ends the transfer procedure and requires manual
intervention to clear.
R Y Y
#1
Identifies services that may only be sent from the Control Client.
18.2 Service Parameters
18.2.1 Table of Parameters and Parameter Elements — Table 27 defines the parameters of the services defined in
this document.
Table 27 Definitions for Parameters and Parameter Elements
Parameter Definition Form
AutoSendRawData Enables (T) or disables (F) automatic sending for Raw
Data Tables.
Boolean.
AutoSendConvertedData Enables or disables automatic sending for Converted
Data Tables.
Boolean.
AutoSendCalibrationData Enables or disables automatic sending for Calibration
Data Tables.
Boolean.
ClientID An identifier used by the IMM to manage individual
reports.
Text.
ClientInterfaceVersion Identifies the version of the communication interface
required by the client.
Text.