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SEMI E130.1-1104 © SEMI 2004 3 Table 3 Service Parameter to SECS-II Data Items Mapp ing Service SECS-II Field Values Req. Description RCMD “CLEAN-PROBES” Y CPNAME “CLEANPROCESS” N Cl ean Process p arameter. CPVAL A [n] S…

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SEMI E130.1-1104 © SEMI 2004 2
Service Name Stream, Function SECS-II Message Name
INSPECT-PROBES S2,F49/F50 Enhanced Remote Command Send/Acknowledge
INSPECT- PTP-ALIGN S2,F49/F50 Enhanced Remote Command Send/Acknowledge
LOCKOUT-CONTROL S2,F49/F50 Enhanced Remote Command Send/Acknowledge
LOAD- TEST-SUBST S2,F49/F50 Enhanced Remote Command Send/Acknowledge
LOAD-SUBSTRATE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
MOVE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
MOVE-ABS S2,F49/F50 Enhanced Remote Command Send/Acknowledge
MOVE-SUB-STEPS S2,F49/F50 Enhanced Remote Command Send/Acknowledge
MOVE-TO-REF-DIE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
UNLOAD-TEST-SUBST S2,F49/F50 Enhanced Remote Command Send/Acknowledge
RESET-CONTACT-CNT S2,F49/F50 Enhanced Remote Command Send/Acknowledge
RESET-CONTROL-MAP S2,F49/F50 Enhanced Remote Command Send/Acknowledge
SET-CONTROL S2,F49/F50 Enhanced Remote Command Send/Acknowledge
SET-PROBE-CARD-ID S2,F49/F50 Enhanced Remote Command Send/Acknowledge
SET-CONTROL-MAP S2,F49/F50 Enhanced Remote Command Send/Acknowledge
UNLOAD-SUBSTRATE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
UNLOAD-ALLSUBSTRATES S2,F49/F50 Enhanced Remote Command Send/Acknowledge
ONLINE-LOCAL S2,F49/F50 Enhanced Remote Command Send/Acknowledge
5.3 Event Message Mapping
5.3.1 Table 2 defines the relationships between SEMI E130 collection events and SECS-II messages. Conventions
and table field definitions similar to mapping table for the services, here Event Name specifies the event defined in
SEMI E130. This specification follows SEMI E30 Dynamic Report Configuration to define and attach reports to
collection events.
Table 2 Event Message Mapping Table
Event Name Stream, Function SECS-II Message Name
All events defined in SEMI
E130.
S6F11/12 Event Report Send/Acknowledge
5.4 Service Parameter Mapping
5.4.1 Table 3 defines the relationships between SEMI E130 service parameters and SECS-II data definitions or
parameter fields in the mapped streams and functions. Parameters for acknowledgements or responses will follow
SECS-II specification for that stream and function, no service specific error codes are defined in this specification.
Descriptions of each table column are described below.
5.4.2 Service — Specifies the service whose parameters are described.
5.4.3 SECS-II Field — Specifies the SECS-II data item or message parameter used by the service. In this
specification, the DATAID and OBJSPEC fields are unspecified for services using the S2F49 SECS-II message.
Their values are to be ignored or used for implementation specific purposes.
5.4.4 Values — Value or SECS II format for the specified field. Formats are specified using the SML notation as
defined in appendices of SEMI E30 (GEM).
5.4.5 Req. — Indicates whether the specified field or parameter is required or not. If an optional CPNAME
parameter is used, the corresponding CPVAL must also be given.
5.4.6 Description — Provides a brief description of the SECS-II field in relation to the service parameters defined
in SEMI E130.
SEMI E130.1-1104 © SEMI 2004 3
Table 3 Service Parameter to SECS-II Data Items Mapping
Service SECS-II Field Values Req. Description
RCMD “CLEAN-PROBES” Y
CPNAME “CLEANPROCESS” N Clean Process parameter.
CPVAL A [n] Specifies name of the cleaning process to
be performed.
CPNAME “DIELIST” Y Die List parameter.
CLEAN-PROBES
CPVAL L, n
1. L, 2
1. U4
2. U4
:
n. L, 2
1. U4
2. U4
List of probe sites to be cleaned. Zero-
length list indicates that all sites should be
cleaned.
Each site is represented by a die coordinate
structure specifying the X and Y
coordinate:
L, n (n = number of sites selected)
1. L, 2
1. X Coordinate
2. Y Coordinate
…
n. L, 2
1. X Coordinate
2. Y Coordinate
INDEX RCMD “INDEX” Y
INK-DEVICE RCMD “INK-DEVICE” Y
RCMD “INK-DIE” Y
CPNAME “DIELIST” N Die List parameter.
CPVAL L, n
1. L, 2
1. U4
2. U4
:
n. L, 2
1. U4
2. U4
List of die sites to be inked. “DIELIST”
structure as defined above.
Either Die List or Control Map must be
supplied.
CPNAME “CONTROLMAP” N Control Map parameter.
INK-DIE
CPVAL A [n] Control Map identifier.
RMCD “INSPECT-INK-
MARKS”
Y
CPNAME “DIELIST” N Die List parameter.
INSPECT-INK-MARKS
CPVAL L, n
1. L, 2
1. U4
2. U4
:
n. L, 2
1. U4
2. U4
List of sites to inspect. Current site is
assumed if not provided.
RCMD “INSPECT-PROBES” Y
CPNAME “PROBESITELIST” N Probe Site List parameter.
INSPECT-PROBES
CPVAL Supplier Defined
Format
Supplier defined list of probe sites to
inspect. Zero-length list indicates all sites.
INSPECT- PTP-ALIGN RCMD “INSPECT- PTP-
ALIGN”
Y
SEMI E130.1-1104 © SEMI 2004 4
Service SECS-II Field Values Req. Description
RCMD “LOAD- TEST-
SUBST”
Y
CPNAME “SUBSTLOCID” Y SubstLocID parameter.
LOAD- TEST-SUBST
CPVAL A [n] Substrate Location containing the test
substrate.
LOAD-SUBSTRATE RCMD “LOAD-SUBSTRATE” Y
RCMD “LOCKOUT-
CONTROL”
Y
CPNAME “LOCKOUT” N Lockout parameter.
LOCKOUT-CONTROL
CPVAL BOOLEAN True = Lockout console control.
RCMD “MOVE” Y At least one of X, Y, or Z parameter must
be supplied. An omitted X, Y, or Z is
equivalent to specifying zero.
CPNAME “X” N X parameter.
CPVAL U4 Relative step value in X direction.
CPNAME “Y” N Y parameter.
CPVAL U4 Relative step value in Y direction.
CPNAME “Z” N Z parameter.
MOVE
CPVAL U4 Relative step value in Z direction.
RCMD “MOVE-ABS” Y At least one of X, Y, or Z parameter must
be supplied. An omitted X, Y, or Z is
equivalent to specifying current value.
CPNAME “X” N X parameter.
CPVAL U4 Absolute index in X direction.
CPNAME “Y” N Y parameter.
CPVAL U4 Absolute index in Y direction.
CPNAME “Z” N Z parameter.
MOVE-ABS
CPVAL U4 Absolute index in Z direction.
RCMD “MOVE-SUB-STEPS” Y At least one of XSubstep, YSubstep or
Zsubstep must be supplied. An omitted
XSubstep, YSubstep, or ZSubstep is
equivalent to specifying zero.
CPNAME “XSUBSTEP” N XSubstep parameter.
CPVAL F4 Relative substep value in X direction.
CPNAME “YSUBSTEP” N YSubstep parameter.
CPVAL F4 Relative substep value in Y direction.
CPNAME “ZSUBSTEP” N ZSubstep parameter.
MOVE-SUB-STEPS
CPVAL F4 Relative substep value in Z direction.
MOVE-TO-REF-DIE RCMD “MOVE-TO-REF-DIE” Y
RESET-CONTACT-CNT RCMD “RESET-CONTACT-
CNT”
Y
RCMD “RESET-CONTROL-
MAP”
Y If coordinates are designated, both X and Y
coordinate must be provided.
CPNAME “X” N X parameter.
CPVAL U4 X coordinate value.
CPNAME “Y” N Y parameter.
RESET-CONTROL-MAP
CPVAL U4 Y coordinate value.
RCMD “SET-PROBE-CARD-
ID”
Y
CPNAME “PROBECARDID” Y Probe Card ID parameter.
SET-PROBE-CARD-ID
CPVAL A [n] Probe card identifier.