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SEMI E134-0305 © SEMI 2004, 2005 50 14.1.5.3 CollectedData Association Definition Ta ble Table 64 CollectedData Association Definition Association Role Name Definition Comments parameterValues The parameters requested fo…

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14.1.5.1 Figure 27 shows how to represent a trace report. A single trace report can include one or more collected
results, and each result includes the values of a set of parameters, appearing in the order specified in the DCP’s
TraceRequest.
14.1.5.1.1 More than one result is included in a trace report if and only if the DCP has specified that the equipment
should buffer collected data for the trace before reporting (that is, the ‘groupSize’ attribute of the TraceRequest class
is > 1).
14.1.5.1.2 If the trace request included start- and/or stop-triggers, the TraceReport includes the trigger that
started/stopped the trace, and the time at which the trigger was detected. These are only required to be provided in
the first TraceReport immediately following the detection of a start or stop trigger.
14.1.5.1.3 TraceReport — Represents an individual trace report that has obtained one or more collection results. A
trace report has a unique identifier within the scope of the DCP, and may have been started and stopped by specific
triggers, if requested in the DCP. Each of these identifiers, triggers, and associated timestamps is included in the
trace report.
14.1.5.1.4 TraceReport Attribute Definition Table
Table 61 TraceReport Attribute Definition
Attribute Name Definition Form
traceId The unique id of this trace report, as specified in
the DCP.
Integer.
startTriggerTime The time at which the trace start trigger was
detected.
Text, formatted according to Section 14.5.
stopTriggerTime The time at which the trace stop trigger was
detected.
Text, formatted according to Section 14.5.
reportTime The time at which the report creation was
completed.
Text, formatted according to Section 14.5.
14.1.5.2 TraceReport Association Definition Table
Table 62 TraceReport Association Definition
Association Role Name Definition Comments
traceResults A list of data collected for this trace
report.
Ordered list of one or more elements of type CollectedData,
appearing in the order of each result’s start time (see Section
14.1.5.2.1). Must contain no more than ‘groupSize’ entries if
‘groupSize’ is > 1.
startTrigger The trigger that initiated the trace Zero or one element of any type derived from Trigger (see
Section 11.1.6). Only required to be provided with the first
TraceReport to be sent after the trigger was detected.
stopTrigger The trigger that stopped the trace Zero or one element of any type derived from Trigger (see
Section 11.1.6). Only required to be provided with the first
TraceReport to be sent after the trigger was detected.
14.1.5.2.1 CollectedData — Represents the results of the collection of the values of one or more parameters. A
data collection result has a collection time corresponding to when the equipment began collecting the associated data
values.
14.1.5.2.2 CollectedData Attribute Definition Table
Table 63 CollectedData Attribute Definition
Attribute Name Definition Form
collectionTime The time at which the DCP began collecting the
values of the parameters requested for this trace.
Text, formatted according to Section 14.5.
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14.1.5.3 CollectedData Association Definition Table
Table 64 CollectedData Association Definition
Association Role Name Definition Comments
parameterValues The parameters requested for this
trace.
Ordered list of elements of type ParameterValue, described in
Section 14.2. ParameterValues appear in the order specified in
the original TraceRequest in the corresponding DCP.
14.2 Parameter Values
IntegerValue RealValue BooleanValue String Valu e
BinaryValue
EnumeratedIntegerValue
EnumeratedStringValue
ArrayValue
StructureValue
ParameterValue Ab stractValue
1
value
1
reasonCode
desc ript ion
NoValue
ValueNotAvailable
NoSuc hSource
NoSuc hParameter
«enumeration»
NoValu eReasonEnum
Figure 28
Parameter Values
14.2.1 Figure 28 shows how to represent a given data value corresponding to the specific parameters requested for
an event or trace report in a DCP, or as a response to the GetParameterValues operation described in Section 9.1.2.9.
14.2.1.1 ParameterValue — Represents a data value originating from a specific source. For example, the
temperature from a specific processing chamber, a measurement or test result variable, the value of an E39-based
object attribute, etc.
SEMI E134-0305 © SEMI 2004, 2005 51
14.2.1.2 ParameterValue Association Definition Table
Table 65 ParameterValue Association Definition
Association Role Name Definition Comments
value The value of this parameter. Any type derived from the abstract class AbstractValue (see
Sections 14.3 and 14.4).
14.2.1.3 AbstractValue — An abstract class representing any derived primitive, structured, or enumerated value
type. This class has no attributes or associations.
14.2.1.4 NoValue — This class is used to communicate problems in obtaining the values of requested Parameters.
There may be situations where unanticipated conditions arise that prevent the equipment from accessing a data value
due to internal communications failures or other such problems. Less commonly, a DCP that was valid at the time it
was activated may refer to Parameters that are no longer defined due to some on-the-fly reconfiguration of the
equipment.
14.2.1.5 NoValue Attribute Definition Table
Table 66 NoValue Attribute Definition
Attribute Name Definition Form
reasonCode The high-level reason that the value of the
Parameter can’t be provided.
Enumerated, of type NoValueReasonEnum (see Section
14.2.1.6 ).
description Human-readable description of the cause of
the problem, if known.
Text.
14.2.1.6 NoValueReasonEnum — This enumeration classifies the major sources of an error in providing a
Parameter’s value.
14.2.1.7 NoValueReasonEnum Attribute Definition Table
Table 67 NoValueReasonEnum Attribute Definition
Attribute Name Definition Form
ValueNotAvailable The requested Parameter exists, but equipment was unable to obtain its
value.
n/a
NoSuchSource The source of the requested Parameter does not exist. n/a
NoSuchParameter The source of the requested Parameter exists, but no such Parameter is
provided by that source.
n/a
14.3 Primitive Parameter Values
14.3.1 To make the data requested in a DCP available to a consumer, there must be a mechanism for representing
the values of primitive, or single-valued, types such as integers and strings in the type system being used. The
specific simple or primitive types that should be represented are typically determined by the implementation
technology that will be used to communicate values of the declared type (e.g., SECS-II, XML, OMG IDL, etc.).
The primitive types described here should be considered a minimum set that could be refined and extended to work
best with the type system in use. Any specification that translates these types into a specific type system shall define
how it has mapped these primitive types into the technology-specific type system in addition to specifying any
extended primitive types beyond those described here.