semi合集-English.pdf - 第5524页

SEMI P10-0705 © SEMI 1990, 2005 19 EUV_MMR_WAVELENGTH EUV_MEAN_PEAK_REFLECTIVITY EUV_PEAK_REFLECTIVITY_UNIFORMITY EUV_ABSORBER_COMPOSITION EUV_ABSORBER_OPTICAL_PROPE RTIES EUV_BLANK_RESISTANCE EUV_EXPANSION_COEFF END_EUV…

100%1 / 7923
SEMI P10-0705 © SEMI 1990, 2005 18
[FINAL_QC_AUDITOR]
{
ADDITIONAL_RESULTS_INFO}
END_MASK_RESULTS_OPTIONS
<vendor_info> = START_VENDOR_INFO
[VENDOR_CONTACT] [VENDOR_PHONE] {VENDOR_ADDRESS}
[VENDOR_FAX] [VENDOR_EMAIL]
[
FINAL_QC_AUDITOR]
[VENDOR_ORDER_ID]
END_VENDOR_INFO
<billing_information> = START_BILLING_INFORMATION
[
BLANKET_PO_NUMBER] [PO_NUMBER] [SO_NUMBER] [RELEASE_NUMBER]
END_BILLING_INFORMATION
<materials_used> = START_MATERIALS_USED
[TOP_PELLICLE_USED] [
BOTTOM_PELLICLE_USED]
[PACKAGE_USED]
[<
substrate>] END_MATERIALS_USED
<substrate> = START_SUBSTRATE
BLANK_LENGTH [BLANK_WIDTH] BLANK_THICKNESS
BLANK_TYPE [BLANK_GRADE]
[
BLANK_FLATNESS] [BLANK_FLATNESS_USED] [BLANK_VENDOR]
[BLANK_BIREFRINGENCE_REQD] [BLANK_BIREFRINGENCE_USED]
{<coating>}
[
BLANK_INDEX_OF_REFRACTION]
[
BLANK_LOT] [BLANK_DATE_OF_MFG]
[<
euv_blank_type>] END_SUBSTRATE
<coating> = START_COATING
COATING_TYPE [COATING_COMPOSITION] [COATING_THICKNESS]
[COATING_REFLECTANCE] [COATING_TRANSMITTANCE]
[COATING_WAVELENGTH] [COATING_GRADE]
[COATING_PHASE] [COATING_OPTICAL_DENSITY]
[COATING_LOT_NUMBER] [COATING_DATE_TIME]
[COATING_MASK_VENDOR_APPLIED] [COATING_EQUIP_USED]
END_COATING
<euv_blank_type> = START_EUV_BLANK_TYPE
EUV_BLANK_TYPE
EUV_FLATNESS_FRONT
EUV_FLATNESS_BACK
EUV_MULTILAYER_COMPOSITION
EUV_CAPPING_COMPOSITION
SEMI P10-0705 © SEMI 1990, 2005 19
EUV_MMR_WAVELENGTH
EUV_MEAN_PEAK_REFLECTIVITY
EUV_PEAK_REFLECTIVITY_UNIFORMITY
EUV_ABSORBER_COMPOSITION
EUV_ABSORBER_OPTICAL_PROPERTIES
EUV_BLANK_RESISTANCE
EUV_EXPANSION_COEFF
END_EUV_BLANK_TYPE
<wafer_exposure_data> = START_WAFER_EXPOSURE_DATA
WAFER_EXPOSURE_NUMERICAL_APERATURE
[WAFER_EXPOSURE_SIGMA]
[WAFER_EXPOSURE_SIGMA_INNER WAFER_EXPOSURE_SIGMA_OUTER]
WAFER_EXPOSURE_ILLUMINATION
END_WAFER_EXPOSURE_DATA
<aerial_image_data> = START_AERIAL_IMAGE_DATA
AIM_WAVELENGTH
[AIM_INTENSITY_VARIATION_DELTA]
[AIM_FLUX_INTENSITY_DELTA]
[AIM_CD_DELTA]
END_AERIAL_IMAGE_DATA
<litho_information> = START_LITHO_INFORMATION
{ [LITHO_EQUIP_REQD] {EQUIP_SITE_REQD}
{ [
LITHO_MODEL_REQD] {LITHO_MODE_REQD} } }
[LITHO_EQUIP_USED] [EQUIP_SITE_USED]
[LITHO_MODEL_USED] [LITHO_MODE_USED]
[MACHINE_SERIAL_NUMBER]
[MASK_SERIAL_NUMBER]
[PROCESS]
[WRITE_DATE_TIME] [ELAPSED_WRITE_TIME]
[OPERATOR]
END_LITHO_INFORMATION
<pattern_group_results> = START_PATTERN_GROUP_RESULTS
PATTERN_GROUP_ID
{<
phase_shift_measurements>}
{<
registr_measurements>}
{<
closure_measurements>}
{<
cd_group_measurements>}
{<
cd_set_results>}
{<
cd_xy_results>}
{<cd_iso_dense_results>}
SEMI P10-0705 © SEMI 1990, 2005 20
{<defect_measurements>}
END_PATTERN_GROUP_RESULTS
<phase_shift_measurements> =
START_PHASE_SHIFT_MEASUREMENTS
PSM_WAVELENGTH
[
PHASE_SHIFT_QUALITY_ID]
[
START_TRANSMISSION_MEASUREMENTS
[
TRANSMISSION_MEASUREMENT_DATE]
[
TRANSMISSION_EQUIP_USED]
[
TRANSMISSION_MODE_USED]
[
TRANSMISSION_MEASUREMENT_FILE_NAME]
TRANSMISSION_TARGET
[TRANSMISSION_REFERENCE_ONLY]
[
TRANSMISSION_TOLERANCE]
[
TRANSMISSION_RANGE]
[
TRANSMISSION_ERROR]
[
MEASURED_TRANSMISSION_AVERAGE]
[
MEASURED_TRANSMISSION_TOLERANCE]
[
MEASURED_TRANSMISSION_RANGE]
[
TRANSMISSION_MARK_FEATURE]
[
TRANSMISSION_MARK_LOCATION_DRAWING]
[
TRANSMISSION_MARK_DRAWING]
{
MEASURED_TRANSMISSION_MARK_SITE_ID
[ TRANSMISSION_MARK_LOCATION ]
MEASURED_TRANSMISSION_MARK_LOCATION
MEASURED_TRANSMISSION
[
MEASURED_TRANSMISSION_ERROR]
END_MEASURED_TRANSMISSION_SITE }
END_TRANSMISSION_MEASUREMENTS ]
[
START_PHASE_ANGLE_MEASUREMENTS
[
PHASE_ANGLE_MEASUREMENT_DATE]
[
PHASE_ANGLE_EQUIP_USED]
[
PHASE_ANGLE_MODE_USED]
[
PHASE_ANGLE_MEASUREMENT_FILE_NAME]
PHASE_ANGLE_TARGET
[PHASE_ANGLE_REFERENCE_ONLY]
[
PHASE_ANGLE_TOLERANCE]
[
PHASE_ANGLE_RANGE]
[
PHASE_ANGLE_ERROR]
[
MEASURED_PHASE_ANGLE_AVERAGE]
[MEASURED_PHASE_ANGLE_TOLERANCE]