semi合集-English.pdf - 第1159页

SEMI E5-1104 © SEMI 1982, 2004 101 Default values, tl = 10 sec., t2 = 60 sec., t 3 = 70 sec. NOTE 6: t1, t2, t3 defin e d for Stream 4 are not to b e confused with timeouts T1, T2, T3, and T4 de f ined in SEMI E4 (SECS-I…

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SEMI E5-1104 © SEMI 1982, 2004 100
Figure 4
The Six Possible Handshakes
10.8.1.3 Figure 5 summarizes the interaction of the timers, handshake messages, and the error messages in the form
of a flow chart. It also identifies specific states for the sender and the receiver. These states are referred to in the
messages.
The ranges of timer values are as follows:
tl — time to leave sender
tl + 10 <= t2 <= 60 sec. — time to receive
t2 + 10 <= t3 <= 70 sec. — time to complete send
SEMI E5-1104 © SEMI 1982, 2004 101
Default values, tl = 10 sec., t2 = 60 sec., t3 = 70 sec.
NOTE 6: t1, t2, t3 defined for Stream 4 are not to be confused with timeouts T1, T2, T3, and T4 defined in SEMI E4 (SECS-I).
Figure 5
Material Control-Handshake Flowchart
SEMI E5-1104 © SEMI 1982, 2004 102
Stream,Function Name (Mnemonic) Direction
S4,F0 Abort Transaction (S4F0) S,H->E
Description
Same form as S1,F0.
Structure
Exception
Stream,Function Name (Mnemonic) Direction
S4,F1 Ready to Send Materials (RSN) S,H<->E,reply
Description
The sender advises the receiver that some material is awaiting transfer.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S4,F2 Ready to Send Acknowledge (RSA) S,H<->E
Description
Acknowledge or error
Structure
<RSACK>
Exception
None
Stream,Function Name (Mnemonic) Direction
S4,F3 Send Material (SMN) S,H<->E
Description
The receiver advises the sender that it is ready to receive material and that its transfer mechanism is running.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
S4,F4 Not Used