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SEMI F6-92 © SEMI 19 92 1 SEMI F6-9 2 GUIDE FOR SECONDARY CONTA I NMENT OF HAZARDOUS GAS PIPING SYSTE M S 1 Purpose To provide a gu ide for the design, f abrication, and operation of secondarily con tained distribution p…

SEMI F5-1101 © SEMI 1990, 2001 20

from the sections above. If only non-hazardous gases

are left these systems can provide cost-effective

abatement to keep ducts clear. They can also be used in

combination with other technologies.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F6-92 © SEMI 19921

SEMI F6-92

GUIDE FOR SECONDARY CONTAINMENT OF HAZARDOUS GAS

PIPING SYSTEMS

1 Purpose

To provide a guide for the design, fabrication, and

operation of secondarily contained distribution piping

for hazardous production material (HPM) gases.

2 Scope

This guide covers the general requirements for

hazardous production material distribution piping in

those industries that are included under the H-6

Classification of the Uniform Building Code, or

Articles 51 or 80 of the Uniform Fire Code, or of other

applicable local codes. This guide does not include

requirements for individual exhausted enclosures (e.g.,

valve boxes and gas cabinets).

3 Applicable Documents

3.1 SEMI Documents

SEMI F1 — Specification for Leak Integrity of Toxic

Gas Piping Systems

SEMI F2 — Specification for Seamless Austenitic

Stainless Steel Tubing for Semiconductor

Manufacturing Applications

SEMI F3 — Guide for Welding Stainless Steel Tubing

for Semiconductor Manufacturing Applications

SEMI S2 — Safety Guidelines for Semiconductor

Manufacturing Equipment

SEMI S4 — Safety Guideline for the

Segregation/Separation of Gas Cylinders Contained in

Cabinets

3.2 ANSI/ASME Standard

B31.3 — Chemical Plant and Petroleum Refinery

Piping

3.3 Federal Regulations

29 CFR — Title 29 of the Code of Federal Regulations

(CFR), Part 1910

49 CFR — Title 49 of the Code of Federal Regulations

(CFR), Chapter I

1 American National Standards Institute, 1430 Broadway, New York,

NY 10018

2 United States Government Printing Office, Washington, D.C. 20402

3.4 ICBO Codes

UBC CH 9 — Chapter 9 of the Uniform Building Code,

Requirements for Group H Occupancies

UFC ART 51 — Article 51 of the Uniform Fire Code,

Semiconductor Fabrication Facilities Using Hazardous

Production Materials

UFC STD 79-3 — Standard No. 79-3 of the Uniform

Fire Code

UFC ART 80 — Article 80 of the Uniform Fire Code,

Hazardous Materials

UFC ART 90 — Article 90 of the Uniform Fire Code,

Regulation of Facilities Where Materials Which Are or

May Become Toxic Gases Are Found

3.5 NFPA Standards

NFPA 70/ ART 500 — Article 500 of the National

Electrical Code, Hazardous (Classified) Locations

NFPA 497M — Classification of Gases, Vapors and

Dusts for Electrical Equipment in Hazardous

(Classified) Locations

NFPA 704 — Identification of the Fire Hazards of

Materials

3.6 ACGIH Publication

TLV

— American Conference of Governmental

Industrial Hygienists Threshold Limit Values and

Biological Exposure Indices

4 Terminology

4.1 closed secondary containment — Secondary

containment that has a sealed annulus. In closed

containment systems, the annular space either holds a

certain pressure of gas or a certain level of vacuum. In

closed containment, a change in the pressure or vacuum

would be indicative of a leak in either the primary or

secondary system.

3 International Conference of Building Officials, 5360 South

Workman Mill Road, Whittier, CA 90601

4 National Fire Protection Association, Batterymarch Park, Quincy,

MA 02269

5 American Conference of Governmental Industrial Hygienists, 6500

Glenway Avenue, Building D-7, Cincinnati, OH 45211

6 TLV is a registered trademark of ACGIH.

SEMI F6-92 © SEMI 1992 2

4.2 controlled work area — A spa ce within a building

where HPM’s may be stored, handled, dispensed, or

used.

4.3 equilibrium vapor concentration (EVC) — The

state of a material at which vapor pressure has

stabilized and is no longer rising or falling. The EVC

value (in parts per million) of a material is determined

by multiplying the vapor pressure by 10

and dividing

by atmospheric pressure (760 mmHg at sea level).

4.4 hazardous production material (HPM) — A solid,

liquid, or gas that has a degree-of-hazard rating in

health, flammability, or reactivity of Class 3 or 4 as

ranked by NFPA 704 and that is used directly in

research, laboratory, or production processes that have

as their end product materials that are not hazardous.

4.5 highly toxic gas — A chemical that has a median

lethal concentration (LC

) in air of 200 parts per

million by volume or less of gas or vapor, or 2

milligrams per liter or less of mist, fume, or dust, when

administered by continuous inhalation for one hour (or

less if death occurs within one hour) to albino rats

weighing between 200 and 300 grams each.

4.6 immediately dangerous to life and health (IDLH)

— A concentration of airborne contaminants, normally

expressed in parts per million or milligrams per cubic

meter, which represents the maximum level from which

one could escape within thirty minutes without any

escape-impairing symptoms or irreversible health

effects. This level is established by the National

Institute of Occupational Safety and Health (NIOSH).

4.7 level of concern (LOC) — Equal to 0.1 of the

IDLH value.

4.8 lower detectable limit of instrument (LDL) — The

lowest concentration of a substance that will give an

instrument response with a signal-to-noise ratio of at

least 3 db.

4.9 material hazard index (MHI) — A numeric value

used for ranking chemical production materials in order

to determine the level of controls necessary for

regulation. MHI is determined by dividing the

equilibrium vapor concentration (EVC) of a material at

25°C by the level of concern (LOC) value for the

material.

4.10 open secondary containment — Secondary

containment with an open-ended annular space. This

annulus must be directed to a system designed to handle

the contained HPM.

4.11 permissible exposure limit (PEL) — The

maximum permitted eight hour time-weighted average

concentration of an airborne contaminant. The

maximum permitted time-weighted average exposures

to be used are those published in 29 CFR 1910.1000.

4.12 pressure decay method — The method of

detection of leakage through pressure loss, over a

period of time, within a vessel or piping system.

4.13 primary containment — The first level of

containment (i.e., the inside portion of the container

that comes into immediate contact on its inner surface

with the material being contained).

4.14 pyrophoric — Capable of spontaneous ignition in

air at or below a temperature of 54.5°C (130°F).

4.15 secondary containment — Level of containment

that is external to and separate from primary

containment. Secondary containment is a method of

safeguarding used to prevent unauthorized releases of

toxic or hazardous gases into uncontrolled work areas.

Secondary containment means those methods or

facilities in addition to the primary containment system.

4.16 threshold limit value/time-weighted average

(TLV/TWA) — As defined by the American Conference

of Governmental Industrial Hygienists (ACGIH).

4.17 uncontrolled work area — Any area outside of a

secondary containment system where people are likely

to be present.

4.18 vacuum decay method — Leakage detection

determined by the loss of vacuum (increase in

pressure), over a period of time within a vessel or

piping system.

5 Containment Function

5.1 Secondary containment should, in case of release,

segregate the hazardous production material (HPM)

from the surrounding area.

5.2 Secondary containment systems should include

provisions to contain and detect substances which pose

health or property hazards and to direct such substances

into areas or facilities that can safely treat, dispose of,

or dilute them prior to release into the atmosphere.

6 Containment Application

Secondary containment may be used on any system if

deemed appropriate by the authority responsible for the

system. Secondary containment should be mandatory

for all HPM’s that are included in the following

categories:

6.1 Those substances with threshold limit values

(TLV) below the lower detectable limit (LDL) of the

detection systems in use.

6.2 Those substances that provide inadequate warning

properties.