semi合集-English.pdf - 第5800页
SEMI P23-0200 © SEMI 1993 , 2000 23 50 u m 50 u m De t a i l 1 u m 1 u m 2. 0 14.0 8. 5 5. 5 7. 0 3. 5 2. 0 3.5 3.5 2. 0 2. 0 1. 5 1. 5 2.0 I/ J ; Film Pattern ; Defect Position Figure 18 Sub Cell Wiring (Type D)
SEMI P23-0200 © SEMI 1993, 2000 22
50 um
50 um
Detai l
1 um
1 um
7.0
14.0
3.0 11.0
7.0
2.0
1.5
2.0
G/ H/ K/ L/ Q
; Film Pattern
; Defect Position
Figure 17
Sub Cell
Wiring (Type C)
SEMI P23-0200 © SEMI 1993, 200023
50 um
50 um
Det ail
1 um
1 um
2.0
14.0
8.5 5.5
7.0
3.5
2.0
3.5
3.5
2.0
2.0
1.5
1.5
2.0
I/ J
; Film Pattern
; Defect Position
Figure 18
Sub Cell
Wiring (Type D)
SEMI P23-0200 © SEMI 1993, 2000 24
50 um
50 um
Detai l
1 um
1 um
14.0
5.0 9.0
7.0
3.5
2.0
1.5
1.5
3.5
3.5
3.5
2.0
2.0
2.0
2.0
5.0 1.5
E
F
; Film Pattern
; Defect Position
Figure 19
Sub Cell
Wiring (Type E)