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SEMI E30-1103 © SEMI 1992, 2003 93 Index A ABORT .......................................................................................................................... ............................... 14, 17, 36 Abort…

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SEMI E30-1103 © SEMI 1992, 2003
92
GEM Host
CMP
Equipment
(GEM Compliant)
Thickness
Metrology
Post-process Thickness
Measurement
Equipment Constant
Send: Time Recipe Parameter
Figure A.8.1
CMP Single Wafer “Polishing” System with Host Recipe Parameter Modification Capability
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SEMI E30-1103 © SEMI 1992, 2003
93
Index
A
ABORT .........................................................................................................................................................14, 17, 36
AbortLevel.................................................................................................................................................................36
alarm................................................................................................................5, 17, 21, 31, 32, 33, 34, 35, 50, 62, 73
ALARM CLEAR.................................................................................................................................................32, 33
Alarm Management.......................................................................................................................1, 17, 31, 63, 67, 69
Alarm Report...........................................................................................................................................31, 34, 35, 65
ALARM SET.................................................................................................................................................31, 32, 33
alarm text...................................................................................................................................................................34
Alarm Text.................................................................................................................................................................34
AlarmID...............................................................................................................................................................62, 63
AlarmsEnabled ........................................................................................................................................31, 34, 62, 67
AlarmsSet ....................................................................................................................................31, 33, 34, 62, 63, 67
ALCD ............................................................................................................................................................31, 34, 62
ALCD
n
......................................................................................................................................................................33
ALID .......................................................................................................................................................32, 34, 62, 73
ALIDn ...................................................................................................................................................................1, 32
ALTX ..................................................................................................................................................................32, 34
Anytime Capabilities .............................................................................................................................................2, 71
B
button...................................................................................................................................................................45, 72
Button ........................................................................................................................................................................72
buttons ...................................................................................................................................................................5, 72
Buttons...................................................................................................................................................................2, 72
C
CEID..........................................................................................................................21, 26, 27, 28, 39, 41, 62, 63, 78
clock ..............................................................................................................................................................24, 50, 71
Clock .......................................................................................................................................1, 18, 50, 62, 63, 67, 69
COMMACK..................................................................................................................................8, 10, 11, 18, 19, 20
CommDelay.....................................................................................................................................................8, 10, 11
COMMUNICATING ......................................................................................9, 10, 11, 12, 18, 19, 20, 52, 53, 55, 72
communication failure.........................................................................................................5, 8, 10, 11, 15, 47, 52, 54
Communication failure..............................................................................................................................................11
communication fault........................................................................................................................................5, 10, 47
Communication Fault ..........................................................................................................................................47, 49
communication link.....................................................................................................................................................8
communications failure .........................................................................................................................................8, 55
compliance.............................................................................................................................................5, 6, 67, 68, 78
Compliance................................................................................................................................1, 2, 4, 5, 6, 67, 68, 69
Compliance Statement...............................................................................................................................................68
COMPLIANCE STATEMENT ................................................................................................................................69
compliant.............................................................................................................................................................68, 69
Compliant ..................................................................................................................................................................68
COMPLIANT............................................................................................................................................................69
connection transaction failure......................................................................................................................8, 9, 10, 18
Connection transaction failure...................................................................................................................................11
control......................................................................................4, 5, 6, 7, 12, 14, 25, 31, 35, 39, 54, 58, 59, 62, 76, 77
Control.........................................................................1, 2, 3, 5, 12, 15, 18, 26, 58, 59, 60, 61, 63, 64, 67, 68, 69, 76
CONTROL ....................................................................................................................1, 3, 12, 13, 14, 15, 58, 59, 76
SEMI E30-1103 © SEMI 1992, 2003
94
CPNAME ......................................................................................................................................................35, 36, 62
CPVAL................................................................................................................................................................35, 36
D
data collection....................................................................................................................4, 20, 22, 30, 32, 34, 47, 71
Data Collection..................................................................................................................1, 17, 20, 23, 65, 67, 69, 72
Data Item Dictionary ...................................................................................................................................................4
data item restrictions..................................................................................................................................................67
Data Item Restrictions ...........................................................................................................................................1, 62
data too long ..............................................................................................................................................................49
Data Too Long...........................................................................................................................................................66
DATAID....................................................................................................................................................................62
DATALENGTH........................................................................................................................................................62
Date and Time Data...................................................................................................................................................64
Date and Time Request..............................................................................................................................................50
Date and Time Send ..................................................................................................................................................64
Define Report ......................................................................................................................................................23, 64
disable....................................................................................................................................22, 23, 34, 35, 55, 56, 65
Disable.....................................................................................................................................................34, 35, 64, 65
disabled............................................................................................................................10, 21, 26, 28, 34, 55, 71, 72
DISABLED .....................................................................................................................................8, 9, 10, 11, 29, 72
display .....................................................................................................................................9, 39, 45, 46, 47, 59, 72
Display.................................................................................................................................................................45, 66
document ...............................................................................................4, 5, 6, 7, 8, 14, 22, 35, 40, 62, 64, 67, 75, 78
documentation .................................................................................................5, 16, 21, 22, 28, 36, 50, 67, 68, 69, 73
Documentation ......................................................................................................................................2, 6, 67, 68, 69
DRACK.....................................................................................................................................................................23
DSPER...........................................................................................................................................................24, 25, 74
DVNAME .................................................................................................................................................................22
DVVAL...........................................................................................................................22, 23, 25, 27, 39, 44, 62, 77
E
EAC...........................................................................................................................................................................38
ECID........................................................................................................................................................22, 62, 63, 71
ECV...............................................................................................................................................................22, 23, 62
enabled...........................................................................8, 9, 11, 21, 22, 29, 31, 33, 34, 35, 41, 52, 55, 56, 71, 72, 77
ENABLED ....................................................................................................................................9, 10, 11, 29, 52, 72
Equipment constant data............................................................................................................................................38
Equipment Constant Data..........................................................................................................................................64
Equipment Constant Namelist.......................................................................................................................37, 38, 64
equipment model ...................................................................................................................................................6, 30
Equipment Model..................................................................................................................................................6, 30
equipment status................................................................................................................................26, 30, 50, 71, 77
Equipment Status.............................................................................................................................................1, 30, 64
Equipment-Initiated Process Program Download .....................................................................................................44
Equipment-Initiated Process Program Upload ..........................................................................................................42
ERACK .....................................................................................................................................................................23
Error messages.....................................................................................................................................................47, 48
Error Messages..............................................................................................................................1, 10, 18, 47, 67, 69
Establish Communications Request ..............................................................................................9, 10, 18, 19, 20, 64
Establish Communications Request Acknowledge ...............................................................................................8, 64
EstablishCommunicationsTimeout..................................................................................................................8, 18, 62
Event..................................................15, 17, 20, 21, 23, 29, 32, 37, 39, 41, 44, 46, 47, 63, 64, 65, 67, 69, 72, 77, 78
event data collection..................................................................................................................................................32
Event data collection ...........................................................................................................................................20, 47