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SEMI MF1569-0705 © SEMI 2003, 2005 1 SEMI MF1569-0705 GUIDE FOR GENERATION OF CO NSENSUS REFERENCE MATERIALS FOR SEMICONDUCTOR TECHNOLOGY This guide was technically approved b y the global Silicon Wafer Com mittee. This …

SEMI MF1535-1104 © SEMI 2004 16

Figure R3-3

Low-Injection Recombination Lifetime (solid curve)

as a Function of Resistivity for Iron-Boron Pairs in

p-Type Silicon at Room Temperature

Figure R3-2

Low-In

ection Recombination Lifetime (solid

curve) as a Function of Resistivity for

Elemental Iron in n-Type Silicon at Room

Temperature

Figure R3-1

Low-In

ection Recombination Lifetime (solid

curve) as a Function of Resistivity for

Elemental Iron in p-Type Silicon at Room

Temperature

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SEMI MF1569-0705 © SEMI 2003, 2005 1

SEMI MF1569-0705

GUIDE FOR GENERATION OF CONSENSUS REFERENCE MATERIALS

FOR SEMICONDUCTOR TECHNOLOGY

This guide was technically approved by the global Silicon Wafer Committee. This edition was approved for

publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available at

www.semi.org in June 2005 and on CD-ROM in July 2005. Original edition published by ASTM

International as ASTM F 1569-94. Last previous edition SEMI MF1569-94 (Reapproved 1999).

1 Purpose

1.1 This guide covers the procedures for producing a single set of consensus reference materials (ConRefs) in the

absence of suitable certified reference materials from an established source.

1.2 Such reference materials are frequently required for calibration of measurement systems to reduce bias

differences between different organizations.

1.3 The generated ConRefs can be used by a single laboratory for internal use or for interlaboratory comparison of

related equipment and materials.

1.4 Most often, however, they are used for replicating multiple sets of reference materials. In such a case, the

property values of these reference materials are traceable to the values of the property value of the ConRefs.

Depending on the nature of the preparing organization, these multiple sets may be certified reference materials or

working reference materials. For this purpose, a guide for generation of reference materials specific to the materials

and property may be required; Appendix 1 outlines the requirements for preparing a guide for generation of multiple

sets of reference materials.

2 Scope

2.1 This guide covers the steps to be taken to generate a set of ConRefs for a specific property or family of related

properties required in semiconductor technology.

2.2 The procedure for generating the set of ConRefs is based on interlaboratory testing in accordance with ASTM

Practice E 691. It is assumed for the purposes of this guide that the test method evaluated by the interlaboratory

study (ILS) is appropriate for determining the property values of the ConRef.

2.3 This guide does not cover the selection of one of several possible test methods nor does it cover the case for

which other reference materials must be used in the measurement of the properties of the ConRef.

2.4 This guide also describes procedures that may be used to generate consensus property values that may form the

basis for the generation of multiple sets of CRMs or reference materials (RMs).

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the user of this standard to establish appropriate safety and health guides and determine the

applicability of regulatory or other limitations prior to use.

3 Referenced Standards and Documents

3.1 ASTM Standards

E 456 — Terminology Relating to Quality and Statistics

E 691 — Practice for Conducting an Interlaboratory Study to Determine the Precision of a Test Method

3.2 ISO Standards

ISO Guide 30:1981 — Terms and Definitions Used in Connection with Reference Materials

1 Annual Book of ASTM Standards, Vol 14.02, ASTM International, 100 Barr Harbor Drive, West Conshohocken, PA 19428. Telephone: 610-

832-9500, Fax: 610-832-9555, Website:

www.astm.org

ISO 8402 — Quality—Vocabulary

ISO 10012-1 — Quality Assurance Requirements for Measuring Equipment—Part 1: Management of Measuring

Equipment

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

4 Terminology

4.1 Definitions

NOTE 1: See Figure 1 for a schematic presentation of the hierarchy of reference materials.

Figure 1

Reference Material Hierarchy

4.1.1 certified reference material (CRM) — a reference material one or more of whose property values are certified

by a technically valid procedure, accompanied by or traceable to a certificate or other documentation that is issued

by a certifying body (ISO Guide 30:1981).

4.1.2 consensus reference material (ConRef) — a reference material one or more of whose property values have

been established by a documented ILS that is based on a technically valid test method.

4.1.3 reference material (RM) — a material or substance one or more properties of which are sufficiently well

established to be used for the calibration of an apparatus, (for) the assessment of a measurement method, or for

assigning values to materials (ISO Guide 30:1981; ISO 10012-1).

4.1.3.1 Discussion — A reference material made by a laboratory for its own use is referred to as a working

reference material (WRM). This term is gradually replacing the term, secondary reference material, which has been

used widely in the past.

4.1.4 Standard Reference Material (SRM

) — a certified reference material issued by the U.S. National Institute of

Standards and Technology.

4.1.5 traceability — the ability to trace the history, application, or location of an item or activity, or similar items or

activities, by means of recorded identification (ISO 8402).

4.1.5.1 Discussion — ISO 8402 states that in a calibration sense, traceability relates measuring equipment to

national or international standards, primary standards, or basic physical constants or properties. In this guide, as in

2 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.

Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30, Website: /www.iso.ch; available in the U.S. from American National Standards Institute,

New York, NY 10036, USA. Telephone: 212.642.4900, Fax: 212.398.0023, Website:

www.ansi.org

3 SRM

is a registered trademark of the U.S. National Institute of Standards and Technology and the U.S. Government.