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SEMI E38-1296 © SEMI 1995 , 1996 2 4 Terminology 4.1 T he follow ing terms are those t h at are appropriate for des cribing the overall structure of cluster t ools. These terms, in addition to t he more specific terms lo…
SEMI E38-1296 © SEMI 1995, 19961
SEMI E38-1296
CLUSTER TOOL MODULE COMMUNICATIONS (CTMC)
1 Purpose
1.1 Cluster tools fulfill a need for modularity and
flexibility in semiconductor manufacturing equipment.
This standard addresses the communications with and
among modules within a cluster tool for automated
control.
1.2 The module communications services defined here
will enable standard interoperability of modules from
independent suppliers. Together with other cluster tool
standards, this is intended to result in the emergence of
standards-compliant interoperable sub-systems. They
should allow applications software to be developed
which can assume the existence of these services and
allow software products to be developed to offer them.
1.3 The adoption of the standards described will
greatly reduce the effort required to integrate cluster
tool components from independent suppliers.
Compliance requires support of a minimal, but specific,
set of standard services.
2 Scope
2.1 Cluster tool module communications address only
communications with and among modules within a
cluster tool and not the communications between the
cluster tool and the factory. It is the modules and their
interrelations which are modeled and not the cluster
tool seen as a single equipment.
2.2 This standard does not specify cluster controller
functionality (e.g., scheduling, human machine
interface, cluster tool recipe editing, and management)
but will enable development of standards in this area.
The cluster controller is included only to the extent that
it represents the entity or entities responsible for
supervisory control of the modules in a cluster tool.
2.3 This standard identifies the communications
services necessary to achieve automated control of
independent transport, process, and cassette modules in
a cluster tool. It defines the essential module
architecture and the concepts and models on which the
communications services are based.
2.4 The scope includes primary control services for
material processing in process modules, material
movement within the cluster tool, and material
input/output with the factory. Support services also
exist to enable recipe handling, resolution of exception
conditions, event reporting, and data access.
2.5 A reliable communications environment is
required for distributed control and is specified in
supplementary standards.
2.6 This standard specifies the application of more
general service standards as required within a cluster
tool. This includes the limitations imposed by the
cluster tool architecture and the fundamental
functionality needed for compliance. The details of the
general services, protocols, and communication
environment elements are defined in the corresponding
standards documents referenced.
2.7 This version of the standard is provisional because
a number of the general services on which it relies are
not yet standardized. The sections referring to these
services have been omitted until they have become
standards. These sections will be balloted separately
with the corresponding general services and
incorporated into this provisional standard.
2.8 The communication between the cluster tool as a
single equipment and the factory is beyond the scope of
cluster tool module communications standardized here
and should follow the applicable SEMI standards
(GEM, MMMS).
2.9 These standards place no restriction on where,
within the cluster tool control architecture, this specific
set of definitions is implemented. However, to have
complete compliance to the standards in the area of the
communications interface definitions, the entire layered
structure as outlined in this document must be
implemented.
3 Referenced Documents
3.1 SEMI Standards
SEMI E21 — Cluster Tool Module Interface:
Mechanical Interface and Wafer Transport Standard
SEMI E22 — Cluster Tool Module Interface: Transport
Module End Effector Exclusion Volume Standard
SEMI E30 — Generic Model for Communications and
Control of SEMI Equipment (GEM)
SEMI E32 — Material Movement Management
Standard
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services
SEMI E38-1296 © SEMI 1995, 1996 2
4 Terminology
4.1 The following terms are those that are appropriate
for describing the overall structure of cluster tools.
These terms, in addition to the more specific terms
located in the individual service, protocol, and
communications environment standards, complete the
glossary of terms required.
4.1.1 agent — an intelligent system within a factory
that provides one or more service resources and uses
the services of other agents. A generalization of host,
equipment, cell, cluster, cluster module, station
controller, work station. Agents are associated with a
physical system or a collection of physical systems,
including computer platforms.
4.1.2 alarm — an alarm is related to any abnormal
situation on the equipment that may endanger people,
equipment, or material being processed. [SEMI E30]
4.1.3 atomic transfer — the basic unit of movement.
The transfer of a single material between two partners
where only one change in ownership occurs.
4.1.4 attached module — any component of a cluster
tool which mechanically attaches to the transport
module at an interface flange. Specifically, the cassette,
process, and docking modules are all attached modules.
The attached module can be isolated from the transport
module by an isolation valve controlled by the transport
module. In addition, the attached module may also
possess an additional isolation valve. The point of
separation between the isolation valve on the transport
module and the attached module is called the interface
plane.
4.1.5 am transfer job — a material transfer job for an
attached module specifying all criteria for receiving the
material from, or sending the material to, a transport
module.
4.1.6 carrier (material) — a device for the holding of
material for various processing steps in semiconductor
manufacturing. [SEMI E1]
4.1.7 cassette module — an attached module which
provides the means of exchanging material between the
intertool environment and the intratool environment of
a particular cluster. There is no requirement that the
material interface to the intertool environment with the
use of cassettes.
4.1.8 cm input/output transfer job — a material
transfer job for a cassette module, specifying all criteria
for receiving the material from, or sending the material
to, the factory.
4.1.9 cluster controller — the entity or entities
responsible for supervisory control within a cluster tool,
achieved through communicating with the various
modules. The form of the cluster controller is not
dictated. It may be a single platform, distributed, or
incorporated with one or more modules.
4.1.10 cluster tool — an integrated, environmentally
isolated, manufacturing system consisting of process,
transport, and cassette modules mechanically linked
together. There is no requirement that the modules
come from the same supplier. [SEMI E21]
4.1.11 decision authority — an entity requiring to be
notified of significant exception condition changes and
which decides how to proceed to resolve abnormal
situations related to recoverable error conditions. The
decision authority may be represented by a supervisory
controller interacting with an operator who may
ultimately choose the recovery action.
4.1.12 docking module — a component for allowing
the exchange, within a cluster tool, of material between
multiple transport modules. The docking module
presents an attached module interface to both transport
modules and is modeled as a multi-port process module
for intra-cluster tool communications.
4.1.13 end effector — a physical location attached to a
transfer resource capable of holding material during an
end-to-end material transfer.
4.1.14 error condition — an exception condition
which is not an alarm and which may support recovery
actions requested by a decision authority.
4.1.15 exception condition — a managed condition for
reporting on and providing recovery from an abnormal
situation in the equipment.
4.1.16 factory — entities outside the control domain of
the cluster tool and from which material is received for
processing and returned upon process completion. Also
considered to be the intertool environment.
4.1.17 factory transport resource — n operator or a
piece of equipment specialized in the transport of
material from one equipment to another.
4.1.18 form — type of data representing information
contained in an object attribute or service message
parameter. The data types are detailed in Section 4.2.
4.1.19 fundamental requirements — the requirement
for information and behavior that must be satisfied for
compliance to a standard. Fundamental requirements
apply to specific areas of application, objects, or
services.
4.1.20 handoff micro move — an operation requested
by an attached module and performed by a transport
module to achieve all or part of a material handoff
between them.
SEMI E38-1296 © SEMI 1995, 19963
4.1.21 interface flange — the boundary plane
separating an attached module and a single transport
module.
4.1.22 intertool environment — defined relative to a
particular cluster tool to be everywhere outside of the
intratool environment.
4.1.23 intertool material transfer job — a transfer job
in the cluster controller to receive material from, or
send the material to, the factory. In automated transfer,
it may be an element of a factory transfer job.
4.1.24 intertool port resource — a module resource
associated with a particular cassette module which
operates on behalf of the said module during material
transfer between the cassette module and the intertool
environment.
4.1.25 intratool environment — the entire
environmentally isolated volume contained within a
cluster tool.
4.1.26 intratool port resource — a module resource
associated with a particular interface plane of a
particular attached module which operates on behalf of
the said module during material transfer between the
transport module and the attached module.
4.1.27 intratool material transfer job — a transfer job
in a cluster controller for transfer of material from one
attached module to another through the linking
transport module.
4.1.28 isolation valve — a mechanical component
used at an interface plane to permit environmental
isolation between the transport module and an attached
module.
4.1.29 material handoff — the process by which
material moves from the sending transfer partner to the
receiving transfer partner.
4.1.30 material location — a physical position capable
of holding a single material.
4.1.31 material slot — a material location in a carrier
capable of holding a single material with an assigned
identifier.
4.1.32 module — an independently operable unit that
is part of a tool or system. [SEMI E21]
4.1.33 module resource — an entity which provides
specific capabilities required of the module to be
accessed or controlled externally. This includes the
physical capability and the associated control and
access management. It may contain material in one or
more material locations.
4.1.34 namespace — a domain within which object
identifiers are unique.
4.1.35 port — a point on the cluster at which a change
of ownership of material occurs. A port is not itself a
location but must have an associated location, such as
an interface plane.
4.1.36 process job — a material processing job for a
process module, specifying and tracking the processing
to be applied to the material while in the module.
4.1.37 process module — an attached module which
provides manufacturing value to material in a cluster
tool.
4.1.38 processing resource — a module resource
within a module which is independently capable of
providing manufacturing value to material.
4.1.39 protocol (communications) — the message
encoding used when transferring a message across
some communication facility.
4.1.40 recipe — the pre-planned and reusable portion
of the set of instructions, settings, and parameters under
control of a processing agent that determines the
processing environment seen by the material. Recipes
may be subject to change between runs or processing
cycles.
4.1.41 recipe executor — a component of a module
that stores and executes recipes.
4.1.42 recipe namespace — a logical management
domain with the responsibility for the storage and
management of recipes. It ensures the uniqueness of
recipe identifiers and provides services pertaining to
recipes stored within that domain.
4.1.43 recovery action — an operation associated with
an error condition with the aim of resolving the
abnormal situation detected. It may supply information
to the exception agent or request the exception agent to
perform some activity.
4.1.44 service — the set of messages and definition of
the behavior of a service provider that enables remote
access to a particular functionality.
4.1.45 service-provider — the software control entity
that is the provider of any of the related services.
4.1.46 service-user — the software control entity that
is the user of any of the related services.
4.1.47 transport module — a module containing one
or more transfer resources and a number of interface
planes. It is capable of end-to-end transfer between any
of the interface planes.
4.1.48 tm transfer job — a material transfer job for a
transport module specifying all criteria for receiving the
material from the source-attached module and sending
the material to the destination module.