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SEMI D18-0299 E © SEMI 19 99, 2001 7 Table 3 Ty pe A Cassette Registration - C oupling P in Dimensions Symbol Us ed Shown I n: Dime nsions Descri ption Algebraic Re lation or Value d 1 Figure 5 diame ter of pin cente red…
SEMI D18-0299
E
© SEMI 1999, 2001 6
Symbol Used Shown in Datum Measured From Boundary or Feature Measured To: Algebraic Relation or Value
z1 Figure 4 horizontal datum plane bottom of cassette bottom domain
≥ 2
z2 Figure 4 horizontal datum plane bottom of cassette sensing pads
=3 ± 0.5
z3 Figure 6 horizontal datum plane bottom surface of conveying surface
=2 ± 0.5
z4 Figure 4 horizontal datum plane top of cassette bottom domain
≤ 40
z5 Figure 4 horizontal datum plane bottom nominal substrate seating
plane
= 60
z6 Figure 4 each nominal substrate
seating plane
bottom of substrate
= ± 0.5
z7 Figure 4 each nominal substrate
seating plane
encroachment of cassette side
domains on clearance above the
substrate
See Table 2.
z8 Figure 4 each nominal substrate
seating plane
adjacent nominal substrate seating
planes
See Table 2.
z9 Figure 4 top nominal substrate
seating plane
bottom of cassette top domain
≥ z7 + 1
z10 Figure 4 top nominal substrate
seating plane
bottom of clearance under robotic
handling flange
≤ 30
z11 Figure 4 top nominal substrate
seating plane
top of clearance under robotic
handling flange
= 40 ± 1
z12 Figure 4 top nominal substrate
seating plane
top of top cassette domain
≤ 50
z14 Figure 6 Horizontal Datum Plane top of V-rail, V-groove, and float
roller exclusion zones
= 24.86 ± 0.12
W= the length in millimeters of the substrate edge perpendicular to the bilateral datum plane.
W
1
= one half the length of W
L= the length in millimeters of the substrate edge perpendicular to the facial datum plane.
L
1
= one half the length of L
All values in millimeter (mm)
Table 2 Pitch and Capacity Options
Substrate Size Cassette Capacity (c) Substrate Pitch (z8) Substrate Clearance (z7) Resulting Cassette Height
(z5-z1)+((z8*(c-1))+z12
550 mm x
650 mm
25 substrates 20 mm (0.79 in.) 16 mm (0.63 in.) minimum 580 mm (22.83 in.) maximum
600 mm x
720 mm
25 substrates 20 mm (0.79 in.) 16 mm (0.63 in.) minimum 580 mm (22.83 in.) maximum
960 mm x
1100 mm
20 30 mm (1.18 in.) 20 mm (0.79 in.) 678 mm (26.7 in.) maximum
4 not yet defined
SEMI D18-0299
E
© SEMI 1999, 20017
Table 3 Type A Cassette Registration - Coupling Pin Dimensions
Symbol Used Shown In: Dimensions Description Algebraic Relation or Value
d1 Figure 5 diameter of pin centered on the center axis line 12 ± 0.05 mm
(0.4724 ± 0.002 in.)
r2 Figure 5 radial distance from the center axis line to the origin of
the shoulder radius r5
6 mm
(0.2362 in.)
r3 Figure 5 radial distance from the intersection of the center axis line
and z13 to the top of the pin
15 ± 0.05 mm
(0.5906 ± 0.002 in.)
r4 Figure 5 blend radius for the intersection of r3 and r52 ± 0.1 mm
(0.0787 ± 0.004 in.)
r5 Figure 5 radial distance from the intersection of the horizontal
datum plane and r2 to the far shoulder of the pin
15 ± 0.05 mm
(0.5906 ± 0.002 in.)
r6 Figure 5 blend radius for the intersection of r5 and d12 ± 0.1 mm
(0.0787 ± 0.004 in.)
r7 Figure 5 Roughness (R
a
) as defined in ISO 4287
0.30 µm (12 µin.) maximum
z13 Figure 5 vertical distance from the horizontal datum plane to the
origin of top radius r3
2 mm
(0.08 in.)
Table 4 Type B Cassette Registration - Roller Dimensions
Symbol Used Shown In: Dimensions Description Algebraic Relation or Value
r8 Figure 7 Radius about roller circumference revolved about the
revolute axis
= 4.8 ± 0.12 mm
r9 Figure 7 Radius of roller measured from the tangential surface
created by r8 to the revolute axis
≥ 20 ± 0.12 mm
SEMI D18-0299
E
© SEMI 1999, 2001 8
Figure 1
Isometric Views