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SEMI S10-1103 © SEMI 1996, 2003 5 AIChE 6 — Several standards covering ris k assessment, evaluation an d specific topic, focused on chemic al products. BS 7 5760–5:1991 — Reliability of systems, equipment and compone nts…

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SEMI S10-1103 © SEMI 1996, 2003 4
reduce the risk. Following risk reduction measures, the
assessment may need to be reviewed.
NOTE 9: This document does not specify risk reduction
measures that may be necessary following risk assessment.
SEMI S2 suggests that the following should be considered in
the design and construction of equipment:
• Regulatory requirements,
• SEMI guidelines,
• International industry standards, and
• Good engineering and manufacturing practices.
7 Documentation
7.1 The risk assessment, evaluation, and reduction
should be documented and the documentation should
contain at least the following:
• risk assessment technique used,
• reviewers,
• date,
• identification of the equipment considered,
• hazards identified,
• risk estimation,
• the criteria used to determine if risk reduction is
required,
• risk evaluation, and
• control measures implemented to reduce the risk
from identified hazards.
NOTE 10: The risk assessment documentation can be used as
input for safety reviews, e.g., SEMI S2, S8 or S14 report.
8 Related Documents
8.1 SEMI Standards
SEMI S8 — Safety Guidelines for Ergonomics
Engineering of Semiconductor Manufacturing
Equipment
8.2 US Military Standards
1
MIL STD 1629A — Failure Modes, Effects and
Criticality Analysis
MIL STD 882D — Standard Practice for System Safety
8.3 International Electrotechnical Commission
Standards
2
1 Available through the Naval Publications and Forms Center, 5801
Tabor Avenue, Philadelphia, PA 19120-5099, USA. Telephone:
215.697.3321
IEC 60812 — Analysis Techniques for System
Reliability - Procedure for Failure Mode and Effects
Analysis (FMEA)
IEC 61025 — Fault Tree Analysis (FTA)
IEC 61508-5: (1999-04) — Functional Safety of
Electrical/Electronic/Programmable Electronic Safety
Related Systems - Part 5: Examples of Methods for the
Determination of Safety Integrity Levels
IEC 61508-5:(1998-12) — Related Systems - Part 5:
Examples of Methods for the Determination of Safety
Integrity Levels
8.4 ANSI Standards
3
ANSI/RIA R15.06: 1999 — Industrial Robots and
Robot Systems — Safety Requirements
ANSI B11 TR3-2000 — Risk Assessment and Risk
Reduction – A Guide to Estimate, Evaluate and Reduce
Risks Associated with Machine Tools
8.5 ISO Standards
4
ISO 14121: 1999 — Safety of machinery - Principles
for risk assessment
ISO/TR 13849-1:1999/EN 954-1: — Safety of
machinery - Safety-related parts of control systems.
Part 1: General principles for design
ISO/TR 12100-1:1992/EN 292-1: — Safety of
machinery - Basic concepts, general principles for
design. Part 1: Basic terminology, methodology
ISO/TR 12100-2:1992/EN 292-2: — Safety of
machinery - Basic concepts, general principles for
design. Part 2: Technical principles and specifications
8.6 Other Documents
SEMATECH
5
#9202963A-ENG; — Failure Mode and
Effects Analysis (FMEA): A Guide for Continuous
Improvement for the Semiconductor Equipment
Industry
2 Available through the International Electrotechnical Commission,
3, rue de Varembé, Case Postale 131, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.919.02.11; Fax: 41.22.919.03.00
Website: http://www.iec.ch
3 Available through the American National Standards Institute, New
York Office: 11 West 42nd Street, New York, NY 10036, USA.
Telephone: 212.642.4900; Fax: 212.398.0023 Website:
http://www.ansi.org
4 Available through the International Organization for
Standardization, ISO Central Secretariat, 1, rue de Varembé, Case
postale 56, CH-1211 Geneva 20, Switzerland. Telephone:
41.22.749.01.11; Fax: 41.22.733.34.30 Website: http://www.iso.ch
5 Available through International SEMATECH, 2706 Montopolis
Drive, Austin, TX, USA website: http://www.sematech.org
SEMI S10-1103 © SEMI 1996, 2003 5
AIChE
6
— Several standards covering risk assessment,
evaluation and specific topic, focused on chemical
products.
BS
7
5760–5:1991 — Reliability of systems, equipment
and components. Guide to failure modes, effects and
criticality analysis (FMEA and FMECA)
6
Available through the American Institute of Chemical Engineers, 3
Park Ave, New York, N.Y., 10016-5991, USA. http://www.aiche.org
7
Available through the British Standards institute, 389 Chiswick
High Road, London W4 4AL, United Kingdom www.bsi-global.com
SEMI S10-1103 © SEMI 1996, 2003 6
APPENDIX 1
RISK RANKING TABLES
NOTICE : The material in this appendix is an official part of SEMI S10 and was approved by full letter ballot procedures on
April 2, 2003.
NOTE A1-1: The following Tables A1-1 and A1-2 give the groups of severity and likelihood. Other examples can be found in
Related Information 3 (Risk Ranking Number) and Related Information 4 (more detailed numerical Severity and Likelihood).
Table A1-1 Severity Groups
Severity Group People (See Note A1-2.) Equipment/Facility
(See Note A1-3.)
Property
1 – Catastrophic One or more fatalities. System or facility loss. Chemical release with lasting
environmental or public health impact.
2 – Severe Disabling injury/illness. Major subsystem loss or facility
damage.
Chemical release with temporary
environmental or public health impact.
3 – Moderate Medical treatment or restricted
work activity (OSHA
recordable).
Minor subsystem loss or facility
damage.
Chemical release triggering external
reporting requirements.
4 – Minor First aid only. Non-serious equipment or
facility damage.
Chemical release requiring only routine
cleanup without reporting.
NOTE A1-2: This number is if 1-2 people are exposed to the risk. The severity group should be reconsidered to a
more severe severity group when 3 or more people are involved.
NOTE A1-3: Although it is not a safety risk it adds value to take in account product (e.g. wafers, reticles) damage.
No descriptions are given due to the fact of the value and number of products on a equipment can vary. Possible
descriptions can be: Rework of a wafer, Rework of a batch, Loss of a batch.
Table A1-2 Likelihood Groups
Likelihood Group Expected Frequency (% of Units- Year) (See Note 1.)
A – Frequent More than 1%
B – Likely More than 0.2% but not more than 1%
C – Possible More than 0.04%, but not more than 0.2%
D – Rare More than 0.02%, but not more than 0.04%
E – Unlikely Not more than 0.02%
Note 1: The frequency (in percent) is calculated by dividing the number of (observed or expected) occurrences by the number of unit-years that
the hazard has existed or is anticipated to exist, then multiplying the quotient by 100.
NOTE A1-4: If data are available, they should be used. If data are not available, the frequencies should be estimated.
NOTE A1-5: The following two example calculations are added for clarification of Table A1-2 only:
Example 1:
If something expected to happen 1 time in 5 units operated for 6 years the frequency will become:
(1 time/(5 units × 6 year of operation)) × 100% = 3.3% (= A – Frequent)
Example 2:
If something expected to happen 2 times on 50 units with 30 are operated for 6 years and 20 are operated for 7 years
the frequency will become
(2 times/(30 units × 6 year of operation + 20 units × 7 year of operation)) × 100% = 0.625% (= C – Possible)