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SEMI E130.1-1104 © SEMI 2004 4 Service SECS-II Field Values Req. Description RCMD “LOAD- TEST- SUBST” Y CPNAME “SUBSTLOCID” Y S ubstLocID parameter. LOAD- TEST-SUBST CPVAL A [n] Substrate Loca tion containing the test su…

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SEMI E130.1-1104 © SEMI 2004 3
Table 3 Service Parameter to SECS-II Data Items Mapping
Service SECS-II Field Values Req. Description
RCMD “CLEAN-PROBES” Y
CPNAME “CLEANPROCESS” N Clean Process parameter.
CPVAL A [n] Specifies name of the cleaning process to
be performed.
CPNAME “DIELIST” Y Die List parameter.
CLEAN-PROBES
CPVAL L, n
1. L, 2
1. U4
2. U4
:
n. L, 2
1. U4
2. U4
List of probe sites to be cleaned. Zero-
length list indicates that all sites should be
cleaned.
Each site is represented by a die coordinate
structure specifying the X and Y
coordinate:
L, n (n = number of sites selected)
1. L, 2
1. X Coordinate
2. Y Coordinate
…
n. L, 2
1. X Coordinate
2. Y Coordinate
INDEX RCMD “INDEX” Y
INK-DEVICE RCMD “INK-DEVICE” Y
RCMD “INK-DIE” Y
CPNAME “DIELIST” N Die List parameter.
CPVAL L, n
1. L, 2
1. U4
2. U4
:
n. L, 2
1. U4
2. U4
List of die sites to be inked. “DIELIST”
structure as defined above.
Either Die List or Control Map must be
supplied.
CPNAME “CONTROLMAP” N Control Map parameter.
INK-DIE
CPVAL A [n] Control Map identifier.
RMCD “INSPECT-INK-
MARKS”
Y
CPNAME “DIELIST” N Die List parameter.
INSPECT-INK-MARKS
CPVAL L, n
1. L, 2
1. U4
2. U4
:
n. L, 2
1. U4
2. U4
List of sites to inspect. Current site is
assumed if not provided.
RCMD “INSPECT-PROBES” Y
CPNAME “PROBESITELIST” N Probe Site List parameter.
INSPECT-PROBES
CPVAL Supplier Defined
Format
Supplier defined list of probe sites to
inspect. Zero-length list indicates all sites.
INSPECT- PTP-ALIGN RCMD “INSPECT- PTP-
ALIGN”
Y
SEMI E130.1-1104 © SEMI 2004 4
Service SECS-II Field Values Req. Description
RCMD “LOAD- TEST-
SUBST”
Y
CPNAME “SUBSTLOCID” Y SubstLocID parameter.
LOAD- TEST-SUBST
CPVAL A [n] Substrate Location containing the test
substrate.
LOAD-SUBSTRATE RCMD “LOAD-SUBSTRATE” Y
RCMD “LOCKOUT-
CONTROL”
Y
CPNAME “LOCKOUT” N Lockout parameter.
LOCKOUT-CONTROL
CPVAL BOOLEAN True = Lockout console control.
RCMD “MOVE” Y At least one of X, Y, or Z parameter must
be supplied. An omitted X, Y, or Z is
equivalent to specifying zero.
CPNAME “X” N X parameter.
CPVAL U4 Relative step value in X direction.
CPNAME “Y” N Y parameter.
CPVAL U4 Relative step value in Y direction.
CPNAME “Z” N Z parameter.
MOVE
CPVAL U4 Relative step value in Z direction.
RCMD “MOVE-ABS” Y At least one of X, Y, or Z parameter must
be supplied. An omitted X, Y, or Z is
equivalent to specifying current value.
CPNAME “X” N X parameter.
CPVAL U4 Absolute index in X direction.
CPNAME “Y” N Y parameter.
CPVAL U4 Absolute index in Y direction.
CPNAME “Z” N Z parameter.
MOVE-ABS
CPVAL U4 Absolute index in Z direction.
RCMD “MOVE-SUB-STEPS” Y At least one of XSubstep, YSubstep or
Zsubstep must be supplied. An omitted
XSubstep, YSubstep, or ZSubstep is
equivalent to specifying zero.
CPNAME “XSUBSTEP” N XSubstep parameter.
CPVAL F4 Relative substep value in X direction.
CPNAME “YSUBSTEP” N YSubstep parameter.
CPVAL F4 Relative substep value in Y direction.
CPNAME “ZSUBSTEP” N ZSubstep parameter.
MOVE-SUB-STEPS
CPVAL F4 Relative substep value in Z direction.
MOVE-TO-REF-DIE RCMD “MOVE-TO-REF-DIE” Y
RESET-CONTACT-CNT RCMD “RESET-CONTACT-
CNT”
Y
RCMD “RESET-CONTROL-
MAP”
Y If coordinates are designated, both X and Y
coordinate must be provided.
CPNAME “X” N X parameter.
CPVAL U4 X coordinate value.
CPNAME “Y” N Y parameter.
RESET-CONTROL-MAP
CPVAL U4 Y coordinate value.
RCMD “SET-PROBE-CARD-
ID”
Y
CPNAME “PROBECARDID” Y Probe Card ID parameter.
SET-PROBE-CARD-ID
CPVAL A [n] Probe card identifier.
SEMI E130.1-1104 © SEMI 2004 5
Service SECS-II Field Values Req. Description
RCMD “SET-CONTROL-
MAP”
Y
CPNAME “CONTROLMAP” Y ControlMap parameter.
CPVAL A [n] Control Map identifier.
CPNAME “X” N X parameter.
CPVAL U4 X coordinate value.
CPNAME “Y” N Y parameter.
SET-CONTROL-MAP
CPVAL U4 Y coordinate value.
UNLOAD-SUBSTRATE RCMD “UNLOAD-
SUBSTRATE”
Y
RCMD “UNLOAD-TEST-
SUBST”
Y
CPNAME “SUBSTLOCID” Y SubstLocID parameter.
UNLOAD-TEST-SUBST
CPVAL A [n] Target substrate location.
RCMD “UNLOAD-
ALLSUBSTRATES”
Y
CPNAME “SUSPEND” N SUSPEND parameter.
UNLOAD-
ALLSUBSTRATES
CPVAL BOOLEAN If TRUE, causes substrate occupying chuck
to be suspended.
ONLINE-LOCAL RCMD “ONLINE-LOCAL” Y
6 Variable Data Item Mapping
6.1 The purpose of this section is to define the list of variable items required by SEMI E130. Values of these
variables will be available to the host through collection event reports and host status queries.
6.2 Requirements
6.2.1 Any supplier-defined variables shall be documented in the same format used by this document. The following
minimum information is required:
<variable name> Class: <ECV, SV, or DVVAL> Format: <SML>
Description: <If class = DVVAL, description must contain statement of when data is valid.>
<If format = ASCII, then a length is required. It is assumed to be left-justified unless otherwise noted.>
6.3 Data Types
6.3.1 Equipment Constants (ECVs) can be changed by the host using S2,F15 (New Equipment Constant Send). The
operator may be able to change some values, but the equipment does not change the values on its own. The value of
an equipment constant may be queried by the host at any time, using the S2,F13/14 transaction. They reside in non-
volatile memory of the equipment. Equipment constants remain in effect until they are overwritten either by manual
entry or by a S2,F15.
6.3.2 Status Variables (SVs) are valid at all times. An SV may not be changed by the host but may be changed by
the equipment or operator. The value of status variables may be queried by the host at anytime using the S1,F3/4 or
S6,F19/20 transactions.
6.3.3 DVVALs are variables that are valid only upon the occurrence of specific collection events. An attempt to
read a variable item at the wrong time does not generate an error, but the data reported may not have relevant
meaning.
6.4 For multiple sites scenarios, if a variable is described as List by number of sites, then a list is expected, one
value for each site.