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SEMI E6-0303 © SEMI 1982, 2003 28 RELATED INFORMATION 2 SHIPPING AND RECIEVI NG INFORMATION NOTICE : This related information is being balloted, but is not an official part of SEMI E6 and is not inten ded to modify or su…

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SEMI E6-0303 © SEMI 1982, 2003 27
RELATED INFORMATION 1
ADMINISTRATIVE INTERFACE INFORMATION
NOTICE: This related information is being balloted, but is not an official part of SEMI E6 and is not intended to
modify or supersede the official standard. It has been derived from the work of the originating task force.
Determination of the suitability of the material is solely the responsibility of the user.
R1-1 Installation Contacts
R1-1.1 Table R1-1 shows an example of the administrative interfaces information – installation contacts sheet to be
included with equipment installation documentation as recommended in SEMI E6 Section 7.1.1.
R1-2 Installation Roles and Responsibilities
R1-2.1 In addition to contacts, an explanation of supplier’s installation responsibilities and purchaser’s
responsibilities should be included to complete the administrative interface information.
Table R1-1 Example of Administrative Interface Information – Installation Contacts
Supplier Purchaser
Company Name
Address
Administrative Contact:
Name/Title
Phone/Fax
Email:
Sales/Purchasing Contact:
Name/Title
Phone/Fax
Email:
Shipping Contact:
Name/Title
Phone/Fax
Email:
Technical Support Contact:
Name/Title
Phone/Fax
Process Support Contact:
Name/Title
Phone/Fax
Email:
ESH Contact:
Name/Title
Phone/Fax
Email:
SEMI E6-0303 © SEMI 1982, 2003 28
RELATED INFORMATION 2
SHIPPING AND RECIEVING INFORMATION
NOTICE: This related information is being balloted, but is not an official part of SEMI E6 and is not intended to
modify or supersede the official standard. It has been derived from the work of the originating task force.
Determination of the suitability of the material is solely the responsibility of the user.
R2-1 Container Inventory
R2-1.1 Table R2-1 shows an example of the shipping
and receiving information – container inventory sheet
to be included with equipment installation
documentation as recommended in SEMI E6 Section
7.1.2.
R2-1.2 Include detailed lists of all supplied components
and parts.
R2-2 Container Storage
R2-2.1 In addition to a container inventory, any special
receiving and handling instructions should be provided
along with the onsite storage requirements for crates.
R2-2.2 The following storage information should be
included for containers or crates:
• storage location (such as outside, storeroom, out of
weather, dry location, or cleanroom),
• storage temperature range, and
• storage relative humidity range.
R2-3 Unpacking Instructions
R2-3.1 In addition to container inventory and storage
information, include any special staging, inspection and
unpacking instructions to complete the shipping and
receiving information.
R2-3.2 If containers cannot be unloaded by hand, list
the necessary equipment.
Table R2-1 Example of Shipping and Receiving Information – Container Inventory
Crate
Number
ID number
on Crate
Crate Size
Length
Crate Size
Width
Crate Size
Height
Crate
Weight
Crate Contents Crate Storage
Requirements
1
2
3
4
5
6
SEMI E6-0303 © SEMI 1982, 2003 29
RELATED INFORMATION 3
MOVE-IN, PLACEMENT AND ASSEMBLY INSTRUCTIONS
NOTICE: This related information is being balloted, but is not an official part of SEMI E6 and is not intended to
modify or supersede the official standard. It has been derived from the work of the originating task force.
Determination of the suitability of the material is solely the responsibility of the user.
R3-1 Instructions
R3-1.1 Consider every step from receiving until hookup
is complete when writing installation instructions. The
installation process usually includes the need for tools,
transportation equipment, and personnel (quantity,
duration, and skills). All requirements should be
indicated so availability can be assured. The following
is a sample outline for the instructions recommended in
SEMI E6 Section 7.1.3.
R3-1.1.1 Move in — Provide instructions for transport
and location of the equipment in the cleanroom. List
any special equipment required to move the equipment.
R3-1.1.2 Placement — Include procedures for items
such as but not limited to the following:
• Use of templates and jigs if provided,
• Through-the-wall mounting,
• 3-dimension alignment,
• Leveling the equipment,
• Floor loading,
• Floor mounting,
• Pedestal mounting, and
• Seismic restraint.
R3-1.1.3 Assembly — Provide instructions for all
necessary steps required to make the equipment
functional. List necessary parts, and special equipment
to be provided by the equipment purchaser. List
necessary contractors, and include estimated schedule
and duration information. Include procedures for:
• Component assembly and attachment,
• Electrical power hookup,
• Water hookup,
• Bulk chemical hookup,
• Drain hookup,
• Gas hookup,
• Vacuum hookup,
• Exhaust hookup,
• Inspection, and
• Energizing equipment.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer' s instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
the contents in whole or in part is forbidden without express written
consent of SEMI.