semi合集-English.pdf - 第4280页

SEMI F79-0703 © SEMI 2003 17 SEMI Gas # Chemical Name Cate gory Symbol Formula Synonym 13 Nitrogen 11 N2 N 2 26 Nitrogen Dioxide 11 NO2 NO 2 95 Nitrogen Tetroxide 11 N2O4 N 2 O 4 Dinitrogenoxide 78 Nitrogen Trioxide 11 N…

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SEMI F79-0703 © SEMI 2003
16
SEMI Gas # Chemical Name Category Symbol Formula Synonym
132 Trimethylphosphorus 9 C3H9P (CH
3
)
3
P Trimethylphosphine, TMP
303 Trimethylvinylsilane 9 C5H12Si C
5
H
12
Si Vinyltrimethylsilane
6.10 Oxygen and Oxides and
Sulfides
10
8 Air 10 Air
25 Carbon Dioxide 10 CO2 CO
2
40 Carbon Disulfide 10 CS2 CS
2
9 Carbon Monoxide 10 CO CO
34 Carbonyl Sulfide 10 COS COS
298 Diethyl Sulfide 10 C4H10S C
4
H
10
S UN2375; Ethyl sulfide;
230 Iron Carbonyl 10 C5O5Fe Fe(CO)
5
47 Methyl Mercaptan 10 CH4S CH
3
SH
140 Nickel Carbonyl 10 C4O4Ni Ni(CO)
4
15 Oxygen 10 O2 O
2
30 Ozone 10 O3 O
3
32 Sulfur Dioxide 10 SO2 SO
2
246 Sulfur Trioxide 10 SO3 SO
3
273 Tungsten Hexacarbonyl 10 C6O6W W(CO)
6
20 Water Vapor 10 H2O H
2
O
6.11 Nitrogen and Nitrogen
Compounds
11
173 Acetonitrile 11 C2H3N CH
3
CN
276 Acrylonitrile 11 C3H3N CH
2
=CHCN Acrylon; Propenenitrile
29 Ammonia 11 NH3 NH
3
198 Borazine 11 B3N3H6 H
3
B
3
N
3
H
3
59 Cyanogen 11 C2N2 NCCN Oxalodinitrile
37 Cyanogen Chloride 11 ClCN ClCN
213 Diethylamine 11 C4H11N (C
2
H
5
)
2
NH
85 Dimethylamine 11 C2H7N (CH
3
)
2
NH
166 Dimethylethylaminealane 11 C4H14NAl (CH
3
)
2
C
2
H
5
NAlH
3
DMEAA
281 Diphenylmethan-4,4' -diisocyanat 11 C15H10N2O C
15
H
10
N
2
O UN2489
280 Diphenylmethylenediamine 11 C13H14N2 C
13
H
14
N
2
275 Hafnium Tetranitrate 11 HfN4O12 Hf(NO
3
)
4
50 Hydrazine 11 N2H4 H
2
NNH
2
269 Hydrazoic Acid 11 HN3 HN
3
52 Methylamine 11 CH5N CH
3
NH
2
Amino Methane
233 Monoethylamine 11 C2H7N C
2
H
5
NH
2
234 Monomethyl Hydrazine 11 CH6N2 CH
3
N
2
H
3
16 Nitric Oxide 11 NO NO
SEMI F79-0703 © SEMI 2003 17
SEMI Gas # Chemical Name Category Symbol Formula Synonym
13 Nitrogen 11 N2 N
2
26 Nitrogen Dioxide 11 NO2 NO
2
95 Nitrogen Tetroxide 11 N2O4 N
2
O
4
Dinitrogenoxide
78 Nitrogen Trioxide 11 N2O3 N
2
O
3
235 Nitromethane 11 CH3NO2 CH
3
NO
2
141 Nitrosyl Chloride 11 NOCl NOCl
27 Nitrous Oxide 11 N2O N
2
O
293 Propenamine 11 C3H7N C
3
H
7
N Allylamine; UN2334
304 Pyridine 11 C5H5N C
5
H
5
N Azabenzene; Azine
320 Triallylamine 11 C9H15N C
9
H
15
N
310 Triethylamine 11 C6H15N (C
2
H
5
)
3
N UN 1296; Ethanamine;
260 Trifluoroacetonitrile 11 C2F3N F
3
CCN
109 Trimethylamine 11 C3H9N (CH
3
)
3
N Methylamine
165 Trimethylaminealane 11 C3H12AlN (CH
3
)
3
NAlH
3
TMAA
314 Trimethylisoxazole 11 C6H9NO
CH
3
CH=CHCH=C
HCONH
2
3,4,5-Trimethylisoxazole
6.12 Acids 12
283 Acetic acid 12 C2H4O2 CH
3
COOH Ethanoic acid; UN 2789;
289 Acrylic acid 12 C3H4O2 C
3
H
4
O
2
2-Propenoic acid
167 Nitric Acid 12 HNO3 HNO
3
334 Propanoic acid 12 C3H6O2 CH
3
CH
2
CO
2
H Propionic acid
171 Sulfuric Acid 12 H2SO4 H
2
SO
4
259 Trifluoroacetic Acid 12 CF3CO2H CF
3
CO
2
H
294 Trimethyl Ester Phosphoric acid 12 C3H9O4P C
3
H
9
O
4
P Methyl phosphate
6.13 Other 13
329 Mercury 13 Hg Hg UN2809
330 Zinc 13 Zn Zn UN 1383
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f
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consent of SEMI.
SEMI F80-1103 © SEMI 2003 1
SEMI F80-1103
TEST METHOD FOR DETERMINATION OF GAS CHANGE/PURGE
EFFICIENCY OF GAS DELIVERY SYSTEM
This test method was technically approved by the Global Facilities Committee and is the direct responsibility
of the Japanese Facilities Committee. Current edition approved by the Japanese Regional Standards
Committee on August 8, 2003. Initially available at www.semi.org October 2003; to be published November
2003.
1 Purpose
1.1 This document is a guide to a test method to
determine gas change/purge efficiency of gas delivery
system.
2 Scope
2.1 It covers both conventional metal face sealing and
surface mount gas delivery systems.
2.2 The test method applies to all type of high purity
gas delivery systems used in semiconductor
manufacturing facilities and comparable research and
development areas.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 All components must meet quality requirements as
established and controlled by manufacturers prior to
testing (e.g., dimensional, functional, etc.).
3.2 Care should be exercised in handling of
components to maintain manufacturer’s specifications.
4 Referenced Standards
None.
5 Terminology
5.1 Abbreviations and Acronyms (See Figure 1.)
5.1.1 APIMS — Atmospheric Pressure Ionization Mass
Spectrometer
5.2 Definitions
5.2.1 purge efficiency — the ratio of process gas
concentration before and after the purge event.
5.2.2 required concentration — a concentration that a
user of the gas delivery system required.
6 Condition
6.1 Test shall be performed at 22° C ± 4° C.
6.2 Test gas shall be used for measuring equipment and
shall not be adsorptive gas. Two gases shall be used as
the test gases. They are indicated as Gas A and Gas B
in this test method.
6.3 APIMS or measuring equipment that has a low
detectable limit and has a good response capability of
gas densitometer.
NOTE 1: APIMS is widely used for this type of
measurement.
NOTE 2: Qmass is not considered as a recommended option
as the following reasons; (1) Special sampling valve needs to
be installed on the testing equipment. (2) Detectable limit of
Qmass is high.
NOTE 3: An oximeter is not considered as a recommended
option because it does not have enough capability of response.
6.4 Flow rate of each gas for this test shall be
determined by a mass flow controller of the System
Under Test and a capability of the measuring
equipment.
7 Procedure
7.1 Case (1) — This is the test method in consideration
of purge line in the gas delivery system.
7.1.1 A recommended test flow schematic is shown in
Figure 2.
7.1.2 The test is to evaluate a purge efficiency of gas
delivery systems by using its process line and purge
line.
7.1.3 Set each component for the following condition
before starting the test. APV1, APV2, APV3, APV4,
and APV5 are closed condition. Rest of the components
in the System Under Test are open condition. Supply
Gas A to the upstream of APV1. Supply Gas B to the
upstream of APV2. (See Figure 2.)
7.1.4 Open APV5 and flow Gas A from Bypass line.
(1) Close PV3, open APV3, and vacuum the System
Under Test. (2) (See Figure 3.)