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SEMI E1.9-0701 E2 © SEMI 1994, 2004 8 facial datum plane z 14 =1±1 z 18 ≤ 30 (to top of cassette) z 21 =9±1 z 13 =24±1 top nominal wafer plane z 17 =26±1 y 8 =2±0 .5 y 7 =2±0.5 y 2 =10± 1 y 3 =10±1 cross-section in Figur…

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SEMI E1.9-0701
E2
© SEMI 1994, 2004 7
x
17 =17.5
x
14 =118.5
y19
=61.1
y
17
=27.5
x
13 =88.5
front side of the cassette where wafers are accessed
carrier sensing
pads
facial
datum
plane
bilateral datum plane
y
10
=123.5
y
9
=92.5
y18 =40.2
r
13
≥
2.5
r13
≥
2.5
r13
≥
2.5
x
21 =30
x
22 =70
r14
≥
7.5
info pad B
info pad C
info pad A
r17
≥
10
x
8 =12.5
info pad D
Figure 5
Carrier Sensing Pads in Bottom View
horizontal
datum
plane
z
8
=33
z
18
≤
30
(to top)
z
15
≥
13
z
6
≤
21
z
12
=10
cross-
section in
Figure 1
detail in
Figure 7
detail in
Figure 8
y
11
≤
85
y
15
≤
95
y
16 =155 ±1
y
6
≤
152
y
23
≤
140
y
5
≥
120
y
4
≤
85
facial datum plane
r
6
≤
157
Figure 6
Side View of Cassette
SEMI E1.9-0701
E2
© SEMI 1994, 2004 8
facial datum plane
z14 =1±1
z18 ≤30
(to top of
cassette)
z21 =9±1
z13 =24±1
top
nominal
wafer
plane
z17
=26±1
y8 =2±0.5
y7 =2±0.5
y2 =10±1y3 =10±1
cross-section in
Figure 10
z24 =4±1
(to top of
flange)
z16 =9±1
Figure 7
Top Side View Detail
z
5
≥
10
z
3
=7±1
z
9
=45±1
z
22
≥
20
z
19
=24
z
7
=35±1
horizontal datum plane
z
6
≤
21
z
4
=15±1
z
1
≥
0
z
2
≤
2
(at sensor pad)
z
20
=60±1
r
9 =2.5±0.5
r
8 =7.5±1
facial datum plane
y
2 =10±1
y
3 =10±1
r
7
≥
15
cross-section in Figure 11
Figure 8
Bottom Side View Detail
SEMI E1.9-0701
E2
© SEMI 1994, 2004 9
cross-
section
in
Figure
1
detail in
Figure 12
detail in
Figure 10
horizontal datum plane
z8
=33
z5
≥10
z18
≤30
(to
top)
z15
≥13
z6
≤21
r7 ≥15
x1 ≥50
x2 ≤75
x6 ≤112.5
x12 ≥125
z12
=10
bilateral datum plane
Figure 9
Front View of Cassette
z
24 =4±1
(to top of
flange)
z
16 =9±1
z
14 =1±1
z
15
≥
13
z
18
≤
30
(to top)
z
11
≥
6
z
21 =9±1
z
12 =10
x
3
≥
125
bilateral
datum
plane
x
4
≥
8
x
7
≥
12
z
13 =24±1
z
23
≤
3
r
11 =166±1 (at top robotic flange)
top
nominal
wafe
r
plane
z
17
=26±1
z
10 =±0.5
(height of
wafer bottom)
r
3
≥
r
2 + 1
x
9
≤
167
x
10 =166±1 (at side grip pits)
r
2 =152
+1
–0
Figure 10
Upper Cross-Section at Facial Datum Plane