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SEMI S23-0705 © SEMI 2005 7 #2 Source for N 2 : ISMT (presented by Walter Worth at 10th International Se m iconductor Environment, Safety and Health Conference). #3 The Heat Load conversion factor expresses the am ount o…

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SEMI S23-0705 © SEMI 2005 6
NOTE 12: Related Information 1 contains additional conversion factor information that may be useful.
10.6 The output units of all conversions are estimated kWh (kilowatt hours). This can be understood as the energy
impact of the particular utility or material used.
NOTE 13: See Related Information 1 for example calculations.
10.7 The equipment supplier may also use an alternate set of conversion factors.
NOTE 14: If alternate conversion factors are used, it is recommended that the factors be documented in the report of the results.
10.8 A conversion factor is better if it accurately represents the actual electrical energy required to create and
distribute a particular utility or material at the equipment’s end use location.
10.9 Determining reasonable energy conversion factors for most process chemicals has not yet entered the state of
the art. Therefore, conversion factors are not recommended for them.
NOTE 15: See Related Information 1 for additional information.
Table 2 Recommended Energy Conversion Factors
Utility or Material Energy Conversion Factor Basis of Conversion Factor (other units)
Exhaust 0.004 kWh
m
3
Exhaust pressure:
2kPa
(200 mm Aq; 8 in H
2
O)
Vacuum 0.075 kWh
m
3
Vacuum pressure:
58.8E + 2 Pa
(600 mm Aq)
Dry Air 0.147 kWh
m
3
Supply pressure:
4.9E + 5 Pa
(71 psi; 5 kg/cm
2
)
Cooling Water
(20–25°C)
1.78 kWh
m
3
Water cooled by refrigeration process
Supply pressure:
4.9E + 5 Pa
(71 psi; 5 kg/cm
2
)
Cooling Water
(32–37°C)
0.250 kWh
m
3
Water cooled by open cooling tower
Supply pressure:
4.9E + 5 Pa
(71 psi; 5 kg/cm
2
)
UPW / DIW
(under pressure)
10.2 kWh
m
3
Supply pressure:
19.6E + 4 Pa
(28.4 psi; 2 kg/cm
2
)
UPW / DIW
(ambient pressure)
10.0 kWh
m
3
Power for distilling.
Removal via Air 3.24 × 10
-4
kWh
m
3
°C
Specific Heat and Density of Air.
Removal via
Water
1.16 kWh
m
3
°C
Specific Heat and Density of Water.
Heat Load
Burden 0.382 kWh
kWh
Refrigeration (air conditioning) efficiency.
N
2
(Volume calculated at one
atmosphere pressure and 20 °C.)
0.250
kWh
m
3
Supply pressure:
7.93E + 5 Pa
(115 psi; 8.1 kg/cm
2
)
Electricity 1 × (V
RMS
× I
RMS
) × measurement
period = kWh
This is electrical energy supplied. This is not the same
as energy used to generate the electricity.
#1
Source except N
2
: SEAJ-E-002E Guideline for Energy Quantification on Semiconductor Manufacturing Equipment and Utilities.
SEMI S23-0705 © SEMI 2005 7
#2
Source for N
2
: ISMT (presented by Walter Worth at 10th International Semiconductor Environment, Safety and Health Conference).
#3
The Heat Load conversion factor expresses the amount of energy required to remove (i.e. refrigerate) 1 kWh of radiant energy from the
equipment environment.
#4
The units for gas pressure of “kg/cm
2
” are technically incorrect (because kg is a unit of mass, not force), but they are customary in some
regions. The “kg” may be understood as “kilograms force”. One kilogram force is equal to 9.81 Newtons. Therefore, 1 kg
f
/cm
2
is equal to
9.81N/cm
2
= 98.1E + 3 Pa.
11 Target Setting and Improvement
11.1 Using the use rate data and the equivalent energy conversion outcomes from baseline process recipes as a
measure of success, the equipment supplier should set target energy conservation, and utilities and materials use rate
levels for the equipment and develop timelines for achieving them. The equipment supplier should also present a
clear justification for each target.
11.2 The equipment supplier should discuss energy conservation improvement plans and utilities and materials use
rate improvement plans with the users before implementing them so that the cost-benefit balance and its related
assumptions can be more fully understood by all both parties.
11.3 Energy consumption reduction, and utilities and materials use rate reduction should be achieved through
various means such as equipment design changes or recipe changes.
11.4 A more energy efficient method for the production of a particular utility or material can also significantly
change the equipment’s energy impact. The equipment supplier may wish to recommend to the users that utilities or
materials be provided in a particular manner or from a particular source to achieve the best energy impact.
11.5 Equipment suppliers can also work with end users to understand the impact of their utility needs on the
operating efficiency of end user utilities. Examples of these include decreasing the Room Heat Burden by means of
increased cooling water heat transfer, decreased exhaust pressure drops, decreased cooling water heat exchanger
pressure drops, etc. All of these changes, while not necessarily decreasing the utility use rate, may have a significant
environmental impact.
11.6 There is a certain expense of time and materials for making a change to equipment. However, there may also
be a benefit in reducing utility and material use rate. It is recommended that the cost/benefit balance be carefully
analyzed before undertaking an equipment change.
11.7 The following are a few ideas for reducing equipment energy consumption that may be feasible. There are
certainly many more.
Use the highest available voltage for the region of operation as the primary feed voltage (e.g., 300V Japan,
380V China, 480V USA and Taiwan, 240V or 400V Europe).
Use warmer cooling water.
Increase cooling water heat exchanger mean temperature difference.
Decrease exhaust and cooling water pressure drops.
Reduce bulk gas minimum supply pressures.
Use less pure processing chemicals.
Use clean dry air for pneumatic controls instead of nitrogen.
Use control systems to activate exhaust only when needed.
11.8 The equipment suppliers should prepare an improvement roadmap which should focus on the use rate of one or
several specific utilities or materials, or they should focus on the related equivalent energy impact, or both.
11.9 The following data should be considered to be included in an improvement roadmap.
The type of equipment (model, options, configuration).
The utilities and materials that are targeted for improvement.
The baseline recipe(s) that will be used to demonstrate progress.
SEMI S23-0705 © SEMI 2005 8
The use rate data that is measured at various times.
The one or several sets of conversion factors used to estimate equivalent energy consumption.
The target date by which the improvement (by specific utility/material or overall) will be achieved.
Information describing why a target seems achievable and, generally speaking, how it will be achieved.
A cost/benefit analysis on the equipment upgrade.
12 Monitoring and Reporting
12.1 Monitoring
12.1.1 The equipment supplier should review the improvement status periodically and update the roadmap to
monitor the conservation progress. A period of once every two years is recommended.
12.1.2 If the review indicates that targets have not (or will not) be achieved, it is useful to document the reasons as
part of the roadmap data and to re-adjust the target dates and achievement strategy based on the most recent
information.
12.2 Reporting
12.2.1 The equipment supplier should report to the users energy data, utilities and material use rate data and related
improvement roadmaps for the equipment.
12.2.2 The reports should contain the roadmap data addressed in ¶11.9 at a minimum.
12.2.3 The equipment suppliers should also consider including data that the users would like to have included in the
report.
NOTE 16: The equipment supplier should be careful not to include in the reports any information that is identified as
confidential to any party involved unless appropriate non-disclosure agreements are in place. Specific recipes, desired effects to
the substrate, methods of achieving energy conservation and forecasted results are examples of information that may be, or may
contain parts that are, confidential.
13 Related Documents
13.1 ISMT Documents
2
ISMT Utilities Consumption Characterization Protocols for Semiconductor Tools, TT #00043939A-ENG
ISMT Environmental, Safety and Health (ESH) Metrics for Semiconductor Manufacturing Equipment (SME),
TT #02034261A-TR
13.2 SEAJ Documents
3
SEAJ-E-002E Guideline for Energy Quantification on Semiconductor Manufacturing Equipment and Utilities
SEAJ-EP-003E Guideline for conducting an LCA of Semiconductor Manufacturing Equipment – Energy Saving
Perspective
SEAJ-E-001E Power Measurement Protocol for Semiconductor Equipment
2 International SEMATECH, 2706 Montopolis Drive, Austin, TX, website http://www.sematech.org
3 Semiconductor Equipment Association of Japan, 7-10 Shinjuku 1-chome Shinjuku-ku, Tokyo, 160-0022, Japan, Phone 81.3.3353.7589, Fax
81.3.3353.7970, website http://www.seaj.or.jp