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SEMI S17-0701 © SEMI 2001 1 SEMI S17-0701 SAFETY GUIDELINE FOR UN M ANNED TRA NSPORT VEHICLE (UTV) SYSTEMS This safe ty guideline was technically approved by the Globa l Environm ental Health and Saf ety Comm ittee and i…
SEMI S16-0600 © SEMI 2000 4
10 Equipment Disposal Proc edure
10.1 The possibility of refurbishing the entire piece of
equipment should be considered before disassembly
and disposal is selected.
10.1.1 When refurbishing of the entire equipment is
chosen, only the disposal parts which are not able to be
refurbished at the time should be decontaminated or
considered for disposal. This results in a significant
reduction in waste.
10.2 Equipment Decontamination and Packaging for
Transfer Equipment being transferred should
comply with SEMI S12 and all applicable hazardous
materials shipping regulations. If the equipment has to
be transported prior to decontamination, it should be
ensured, that no contaminants may be released (e.g., by
appropriate packaging).
10.3 Disassembly and Decontamination The
equipment owner or disposal party should follow all
local regulations regarding disassembly and disposal.
10.3.1 If there is an equipment owner specific process,
the specifics of that process and its hazards should be
provided to the disposal party by the equipment owner.
10.4 Material Separation Only materials that
cannot be refurbished, recycled or reused should be
categorized for other disposal methods (e.g.,
incineration and landfill) under this disposal assessment
procedure.
10.4.1 First decontaminate any contaminated material
which is capable of further decontamination.
10.4.2 Discard any materials incapable of
decontamination by appropriate contaminated waste
disposal categories or process (e.g., incineration,
hazardous landfill, etc.).
10.4.3 Further separate materials into reusable
components (e.g., pumps, motors, electronics, etc.).
10.4.3.1 This includes any components with a
potential for refurbishing.
10.4.4 Separate recyclable materials by categories
(e.g., metals, class of plastics, etc.).
10.4.5 Separate into reclamation categories (e.g.,
mercury recovery from lamps, lead recovery from
batteries, etc.).
10.5 The equipment owner should confirm that the
disposal party follows the procedures required by this
document through checking manifest and/or
implementing practical inspection periodically as well
as applicable regional codes and regulations.
10.6 Ionizing radiation sources, if present, should be
disposed of in accordance with each applicable country,
state and local regulations. All applicable licensing and
reporting requirements should be met.
11 Documentation and Reco rds
11.1 Documentation should be prepared and main-
tained by the equipment owner according to applicable
codes and regulations for the region or locality where
disposal occurs.
11.2 Documentation showing final disposition of each
class of material should be returned to the equipment
owner by the disposal party.
NOTICE: SEMI makes no warranties or representa-
tions as to the suitability of the guidelines set forth
herein for any particular application. The determination
of the suitability of the guideline is solely the
responsibility of the user. Users are cautioned to refer to
manufacturer’s instructions, product labels, product
data sheets, and other relevant literature respecting any
materials or equipment mentioned herein. These
guidelines are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this guideline may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this guideline, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this guideline. Users of this guideline
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI S17-0701 © SEMI 20011
SEMI S17-0701
SAFETY GUIDELINE FOR UNMANNED TRANSPORT VEHICLE (UTV)
SYSTEMS
This safety guideline was technically approved by the Global Environmental Health and Safety Committee
and is the direct responsibility of the Japanese Environmental Health and Safety Committee. Current edition
approved by the Japanese Regional Standards Committee on February 1, 2001. Initially available at
www.semi.org April 2001; to be published July 2001.
NOTICE: Paragraphs entitled “NOTE:” are not an
official part of this document and are not intended to
modify or supersede the official guideline.
1 Purpose
1.1 These guidelines are intended as a set of
environmental, safety, and health considerations for
unmanned transport vehicle (UTV) systems. UTV
systems are used to automate the movement of material
within semiconductor factories. Unmanned transport
vehicle systems include both floor-traveling vehicle
systems and space-traveling vehicle systems.
2 Scope
2.1 This guideline applies to UTV systems used in
semiconductor manufacturing.
2.2 This guideline addresses both floor-traveling and
space-traveling UTV systems. Floor-traveling vehicle
systems include automatic guided vehicle (AGV)
systems and rail guided vehicle (RGV) systems. Space-
traveling vehicle systems include interbay overhead
transport vehicle systems and intrabay overhead hoist
transport vehicle (OHT) systems.
2.3 Evaluations for conformance to this document
should include all equipment that is provided by the
UTV system supplier including separate items such as
rails, control panels, power panels, and any other type
of equipment necessary for operation of the unmanned
transport vehicles.
2.4 This safety guideline does not purport to address
all of the safety issues associated with its use. It is the
responsibility of the users of this guideline to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
2.5 This document contains the following sections:
• Purpose
• Scope
• Limitations
• Referenced Standards
• Terminology
• Equipment Evaluation
• Clearances and Interfaces
• Emergency Shutdown
• Manual Operation
• Vehicle Travel
• Material Protection
• Load/Unload Operation
• Hazard Indicators
• Hazardous Materials
• Related Documents
3 Limitations
3.1 This safety guideline may have only limited
application to vehicles without on-board power (direct
or induced) such as primary-grounded linear–motor-
driven overhead transport vehicle systems used for
interbay transport. Determinations of applicability
should be made by section when evaluating such
systems.
3.2 This safety guideline does not address rail-guided
or robotic mechanisms included as part of
semiconductor processing equipment. This type of
equipment should be evaluated as part of the processing
equipment per SEMI S2.
3.3 Person Guided Vehicles (PGVs) are not unmanned
vehicles, therefore PGVs are not addressed by this
standard.
3.4 This document does not supersede international,
national or local codes, regulations and laws, which
may impose separate requirements for assessing the
safety of installations.
NOTE 1: Users should provide information to UTV suppliers
about regulations for the location of use.
SEMI S17-0701 © SEMI 2001 2
4 Referenced Standards
NOTE 2: Unless otherwise indicated, all documents cited
shall be the latest published versions.
4.1 SEMI Standards
SEMI E15.1 — Specification for 300 mm Tool Load
Port
SEMI E23 — Specification for Cassette Transfer
Parallel I/O Interface
SEMI E84 — Specification for Enhanced Carrier
Handoff Parallel I/O Interface
SEMI S2 — Environmental, Health, and Safety
Guideline for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics
Engineering of Semiconductor Manufacturing
Equipment
4.2 ANSI Standard
1
ANSI/RIA R15.06 — Industrial Robots and Robot
Systems - Safety Requirements
4.3 CENELEC Standards
1
EN775 — Manipulating Industrial Robots – Safety
4.4 ISO Standards
2
ISO 10218 — Manipulating Industrial Robots – Safety
5 Terminology
5.1 automated operation — system operation under
full pre-programmed control of the computer controller.
5.2 automatic guided vehicle (AGV) — a floor based
vehicle, with or without robotic manipulators, used for
transporting loads and operating without the need for
assistance by factory personnel. AGVs travel without
mechanical guidance.
5.3 bumper — a shock absorber for a UTV. A
bumper is typically equipped with a contact switch or
sensor on it. And if the bumper switch or sensor is
activated, the UTV will stop immediately.
5.4 EMO — an actuator (e.g., button) which, when
activated, places the equipment into a safe shutdown
condition, without generating any additional hazard to
personnel or the facility.
5.5 E-Stop — emergency stop feature provided to stop
all moving parts but not necessarily isolating or
controlling all energy sources.
1 American National Standards Institute, 11 West 42nd St., 13th
Floor, New York, NY 10036
2 International Organization for Standardization (ISO), 1 rue de
Varembe, Case postale 56, CH-1211 Geneve 20, Switzerland
5.6 end user customer — as related to UTVs, the
company operating the factory in which the UTVs are
installed.
5.7 fault-tolerant — designed so that a reasonably
foreseeable single point failure does not result in an
unsafe condition.
5.8 floor-traveling vehicle — a vehicle that
automatically travels on the factory floor to a specified
station where a load/unload operation is performed
automatically or manually. Floor-traveling vehicles
include automatic guided vehicles (AGV) and rail
guided vehicles (RGV).
5.9 hoist — the assembly on a space-traveling vehicle
that performs the load/unload operation by transferring
a load [e.g., carrier(s), pod(s)] to and from an overhead
vehicle.
5.10 interbay transport — moveme nt of loads [e.g.,
carrier(s), cassette(s), reticle(s)] between functional
work areas or bays.
5.11 intrabay transport — movement of loads [e.g.,
carrier(s), cassette(s), reticle pod(s)] within a functional
work area or bay.
5.12 load — load is the object to be transported by
UTV. Load includes a carrier (cassette, box, pod, etc.)
and its contents.
5.13 load/unload operation — the action necessary to
move a load [e.g., carrier(s), cassette(s) reticle pod(s)]
to and from a vehicle. This operation may involve
hoisting, manual, or robotic manipulation to transfer
loads between a vehicle and semiconductor
manufacturing equipment (such as process equipment
or stockers). See Figure 1.
5.14 manual operation — defined as any control
outside of automated operation.
5.15 overhead hoist transport (OHT) — a rail guided
vehicle and hoist used to transport material above the
factory floor over the heads of factory personnel.
5.16 rail guided vehicle (RGV) — a floor-based
vehicle, with or without robotic manipulators, used to
transport loads and operating on a guide rail without the
need for assistance by factory personnel.
5.17 space-traveling vehicle — a vehicle that
automatically travels through space, such as in the
region just below a factory ceiling, to a specified station
where a load/unload operation is performed
automatically or manually. Space-traveling vehicles
include interbay overhead transport vehicles and
intrabay overhead hoist transport vehicles (OHT).