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SEMI E52-0703 © SEMI 1995, 2003 21 Code Gas Name Symbol Formula Synonym Ref 221 Ethyl Fluoride C2H5F CH 3 CH 2 F Fluoroethane, R-161, FREON- 161 2 54 Ethane C2H6 CH 3 CH 3 1 218 Dimethylcadmium C2H6Cd (CH 3 ) 2 Cd 2 73 D…

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SEMI E52-0703 © SEMI 1995, 2003 20
Code Gas Name Symbol Formula Synonym Ref
21 Bromine Br2 Br
2
2
278 Silicon tetrabromide Br4Si Br
4
Si SiBr4; Tetrabromosilane; Silicon
(IV) bromide
2
76 Bromine Trifluoride BrF3 BrF
3
1
116 Bromine Pentafluoride BrF5 BrF
5
1
279 Tantalum (V) ethoxide C10H25O5Ta C
10
H
25
O
5
Ta Ta(Oet)5 2
146 Tributylaluminum C12H27Al (CH
3
CH
2
CH
2
CH
2
)
3
Al TBAl 3
262 Triisobutylaluminum C12H27Al (C
4
H
9
)
3
Al 2
194 Titanium Tetraisopropoxide C12H28OTi Ti(OC
3
H
7
)
4
1
280 Diphenylmethylenediamine C13H14N2 C
13
H
14
N
2
2
281 Diphenylmethan-4,4' -
diisocyanat
C15H10N2O C
15
H
10
N
2
O UN 2489; Benzene,1,1' -
methylenebis(isocyanatophenyl)
2
282 Tetrakis(diethylamino)titanium C16H40N4Ti C
16
H
40
N
4
Ti 2
130 Dibromotetrafluorethane C2Br2F4 BrF
2
CCF
2
Br F-114B2, R-114B2 1
105 Bromotrifluoroethylene C2BrF3 CF
2
CFBr 1
125 Dichlorotetrafluoroethane C2Cl2F4 F
3
CCCl
2
F F-114, R-114 1
126 Trichlorotrifluoroethane C2Cl3F3 CF
2
ClCCl
2
F F-113, R-113 1
168 Tetrachloroethylene C2Cl4 Cl
2
C=CCl
2
Perchloroethylene or Ethylene,
Perchloro
2
206 Chlorotrifluoroethylene C2ClF3 FCCl=CF
2
R-1113, FREON-1113 2
119 Chloropentafluoroethane C2ClF5 ClCF
2
CF
3
F-115, R-115 1
260 Trifluoroacetonitrile C2F3N F
3
CCN 2
94 Tetrafluorethylene C2F4 F
2
C=CF
2
1
118 Hexafluoroethane C2F6 F
3
CCF
3
F-116, Perfluoroethane 1
42 Acetylene C2H2 HC=CH Ethyne 1
191 Dichloroethylene -trans C2H2Cl2 CHCl=CHCl 2
210 Dichloroethylene C2H2Cl2 CH
2
=CCl
2
Vinylidene Chloride 2
211 Dichloroethylene -cis C2H2Cl2 CHCl=CHCl 2
64 Difluoroethylene C2H2F2 CH
2
=CF
2
G-1132A,Vinylidenefluoride 1
156 Tetrafluoroethane C2H2F4 CH
2
FCF
3
R-134A, F-134A 2
56 Vinyl Bromide C2H3Br CH
2
=CHBr 1
55 Vinyl Chloride C2H3Cl CH
2
=CHCl Chloroethylene 1
112 Trichloroethane C2H3Cl3 CH
3
CCl
3
TCA, Methylchloroform 2
103 Difluorochloroethane C2H3ClF2 CF
2
ClCH
3
F-142B, R-142B 1
203 Chlorodifluoroethane C2H3ClF2 CH
3
-CF
2
Cl R-142b 4
51 Vinyl Fluoride C2H3F H
2
C=CHF 1
348 Ethane,1,1,1-Trifluoro C2H3F3 C
2
H
3
F
3
HFC-143a 3
173 Acetonitrile C2H3N CH
3
CN 2
38 Ethylene C2H4 CH
2
=CH
2
Ethene 1
222 Ethylene Dichloride C2H4Cl2 ClCH
2
CH
2
Cl 1,2 Dichloroethane 2
82 Difluoroethane C2H4F2 CH
3
CHF
2
Ethylidene Fluoride, R-152A 1
45 Ethylene Oxide C2H4O C
2
H
4
O Acetaldehyde 1
283 Acetic acid C2H4O2 CH
3
COOH Ethanoic acid; UN 2789; 2
75 Ethyl Chloride C2H5Cl C
2
H
5
Cl Chloroethane orEthane, Chloro or
Ethyl Chloride
1
SEMI E52-0703 © SEMI 1995, 2003 21
Code Gas Name Symbol Formula Synonym Ref
221 Ethyl Fluoride C2H5F CH
3
CH
2
F Fluoroethane, R-161, FREON-
161
2
54 Ethane C2H6 CH
3
CH
3
1
218 Dimethylcadmium C2H6Cd (CH
3
)
2
Cd 2
73 Dimethyl Ether C2H6O CH
3
OCH
3
Methylether 1
136 Ethanol C2H6O CH
3
CH
2
OH 2
169 Ethyleneglycol C2H6O2 HOCH
2
CH
2
OH Ehtanediol, Glycol 2
284 Dimethyl selenide C2H6Se C
2
H
6
Se (CH3)2Se; Selenium dimethyl;
Dimethylselenium
2
212 Dichlorodimethylsilane C2H6SiCl2 (CH
3
)
2
SiCl
2
2
220 Dimethyltellurium C2H6Te (CH
3
)
2
Te 2
135 Dimethylzinc C2H6Zn (CH
3
)
2
Zn 3
164 Dimethylaluminum-hydride C2H7Al (CH
3
)
2
AlH DMAH 13
85 Dimethylamine C2H7N (CH
3
)
2
NH 1
233 Monoethylamine C2H7N C
2
H
5
NH
2
2
285 Ethoxy silane C2H8OSi C
2
H
8
OSi 2
219 Dimethylsilane C2H8Si (CH
3
)
2
SiH
2
2
137 Halothane C2HBrClF3 BrClHCCF
3
6
186 2,2 Dichloro1,1,1
Trifluoroethane
C2HCl2F3 CHCl
2
-CF
3
Freon 123, Suva 123 2
204 Chlorodifluoroethylene C2HClF2 CF
2
=CHCl R-1122, FREON-1122 4
223 Fluoroacetylene C2HF FC=CH 2
155 Pentafluoroethane C2HF5 CF
3
CHF
2
F-125, R-125 9
59 Cyanogen C2N2 NCCN Oxalodinitrile 1
138 Hexafluoropropylene C3F6 CF
3
CF=CF
2
Perfluoropropylene or Propylene,
Perfluoro
1
225 Hexafluoroacetone C3F6O (CF
3
)
2
CO 2
286 Hexafluoropropylene oxide C3F6O C
3
F
6
O Hexafluoroepoxypropane 2
128 Perfluoropropane C3F8 CF
2
(CF
3
)
2
1
287 Trimethoxy silane C3H10O3Si C
3
H
10
O
3
Si 2
190 Trimethyl Silane C3H10Si (CH
3
)
3
SiH 2
165 Trimethylaminealane C3H12AlN (CH
3
)
3
NAlH
3
TMAA 11
267 Hexafluoro Propane C3H2F6 CH
2
FCF
2
CF
3
1,1,1,2,2,3-Hexafluoropropane 2
288 Pentafluoropropanol C3H3F5O C
2
F
5
CH
2
OH Perfluorodihydropropanol,
1,1,1,2,2-Pentafluoropropane
2
276 Acrylonitrile C3H3N CH
2
=CHCN Acrylon; Propenenitrile 3
66 Allene C3H4 CH
2
=C=CH
2
Propadiene 1
68 Methyl Acetylene C3H4 CH
3
C=CH Propyne 1
289 Acrylic acid C3H4O2 C
3
H
4
O
2
2-Propenoic acid;
CH2=CHCOOH
2
290 Trifluoropropane C3H5F3 C
3
H
5
F
3
1,1,1-Trifluoropropane;
CH3CH2CF3
2
61 Cyclopropane C3H6 C
3
H
6
1
69 Propylene C3H6 CH
3
CH=CH
2
Propene 1
81 Methyl Vinyl Ether C3H6O CH
3
OCH=CH
2
1
184 Acetone C3H6O CH
3
COCH
3
2
SEMI E52-0703 © SEMI 1995, 2003 22
Code Gas Name Symbol Formula Synonym Ref
291 Ethyl Formate C3H6O2 HCO
2
C
2
H
5
Ethyl ester formic acid;
HC00C2H5
3
292 Methyl acetate C3H6O2 CH
3
CO
2
CH
3
Methyl ester acetic acid; UN
1231
3
331 Acetaldehyde methoxy C3H6O2 CH
3
OCH
2
CHO 3
332 Acetone, hydroxy C3H6O2 CH
3
COCH2OH Acetol 3
333 Glycol methylene ether C3H6O2 C
3
H
6
O
2
1,3-Dioxolane 3
334 Propanoic acid C3H6O2 CH
3
CH
2
CO
2
H Propionic acid 3
335 Glycidol C3H6O2 CH
2
CHCH
2
OH 1-Propanol, 2,3 epoxy 3
293 Propenamine C3H7N C
3
H
7
N Allylamine; Monoallylamine; UN
2334
2
89 Propane C3H8 CH
3
CH
2
CH
3
1
187 Isopropal Alcohol C3H8O (CH
3
)
2
CHOH 2-Propanol 2
149 Trimethylaluminum C3H9Al Al(CH
3
)
3
TMA, TMAl 4
151 Trimethylarsenic C3H9As (CH
3
)
3
As Trimethylarsine, TMAs 2
277 Trimethylborane C3H9B (CH
3
)
3
B 2
131 Trimethoxyborine C3H9BO3 B(OCH
3
)
3
TMB, Trimethylborate 2
152 Trimethylgallium C3H9Ga Ga(CH
3
)
3
TMGa 4
153 Trimethylindium C3H9In (CH
3
)
3
In TMIn 3
109 Trimethylamine C3H9N (CH
3
)
3
N Methylamine 1
294 Trimethyl ester phosphoric acid C3H9O4P C
3
H
9
O
4
P Methyl phosphate;
Trimethoxyphosphine oxide
2
132 Trimethylphosphorous C3H9P (CH
3
)
3
P Trimethylphosphine, TMP 2
133 Trimethylphosphite C3H9PO3 (CH
3
O)
3
P TMPi, Trimethoxyphosphine 2
150 Trimethylantimony C3H9Sb (CH
3
)
3
Sb Trimethylstibene 2
295 Heptafluoropropane C3HF7 C
3
HF
7
1,1,1,2,3,3,3-Heptafluoropropane,
Freon 227
2
241 Perfluorobutane C4F10 C
4
F
10
3
270 Hexafluoro-2-Butyne C4F6 CF
3
C=CCF
3
Bis(trifluoromethyl)acetylene;
Perfluoro-2-butyne
3
296 Hexafluorocyclobutene C4F6 C
4
F
6
Perfluorocyclobutene;
1,2,3,3,4,4-
Hexafluorocyclobutene
3
297 Hexafluoro butadiene-1,3 C4F6 CF
2
=CF-CF=CF
2
Perfluorobutadiene-1,3; 3
129 Octafluorocyclobutane C4F8 (CF
2
)
4
Perfluorocyclobutane or
Cyclobutane, Perfluoro
1
236 Octafluorobutane C4F8 C
4
F
8
3
351 Perfluoro (Oxacyclopentane) C4F8O C
4
F
8
O 3
111 Isobutane C4H10 (CH
3
)
2
CHCH
3
2-Methylpropane or Propane, 2-
Methyl
1
117 Butane C4H10 CH
3
(CH
2
)
2
CH
3
1
271 Butanol-1 C4H10O CH
3
CH
2
CH
2
CH
2
OH 3
336 Butanol-2 C4H10O CH
3
CH
2
CH(OH)CH
3
3
337 Tertiary Butyl Alcohol C4H10O (CH
3
)
3
COH 3
338 Diethyl ether C4H10O C
2
H
5
OC
2
H
5
3
339 Methyl propyl ether C4H10O CH
3
OC
3
H
7
3
340 Methyl isopropyl ether C4H10O (CH
3
)
2
CHOCH
3
3