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SEMI F64-0701 © SEMI 2001 11 Figure 9 Method C Flowchar t DUT x units Gas P P MFM Flow Standard P MFC 10x DUT Gas P1 P2 P3 Figure 10 Test Sch ematic for Method D

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SEMI F64-0701 © SEMI 2001 10
Figure 7
Method A-2 Flowchart
Figure 8
Method B Flowchart
SEMI F64-0701 © SEMI 200111
Figure 9
Method C Flowchart
DUT
x units Gas
P
P
MFM
Flow Standard
P
MFC
10x DUT Gas
P1
P2
P3
Figure 10
Test Schematic for Method D
SEMI F64-0701 © SEMI 2001 12
Time
0
Flo
w
10X MFC Indicated Flow
DUT Indicated Flow
DUT Actual Flow
Figure 11 Plots
Test Method D
Table 1 Data Presentation for Method B (see Appendix 1)
PC
o
= __________% of FS/psi
@ 50% FS @ FS
PC
A
(% of reading/psi)