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SEMI S2-0703a E © SEMI 1991, 2004 48 NOTICE : Paragraphs entitled “NOTE” are not an official part of this safety guideline an d are not intended to modify or su persede the official safety guideline. These have been supp…

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SEMI S2-0703a
E
© SEMI 1991, 2004 47
APPENDIX 6
FIRE PROTECTION: FLOWCHART FOR SELECTING MATERIALS OF
CONSTRUCTION
NOTICE: The material in this appendix is an official part of SEMI S2 and was approved by full letter ballot
procedures on December 15, 1999 by the North American Regional Standards Committee.
Construct of
materials which do
not propagate flame
*
Can the system
reasonably be constructed
of materials which do not
propagate flame
*
?
Start
Construct from
non-combustible
materials
Can the system
reasonably be constructed
of non-combustible
materials?
Is there a significant fire
risk, based on process
chemicals?
End
No
No
Does a qualified
party (see Section 14.2.1)
accept the risk assessment and
engineering controls?
No
Yes
Yes
Yes
Design engineering controls to mitigate
the fire risks based on materials of
construction and process chemicals.
This may include fire detection and
suppression systems.
No
Yes
Assess the fire risks based on the
materials of construction and process
chemicals.
Assess the fire risks based
on the process chemicals.
*beyond the ignition zone with or
without the continued application of
the ignition source
SEMI S2-0703a
E
© SEMI 1991, 2004 48
NOTICE: Paragraphs entitled “NOTE” are not an
official part of this safety guideline and are not intended
to modify or supersede the official safety guideline.
These have been supplied by the committee to enhance
the usage of the safety guideline.
SEMI makes no warranties or representations as to the
suitability of the guideline set forth herein for any
particular application. The determination of the
suitability of the guideline is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. This guideline is subject to change
without notice.
The user’s attention is called to the possibility that
compliance with this guideline may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this guideline, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this guideline. Users of this guideline
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
NOTICE: A new Appendix will be added (in
numerical order) upon July 1, 2006 publication as
shown in Delayed Revisions Section 1. The EH&S
Committee has voted that addition of this Appendix
section is OPTIONAL before the Effective Date.
SEMI S2-0703a
E
© SEMI 1991, 2004 49
RELATED INFORMATION INDEX
NOTICE: The RI index below will be withdrawn upon July 1, 2006 publication and replaced by a new RI
Index that captures the appropriate Related Information as approved by the EH&S Committee ballot. The
EH&S Committee has voted that implementation of the information is OPTIONAL before the effective date.
CONTENTS
Related Information 1 — Equipment/Product Safety Program
Related Information 2 — Additional Standards That May Be Helpful
Related Information 3 — Hazard Labels
Related Information 4 — EMO Reach Considerations
Related Information 5 — Seismic Protection
Related Information 6 — Continuous Hazardous Gas Detection
Related Information 7 — Documentation of Ionizing Radiation (Section 24 and Appendix 4) Including Rationale for
Changes
Related Information 8 — Documentation of Non-ionizing Radiation (Section 25 and Appendix 5) Including
Rationale for Changes
Related Information 9 — Laser Checklist
Related Information 10 — Laser Certification Requirements by Region of Use
Related Information 11 — Other Requirements by Region of Use
Related Information 12 — Light Tower Color and Audible Alert Codes
Related Information 13 — Surface Temperature Documentation
Related Information 14 — Recommendations for Designing and Selecting Fail-to-Safe Equipment Control Systems
(FECS) With Solid State Interlocks and EMO
Related Information 15 — Additional Considerations for Fire Suppression Systems