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SEMI F62-0701 © SEMI 2001 12 Table 3 Data Pr esentation for 500 scc m MFC Data Collectio n T e1 Q a1 T e2 Q a2 T e3 Q a3 T e4 Q a4 T e5 Q a5 T e6 Q a6 T e7 Q a7 T e8 Q a8 T e9 Q a9 0% S.P. Q ind 25% S.P. Q ind T g Avg . …
SEMI F62-0701 © SEMI 200111
Table 1 TC
e
Readings
TC
e
(% Reading/
°
C)
T
e2
-T
e1
T
e3
-T
e2
T
e4
-T
e3
T
e5
-T
e4
T
e5
-T
e6
T
e6
-T
e7
T
e7
-T
e8
T
e8
-T
e9
Flow Setpoint %
F.S.
25
50
75
100
0
NOTE 1: Plot as in Figure 7.
Table 2 TC
g
Readings
Flow Setpoint (%F.S.) TC
g
(% reading/°C)
25 -0.06
50 -0.08
75 -0.09
100 -0.11
0
NOTE 1: Plot as in Figure 5.
SEMI F62-0701 © SEMI 2001 12
Table 3 Data Presentation for 500 sccm MFC
Data Collection
T
e1
Q
a1
T
e2
Q
a2
T
e3
Q
a3
T
e4
Q
a4
T
e5
Q
a5
T
e6
Q
a6
T
e7
Q
a7
T
e8
Q
a8
T
e9
Q
a9
0% S.P.
Q
ind
25% S.P.
Q
ind
T
g
Avg. of 10 readings
50% S.P.
Q
ind
T
g
Avg. of 10 readings
75% S.P.
Q
ind
T
g
Avg. of 10 readings
100% S.P.
Q
ind
T
g
Avg. of 10 readings
Data Presentation
Tc
e
= Q
a
(30)-Q
a
(20) × 100%
T
e
(30)-T
e
(20) Q
s.p.
Tc
e
= 134-122 × 100%
30.1-20.1 (125)
= 0.96% of Reading @ 125 sccm
SEMI F62-0701 © SEMI 200113
Table 4 Sample Data for 500 sccm MFC
T
g
T
s
T
e
Q
sp
Q
ind
Q
A
Time min.
20.1 10 .5
20.2 15 1
20.3 11 1.5
20.4 14 2
20.5 24 2.5
.
.
.
.
.
.
30.9 36 60
.
.
.
40.0 48 120
39.0 40 480
30.0 36 560
20.0 10 600
NOTE 1: Plot as in Figure 8.