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SEMI E88-1104 E © SEMI 1999, 2004 7 8.2.4 SC State Tr ansition Table Table 1 SC State Transition Table Transition # Previous State Trigger New State Actions Comments 1 none SC Initiation. SC INIT S6F11 SCAutoInitiated Sy…

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stocker crane, conveyor, ID reader, etc.), it may be possible to continue ON-LINE operation when the operation
mode of some stocker components (as viewed by the SC) is a manual state. The details of what happens when
individual components of the stocker enter a manual state are specific to the Stocker SEM equipment supplier.
When the SEMI E30 Control state changes from OFF-LINE to ON-LINE, the SC State Model is started from the SC
INIT state.
8.2.2 SC State Model
PAUSED
PAUSING
AUTO
ALARMS
NO ALARMS
SC INIT
6
3
4
8 7
AVAILABILITY
SYSTEM
5
2
1
9
C
Figure 3
Generic Stocker SEM SC State Model Diagram
8.2.3 SC State Definitions
8.2.3.1 SC INIT — SC initialization of stocker components is occurring. This is a non-operational state. No
commands from the host will be acknowledged, queued or processed. The system will not move out of this state if
there are carriers moving on any of the stocker units controlled by the SC. Such devices must be manually or
automatically recovered before transitioning to the next state.
8.2.3.2 PAUSING — A system PAUSE command has been received and is being processed. All carriers that are
currently moving will continue until their physical movement stops (their transfer command may still be active).
Carriers that are currently moving may continue to move but they must not begin another movement. TRANSFER
commands are accepted and queued. All status requests will be processed. The RESUME, INSTALL, REMOVE,
and LOCATE commands will also be processed.
8.2.3.3 PAUSED — No carriers are in the process of moving on any of the stocker units controlled by the SC.
Carriers may be at any port position including the OP, BP, and LP positions. TRANSFER commands are accepted
and queued. All status requests will be processed. The RESUME, INSTALL, REMOVE, and LOCATE commands
will also be processed.
8.2.3.4 AUTO — Stocker is in the normal operational state. Commands are actively processed.
8.2.3.5 NO ALARMS — There are no alarms present in the system.
8.2.3.6 ALARMS — There are one or more alarms present in the system.
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8.2.4 SC State Transition Table
Table 1 SC State Transition Table
Transition
#
Previous State Trigger New State Actions Comments
1 none SC Initiation. SC INIT S6F11
SCAutoInitiated
System runs through its startup
sequence.
2 SC INIT System started up
successfully. All carrier
movement stopped.
PAUSED S6F11
SCPaused
System ready.
3 PAUSED RESUME command. AUTO S6F11
SCAutoCompleted
System can now execute
remote commands based upon
other internal conditions
(Alarm, GEM ONLINE, etc).
4 AUTO PAUSE command. PAUSING S6F11
SCPauseInitiated
Carriers that are not moving
remain there. Carriers that are
moving must stop at the next
logical stopping point.
5 PAUSING RESUME command. AUTO S6F11
SCAutoCompleted
System can now execute
remote commands based upon
other internal conditions
(Alarm, GEM ONLINE, etc).
6 PAUSING All carrier movement has
completed.
PAUSED S6F11
SCPauseCompleted
System will accept and queue
new commands but will not
execute them.
No new movement will occur.
Outstanding Transfer
Commands will remain NOT
ACTIVE.
7 NO ALARMS Alarm Set. ALARMS S6F11
AlarmSet
8 ALARMS All Alarms cleared. NO
ALARMS
S6F11
AlarmCleared
9 ALARMS Alarm Set. ALARMS S6F11
AlarmSet
Alarm occurs when there is
already an outstanding alarm.
8.3 TRANSFER Command State Model
8.3.1 TRANSFER Command State Model Requirements
8.3.1.1 The TRANSFER command state model serves as the SEMI E30 Processing State Model. The purpose of the
TRANSFER command state model is to provide information to the host regarding the control of the TRANSFER
command. The TRANSFER command allows the host to manage carrier movement and scheduling. The control of
each TRANSFER command must independently support the TRANSFER command state model.
8.3.2 TRANSFER Command State Model Diagram
8.3.2.1 The TRANSFER command state model is detailed for Stocker SEM equipment in Figure 4.
8.3.3 TRANSFER Command State Definitions
8.3.3.1 QUEUED — SC has acknowledged and queued the TRANSFER command. TRANSFER command has not
been initiated.
8.3.3.2 ACTIVE — The carrier is involved in the physical aspect of the TRANSFER command. It is denoted by the
time spanned by command initiation to command completion.
8.3.3.3 TRANSFERRING (ACTIVE sub-state) — The transfer command is actively being executed by the stocker.
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8.3.3.4 PAUSED (ACTIVE sub-state) — The Transfer command is not actively being executed by the stocker. This
may be due to an internal equipment error that does not immediately terminate the Transfer command
unsuccessfully. This would allow the Host or Operator the opportunity to retry the transfer.
8.3.3.5 CANCELING — The TRANSFER command cancel procedure is being performed to terminate a transfer
command which never entered the ACTIVE state (currently QUEUED). This state is entered via a CANCEL
remote command.
8.3.3.6 ABORTING — The TRANSFER command abort procedure is being performed to terminate a transfer
command which has entered the ACTIVE state. This state can only be entered via an ABORT remote command.
An unsuccessful transfer command completion will ultimately result from this state.
CANCELING
A
BORTING
A
CTIVE
TRANSFERRING
PAUSED
TRANSFERRING
PAUSED
45
6
7
QUEUED
3
8
9
2
1
H*
10
11
Figure 4
Generic Stocker SEM TRANSFER Command State Model Diagram
8.3.4 TRANSFER Command State Transition Table
Table 2 Transfer Command State Transition Table
Transition # Previous State Trigger New State Actions Comments
1 QUEUED The TRANSFER
command has been
initiated by the SC.
TRANSFER-
RING
S6F11
TransferInitiated
2 QUEUED Host sends CANCEL
command for a specified
TRANSFER command to
SC.
CANCELING S6F11
TransferCancel-
Initiated
TRANSFER command is to
be removed from the
TRANSFER command queue.
3 CANCELING The cancel procedure for
the TRANSFER command
has completed by the
stocker and the SC.
None S6F11
TransferCancel-
Completed
The carrier will still be
situated at the transfer source
location. The carrier may
now be included in a future
transfer.