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SEMI E54.9-0303 © SEMI 2000, 2003 1 SEMI E54.9-0303 SPECIFICATION FOR SENSOR/ACTUATOR NETW ORK COMMUNICATION FOR MOD BUS/TCP OVER TCP/IP This specification was technically approved by the Global Information and Control C…

SEMI E54.8-0305 © SEMI 1999, 2005 21

9.6.5 Services

9.6.5.1 The mapping of Service Tags and Identifiers is defined in §7 for SAC. The same method applies here for

the SDM.

9.6.5.2 The additional Services of SAC are mapped as described in Table 38.

Table 38 SAC additional Service mapping

SEMI SDM Service

Service Write Value to

Index 64

SacS33 Reset Endpoint 33

SacS34 Download Recipe 34

SacS35 Upload Recipe 35

SacS36 Calibrate 36

9.6.5.3 The additional Services of Sensor BI-EP are mapped as described in Table 39.

Table 39 Sensor BI-EP additional Service mapping

SEMI SDM Service

Service Write Value to

Index 64

EpS1 Endpoint On 11

EpS2 Endpoint Off 12

EpS3 Endpoint Start 13

EpS4 Endpoint Suspend 14

EpS5 Endpoint Resume 15

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SEMI E54.9-0303 © SEMI 2000, 2003 1

SEMI E54.9-0303

SPECIFICATION FOR SENSOR/ACTUATOR NETWORK

COMMUNICATION FOR MODBUS/TCP OVER TCP/IP

This specification was technically approved by the Global Information and Control Committee and is the

direct responsibility of the North American Information and Control Committee. Current edition approved by

the North American Regional Standards Committee on October 25, 2002. Initially available at

www.semi.org December 2002; to be published March 2003. Originally published February 2000; previously

published October 2000.

1 Purpose

1.1 This standard defines a communication

specification based on the Modbus/TCP protocol over a

Transmission Control Protocol/Internet Protocol

(TCP/IP) network to enable communications between

intelligent devices on a sensor/actuator network (SAN)

that operate according to SEMI specified device models

(common and device specific) in a semiconductor

manufacturing tool.

1.2 Background and Motivation

1.2.1 Modbus/TCP over TCP/IP is a component level

network which provides a simple, inexpensive, and fast

means of exchanging data among control level

industrial devices (e.g., sensors and actuators) and

higher level devices such as controllers. Modbus/TCP

over TCP/IP provides:

• A solution to low-level device networking,

• Access to intelligence present in low-level devices,

• Networking between higher level controllers, and

• Master/Slave and Peer-to-Peer communication

capabilities.

1.2.2 Modbus/TCP specifies a communication model

and protocol. The Physical, Data Link, and Network

Layer definitions are defined by the network in which

the Modbus/TCP protocol is embedded such as TCP/IP

Ethernet.

1.2.3 This document enables communications between

intelligent devices on a SEMI compliant SAN by

providing a presentation mapping of common and

specific device network visible structure and behavior

to Modbus/TCP over a TCP/IP network.

2 Scope

2.1 This document specifies the protocol and services

that compliant intelligent devices must support to

exchange information over this semiconductor

equipment sensor/actuator network.

2.2 This document specifies the utilization of the

Modbus/TCP protocol to present externally visible

device structure and behavior, specified in the Common

Device Model (CDM) and appropriate Specific Device

Models (SDMs), for the Modbus/TCP protocol over a

TCP/IP network.

2.3 This document is used in conjunction with a SEMI

standard SAN Common Device Model specification,

one or more SEMI standard Specific Device Model

(SDM) specifications (e.g., for a mass flow device), the

Modicon Modbus Protocol Reference Guide and the

Open Modbus/TCP Specification. Together, they

describe the Modbus/TCP protocol, the externally

visible data structures and behaviors of devices utilizing

the Modbus/TCP networking capability in a SEMI

compliant SAN system.

3 Limitations

3.1 This document specifies a semiconductor

equipment SAN based solely on Modbus/TCP over a

TCP/IP network and is a companion document to the

Open Modbus/TCP Specification; thus a complete

specification of this standard necessarily includes the

Modbus/TCP and Modbus protocol specifications.

There are other semiconductor equipment SAN

communications options. The specifications for these

options are not included here.

3.2 This standard specifies enhancements that provide

additional capabilities over and above those currently

required by Modbus/TCP. In order to avoid document

consistency problems, information in the Modbus/TCP

standard specifications that relate to this standard is not

repeated in this document. This document is limited to

describing enhancements or limitations to the

Modbus/TCP standard specifications that are imposed

by this standard.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

SEMI E54.9-0303 © SEMI 2000, 2003 2

4 Referenced Standards

4.1 SEMI Standards

SEMI E39 — Object Services Standard: Concepts,

Behavior, and Services (OSS)

SEMI E54.1 — Standard for Sensor/Actuator Network

Common Device Model

SEMI E54.3 — Specification for Sensor/Actuator

Network Specific Device Model for Mass Flow Device

4.2 Other Standards

IEEE 802.3 –– Telecommunication and Information

Exchange between System Local and Metropolitan

Networks Specific Requirement Part 3: Carrier Sense

Multiple Access CSMA/CD Method and Physical

Layer Specification, 1998

IP RFC 791 — Reference for data transmission

ISO 7498 — Basic Reference Model for Open Systems

Interconnection

PI-MBUS-300 Rev. E — Modicon Modbus Protocol

Reference Guide, March 1993

Specification — Open Modbus/TCP Specification

Version 1.0 March 29, 1999

NOTICE: As listed or revised, all documents cited

shall be the latest publications of adopted standards.

5 Terminology

5.1 Terminology that is common to all of the

documents in this SAN standard may also be defined in

the Sensor/Actuator Network standard. Terminology

may be reproduced here which is defined in other SEMI

standards.

5.2 Abbreviations and Acronyms

5.2.1 CDM — Common Device Model

5.2.2 DM — Device Manager (object)

5.2.3 IP — Internet Protocol

5.2.4 NCS — Network Communication Standard

5.2.5 OSI — Open Systems Interconnect

5.2.6 OSS — Object Services Standard

5.2.7 SAC — Sensor, Actuator, Controller (Object)

1 IEEE, 3 Park Avenue, 17th Floor, New York, NY 10016 U.S.A.

tel: 212 419 7900 fax: 212 752 4929. http://www.ieee.org/

2 http://src.doc.ic.ac.uk/computing/internet/rfc/rfc791.txt

3 ISO Central Secretariat, 1, rue de Varembé, Case postale 56,

CH-1211 Genève 20, Switzerland

4 http://www.modicon.com/openmbus/standards/standards.htm

5.2.8 SAN — Sensor/Actuator Network

5.2.9 SDM — Specific Device Model

5.2.10 TCP — Transmission Control Protocol

5.3 Device Component Definitions

5.3.1 As this standard defines the presentation or

mapping of CDM data structure and behavior over a

network, it makes use of many of the terms in SEMI

E54.1. Table 1 provides a mapping of fundamental

terminology of the CDM document into this document

and the Modbus/TCP standard specifications.

NOTE 1: Column 2 contains an equal sign “=” if the

definition is used exactly as specified in the CDM

specification.

Table 1 Mapping of CDM to NCS Terminology

CDM Term NCS

Equivalent

Modbus/TCP

Equivalent

Device = =

Device Model = =

Object =, Class,

Instance

=, Class,

Instance

Instance = =

Attribute = =

Behavior = =

Service = =

State Diagram = =

Byte = =

Nibble = =

Character String = =

5.4 Modbus/TCP Specific Definitions

5.4.1 class — a set of objects that represent the same

kind of system component. A class is a generalization

of an object. All objects in a class are identical in form

and behavior, but may contain different attribute values

as well as additional attributes and services. Refer to

SEMI E39 for further definition.

5.4.2 master/slave — communication over a Modbus

network, which is referred to as “client/server”, that

provides exclusive control of data by a “master” or

“host” device acting as a “client”. All network input

data is reported exclusively to the host when requested

by the host, and the host has exclusive control over the

states of all network output signals of all nodes acting

as it’s “slaves” or “servers”. Master/Slave communica-

tion provides the typical request/response oriented

network communications.

5.4.3 modbus/TCP — an open protocol established at

The University of Michigan’s Electronics Manufact-

uring Laboratory as a standard means of intercon-