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SEMI E54.14-0305 © SEMI 2005 2 4 Referenced Standards 4.1 SEM I Standards SEMI E39 — Object Se rvices Standard : Co ncepts, Beha vior, a nd Services SEMI E54.1 — Standard for Sensor/ Actuator Network C ommon Devi ce Mode…

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SEMI E54.14-0305 © SEMI 2005 1
SEMI E54.14-0305
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK
COMMUNICATIONS FOR PROFINET
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the European Equipment Automation Committee. Current edition approved by the
European Regional Standards Committee on November 10, 2004. Initially available at www.semi.org
February 2005; to be published March 2005.
1 Purpose
1.1 This specification is part of the SEMI Sensor/Actuator Network (SAN) suite of standards and defines a specific
communications protocol based on the PROFINET standard. This Network Communication Standard (NCS) taken
together with the SEMI Sensor/Actuator Network standard suite and the PROFINET standard completely and
unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of
networked devices in semiconductor manufacturing equipment.
1.2 PROFINET is a vendor independent, open field bus standard for a wide range of applications in manufacturing,
process and building automation.
1.3 The application model of PROFINET is compatible with the model of PROFIBUS. The same mapping rules
apply.
1.4 PROFINET is optimized for high speed and inexpensive connectivity between automation control systems and
distributed I/O at the device level.
2 Scope
2.1 This document specifies a SAN communications standard based on the PROFINET specification that is in
compliance with SEMI E54.1. As such, it specifies the protocol, services, and behavior that compliant intelligent
devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.
2.2 In conjunction with a SEMI standard SAN Common Device Model (CDM) specification and one or more SEMI
standard Specific Device Model (SDM) specifications (e.g., for a mass flow controller), this Network
Communication Standard (NCS) with the related PROFINET standard describe the data structures, interactions, and
behavior that are characteristic of the various devices on the network. This composite model forms a complete
interoperability standard for communications among intelligent sensors, actuators, and controllers in semiconductor
manufacturing equipment.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This document specifies a semiconductor equipment SAN based solely on PROFINET and is a companion
document to the PROFINET specification, including, by reference, the PROFINET standard; thus, a complete
specification of this standard necessarily includes the PROFINET specifications. There are other semiconductor
equipment SAN communications options. The specifications for these options are not included here.
3.2 The specifications within are strictly enhancements that provide additional capabilities over and above those
currently required by PROFINET. Included throughout this document, primarily in §6, is information paraphrased
from the PROFINET specifications such as: protocol structure, capabilities, options, and limitations. This
information is provided here for reference only and is not intended to provide specification definitions. In all such
areas, refer to the PROFINET specification documents for information. This document is limited to describing
enhancements or limitations to the PROFINET specification that are imposed by this standard.
3.3 A complete specification of the conformance testing procedure shall include the PROFINET protocol
conformance testing specification. Conformance testing shall also include enhancements and limitations to the
PROFINET specification required by this standard.
SEMI E54.14-0305 © SEMI 2005 2
4 Referenced Standards
4.1 SEMI Standards
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor
Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
4.2 IEC Standards
1
IEC 61158-5 — Digital data communication for measurement and control – Fieldbus for use in industrial control
systems – Application Layer service definition (reference standard for the model in use)
IEC 61158-6 — Digital data communication for measurement and control – Fieldbus for use in industrial control
systems – Application Layer protocol specification (reference standard for the model in use)
4.3 IEEE Standards
2
IEEE 802.3 — Telecommunications and information exchange between systems — Local and metropolitan area
networks — Part 3:Carrier sense multiple access with collision detection (CSMA/CD) access method and physical
layer specifications
IEEE 802.1D — Telecommunications and information exchange between systems — Local and metropolitan area
networks — Common specifications — Media Access Control (MAC) Bridges
IEEE 802.1Q — Telecommunications and information exchange between systems — Local and metropolitan area
networks — Common specifications —Virtual Bridged Local Area Networks
4.4 ISO Standards
3
ISO 7498 Information Technology — Open Systems Interconnection — Basic Reference Model
4.5 PROFINET Standards
4
PROFINET IO — Application Layer protocol specification
PROFINET IO — Application Layer service definition
PROFIBUS Profile Guidelines — Part 1: Identification & Maintenance Functions
PROFINET — Discovery and Configuration Protocol
PROFINET — Installation Guideline
GSD Specification for PROFINET
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 APDU — Application Protocol Data Unit
1 International Electrotechnical Commission 3, rue de Varembé, Case Postale 131, CH-1211 Geneva 20, Switzerland. Telephone:
41.22.919.02.11; Fax: 41.22.919.03.00, Website: www.iec.ch
2 IEEE , The Institute of Electrical and Electronics Engineers, Inc., 3 Park Avenue, New York, NY 10016-5997, USA, Website: www.ieee.org
3 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30, Website: www.iso.ch
4 Profibus International, Haid-und-Neu-Str. 7,76131 Karlsruhe, Germany, Telephone: 49 721 9658 590; Fax: 49 721 9658 589, Website:
www.profibus.com
SEMI E54.14-0305 © SEMI 2005 3
5.1.2 AREP — Application Reference Endpoint
5.1.3 ASE — Application Service Element
5.1.4 CDM — Common Device Model
5.1.5 DCE — Distributed Computing Environment
5.1.6 DCP — Discovery and Configuration Protocol
5.1.7 DHCP — Dynamic Host Configuration Protocol
5.1.8 DM — Device Manager
5.1.9 GSD — Generic station description
5.1.10 IM — Identification and Maintenance
5.1.11 IO — Input Output
5.1.12 IP — Internet Protocol
5.1.13 NCS — Network Communication Standard
5.1.14 OSI — Basic Reference Model for Open Systems Interconnection (ISO 7498)
5.1.15 PDU — Protocol Data Unit
5.1.16 PHY — Physical Layer
5.1.17 RPC — Remote Procedure Call
5.1.18 SAC — Sensor, actor, controller (object)
5.1.19 SAN — Sensor/actor network
5.1.20 SAP — Service Access Point
5.1.21 SDM — Specific Device Model
5.1.22 UDP — User Datagram Protocol
5.2 Terminology Defined in Sensor/Actuator Network Common Device Model (SEMI E54.1)
5.2.1 attribute
5.2.2 behavior
5.2.3 byte
5.2.4
common device model
5.2.5 device
5.2.6 Device Manager (DM) Object
5.2.7 device model
5.2.8 instance
5.2.9 network communication standard
5.2.10 object
5.2.11 Sensor, Actuator and Controller (SAC) Object
5.2.12 service
5.2.13 specific device model
5.2.14 state diagram