semi合集-English.pdf - 第1846页

SEMI E42-0704 © SEMI 1995, 2004 115 which is placed in the Parameters attribute of the recipe when it is verified ; (2) Permitting th e actual value to be supplied extern ally by a parent recipe, or at the time the recip…

SEMI E42-0704 © SEMI 1995, 2004 114

recipe name — A user-defined text string used in the

recipe identifier. The name corresponds to PPID in

Stream 7 implementations.

recipe namespace — A logical management domain for

(1) the storage and management of recipes, and (2) the

insurance of the uniqueness of recipe identifiers within

that domain.

recipe namespace manager (manager) — The

component of an agent that manages the recipe

namespace and that represents the interface for the

namespace to the external world.

recipe namespace segment (segment) — The

component of a namespace that represents the internal

storage and actual manipulation of recipes.

recipe section — A partition of the recipe for purposes

of transferring it through an RMS service. All recipes

have a section containing the generic attributes and a

section containing the body. Some recipes also have a

section containing the agent-specific attributes.

recipe specifier — An object specifier applied to a

recipe.

recipe storage area — A storage area for recipes.

rename — The operation of assigning a new identifier

to a recipe or to a recipe namespace.

request service — A service that requires a response.

SERVICE class — An optional primary class used for

recipes whose purpose is to maintain, prepare, calibrate,

or test the operation of equipment.

reset — See clear.

resource — An owned entity that has an active role in

factory operations.

select — The act of preparing a recipe, or a linked

recipe set, for execution. This includes confirmation

that all specified subrecipes are available, that the

attributes of the main recipe and all its referenced

recipes meet execution requirements, that the recipes

are validated as a set, and that all other steps that may

be necessary for the proper execution of the recipe have

been performed.

service — A service (or message service) represents a

function offered to a user by a provider. A service is

one of two types: a request or a notification.

service resource — A set of services within a particular

area of specialization, such as a recipe namespace

resource or a recipe execution resource.

setting — A static value accessible to the user, through

one or more methods, that is used by agent to control its

process. Settings include, but are not limited to, setpoint

values. Settings typically may be specified within a

recipe.

shared namespace — A namespace with more than one

member.

source form — A recipe body which consists of one or

more lines of text and which conforms to a formally

defined recipe language.

storage area — An area where objects and data are

stored. See also recipe storage area.

stored recipe attribute — An attribute of a recipe, a

recipe header, or a recipe body, that is stored as a

name/value pair within a recipe header whenever the

recipe is transferred.

subclass — A class of recipes within a larger class.

subrecipe — Any recipe which is referenced by another

recipe within the same namespace.

supervisory agent — An agent with supervisory

responsibilities for one or more subordinate agents.

Examples include a host manufacturing system and a

cluster controller.

timestamp — (1) The notation of the date and time of

the occurrence of an event; (2) An attribute of a recipe

header or recipe body that contains the date and time

the particular section was last changed. This attribute is

a text string of the form “yyyymmddhhmmsscc” for the

year yyyy, the month mm, the day dd, the hour hh, the

minutes mm, and the seconds ss.

unlink — An operation that clears all attributes set by a

link operation.

unprotect — An operation that resets a recipe's

ApprovalLevel

attribute. (Set it to zero.)

update — The operation of replacing the body of an

existing recipe.

upload — To transfer a recipe body from the recipe

executor.

user — A person interacting with an agent directly

through the agent's human interface or indirectly

through the agent's supervisor.

validate — The action of checking a recipe to ensure

that the recipe and its parameters' type

and range are

valid for the agent's configuration at the time the recipe

is selected for execution. [A recipe may be syntactically

correct and yet may contain statements that cannot be

executed under all configurations of the agent.]

variable parameter — A formally defined variable

(setting) defined in the body of a recipe (1) With a

specified default value, boundaries or conditions for

replacement values, and (where applicable) units, and

SEMI E42-0704 © SEMI 1995, 2004 115

which is placed in the Parameters attribute of the recipe

when it is verified; (2) Permitting the actual value to be

supplied externally by a parent recipe, or at the time the

recipe is selected for execution by the supervisor or the

operator.

verification area — Optional temporary storage

provided for unverified downloaded recipes.

verify — The operation of (1) ensuring that a recipe is

syntactically correct, and (2) identifying variable

parameters and external references.

version — A text string that is part of a recipe's

identifier.

version number — A version consisting only of the

digits “0” through “9” and one decimal point character

“.” that can be translated to a pure number. Only whole

numbers (with no decimal point) and numbers with a

decimal point that do not begin or end with a “0” may

be used.

whitespace — In ASCII, the space (20

), tab (9

carriage return (0D

), and form feed (0C

) characters.

write-protect — See protect.

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer's

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

RELATED INFORMATION 1

NOTE: This related information is not an official part of SEMI E42 and is not intended to modify or supersede the

official standard. Rather, these notes are auxiliary information provided as background or examples of possible

application and are included as reference material. The standard should be referred to in all cases. SEMI makes no

warranties or representations as to the suitability of the material set forth herein for any particular application. The

determination of the suitability of the material is solely the responsibility of the user.

R1-1 RMS Standardized Objects

The standardized objects defined by RMS are shown in Table R1-1.

Table R1-1 Standardized Objects

Object Type ObjType Section Reference

Managed Recipe MRcp 3.4.2.1

Agent-Specific Dataset MRcpASDS 3.4.2.2

Execution Recipe ERcp 3.5.4

Recipe Namespace RNS 4.6

Recipe Namespace Manager RNS_Mgr 4.6

Recipe Executor RcpExec 6.8

Agent Agent 7.3

R1-2 RMS Requirements/Concepts Map

Table R1-2 provides the specific RMS concepts that address each of the requirements from Table 2.1.

Table R1-2 RMS Requirements/Concepts Map

Requirement Concept

Uniquely store, identify, and select recipes in a system.

Share recipes among different agents.

Synchronize the change of shared recipes among agents.

Share recipes among different installations of the same type of equipment by

adjusting individual differences.

Namespace

Ability to execute recipes with or without a communication link.

Ability to change recipes managed by another agent when the communication

link has failed or before it is established.

Default Namespace

Formal differentiation of, and recognition of, recipes of different types. Recipe Class

Allow a recipe name to retain its base identity across a series of modifications. Version Number

Allow shared recipes to be adjusted for individual pieces of equipment.

Allow a recipe’s parameters to be adjusted within specified limits without

requiring the recipe body to be changed.

Support feedback/feed forward control.

Variable Parameters

Ensure the recipe is syntactically correct. Verification

Manage the approval level of specific recipes with respect to process

development and production-worthiness.

Approval

Allow management of equipment qualified for specific recipes. Certification

Change the recipe while it is running. Protection of execution area from inadvertent

change