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SEMI P37-1102 © SEMI 2001, 2002 3 13.2 Containers shall be la beled “ Warning: Open a nd Handle Under Clea nroom Conditions O nly” as well as identified by user purch ase order number (if applicable), drawing number (if …

SEMI P37-1102 © SEMI 2001, 2002 2

7.2.2 Table 3 defines the permissible range of the mean

and the permissible range of the coefficient of thermal

expansion.

7.3 The substrate material shall have specific stiffness

as defined in Table 3.

7.4 Selected physical properties of NZTE materials are

provided for information only in Appendix 1.

7.5 The front, sides, and or back surfaces of the

substrate may be coated with layers that are agreed

upon between user and supplier. The substrate

including these optional additional layers must meet all

requirements outlined in this standard.

8 Flatness Specifications

8.1 The flatness requirements for the substrate are

defined in four classes. The particular class of flatness

shall be agreed upon between user and supplier.

Substrates shall be supplied with front and back sides

having flatness as listed in Table 4 over a flatness

quality area as defined in Figure 3. The flatness error

is defined as the deviation of the surface from the plane

that minimizes the maximum deviation, which is

illustrated in Figure 4.

8.2 The global flatness requirement for the front and

back sides, which includes the region excluded from the

flatness quality area (defined in Figure 3), is shown in

Table 4.

8.3 Substrates shall be supplied with wedge angle

defined in Table 4 and defined in Figure 5.

8.4 Substrates shall be supplied with local slope angle

as defined in Table 4 and defined in Figure 4.

8.5 A low order thickness variation (LOTV)

requirement is defined over a range of spatial periods

(shown in Table 4) composing the surface profile power

spectral density. This thickness variation may be

determined from the residual flatness error of the front

and back surfaces after removing the wedge angle from

the data.

8.6 The surface roughness requirements for the front

and backside are listed in Table 4, and they are defined

over a range of spatial periods.

9 Visual Criteria

9.1 A defect quality area, which may or may not

correspond with the flatness area, shall be agreed upon

between the user and supplier. Figure 6 shows the

labeling of the dimensions of the defect quality area.

9.2 Each plate shall not have more defects than listed

in Table 5 inside the defect quality area defined in

Figure 6 on the front side. Dimensions of the quality

area shall be agreed upon between user and supplier.

Each plate shall not have more defects than listed in

Table 5 outside the defect quality area defined in Figure

6 on the front side.

9.3 Each plate shall not have more defects than listed

in Table 5 on the back side within the flatness quality

area defined in Figure 3.

10 Sampling

10.1 Unless otherwise specified, appropriate sample

sizes shall be selected from each lot in accordance with

ASQC-Z1.4. Each quality characteristic shall be

assigned an acceptable quality level (AQL) in

accordance with ASQC-Z1.4 definitions for critical,

major, and minor classifications. If desired, and so

specified in the contract or order, each of these

classifications may alternatively be assigned cumulative

AQL values. Inspection levels shall be agreed upon

between user and supplier.

11 Test Methods

11.1 Thermal Expansion — to be agreed upon between

user and supplier.

11.2 Flatness and Wedge Angle — to be agreed upon

between user and supplier.

11.3 Visual — to be agreed upon between user and

supplier.

11.4 Surface Roughness — to be agreed upon between

user and supplier.

12 Certification

12.1 Upon request of the purchaser in the contract or

order, a manufacturer's or supplier's certification that

the material was manufactured and tested in accordance

with this specification, together with a report of the test

results, shall be furnished at the time of shipment.

13 Packing and Marking

13.1 Substrates shall be packed in a class 1

environment as defined by ISO 14644-1. Containers

shall be designed to protect the substrates from

contamination in handling and transit. Substrates shall

be shipped with the acceptable flatness side toward the

front of the box. This orientation shall be indicated on

each container. Packaging shall comply with the

applicable internal, national, state, and local laws and

regulations required for shipping.

13.2 Containers shall be labeled “Warning: Open and Handle Under Cleanroom Conditions Only” as well as

identified by user purchase order number (if applicable), drawing number (if applicable), quantity, supplier lot

number, and material identification.

Figure 1

Dimensions of EUVL mask substrate

Figure 2

Datum locations on the EUVL mask substrate