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SEMI F59-0302 © SEMI 2000, 2002 8 Table 1 D UT Flow Pressure Drop for Integral Filtration U nit or Gas Sy stem DUT Unit Identification Test Num ber _____________________ Date _____________________ Operator Name _________…
SEMI F59-0302 © SEMI 2000, 2002 7
Minimum (2.5x)A,
Recommended (5x)A
A
Size of Pipe “A” Not Exceeding “A” Not Less than
Less than 50 mm (2 in.) 6 mm (1/4 in.) 3 mm (1/8 in.)
50 mm to 75 mm (2–3 in.) 9 mm (3/8 in.) 3 mm (1/8 in.)
100 mm to 200 mm (4–8 in.) 13 mm (1/2 in.) 3 mm (1/8 in.)
250 mm and greater ( 10 in. and greater) 19 mm (3/4 in.) 3 mm (1/8 in.)
NOTE 1: Edge of hole must be clean and sharp or slightly rounded, free from burrs, wire edges or other irregularities. In no case
shall fitting protrude inside pipe.
NOTE 2: Any suitable method of making the physical connection is acceptable if above recommendations are adhered to.
See ASME Performance Test Code PTC 19.5-1972, “Applications. Part II of Fluid Meters, Interim Supplement on
Instruments and Apparatus.
Figure 3
Recommended Pressure Connection
SEMI F59-0302 © SEMI 2000, 2002 8
Table 1 DUT Flow Pressure Drop for Integral Filtration Unit or Gas System
DUT Unit Identification
Test Number _____________________
Date _____________________
Operator Name _____________________
Barometric Pressure _____________________
Test Gas _____________________
Integral Filtration Unit or Gas System
Ambient
Temperature
(
o
C)
Inlet Pressure
(psig, gauge)
∆
P(Unit) Differential
Pressure, unit
(psid, differential)
Flow Meter
Reading
(units)
Normal
Flow
Rate(m
3
/hr)
SEMI F59-0302 © SEMI 2000, 2002 9
Table 2 Filter Flow Pressure Drop for Housing with Cartridge Element Removed
Filter Unit Identification
Test Number _____________________
Date _____________________
Operator Name _____________________
Barometric Pressure _____________________
Test Gas _____________________
Housing with Cartridge Removed
Ambient
Temperature
(
o
C)
Inlet Pressure
(psig, gauge)
∆
P(Housing)
Differential Pressure,
H
ousing
(psid, differential)
Flow Meter
Reading (units)
Normal
Flow Rate
(m
3
/hr)
Table 3 Filter Flow Pressure Drop for Cartridge Element
Cartridge Pressure Drop
∆P(cartridge) = ∆P(Unit) – ∆P(Housing)
Normal Flow Rate
(m
3
/hr)
∆
P(Unit) Differential
Pressure, unit
(psid, differential)
∆
P(Housing) Differential
Pressure, Housing
(psid, differential)
∆
P(cartridge) Differential
Pressure, Cartridge
(psid, differential)