semi合集-English.pdf - 第1639页

SEMI E38-1296 © SEMI 1995 , 1996 28 achieve the mission of the cluster tool, the processin g o f m aterial. • Recipe m anagement for s torage, archival, and editin g of process modu le recipes (supported thro ugh the Rec…

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SEMI E38-1296 © SEMI 1995, 199627
request, the module performs the operations necessary
to set the clock to the value supplied, within its
resolution, from which it shall continue immediately.
The DateTime attribute of the Clock object as used in
Clock Services has a resolution in the range of seconds
to centiseconds. If it is possible to specify the DateTime
accurate to centiseconds, then centiseconds should be
specified. If it is not possible to resolve time to less than
a second, then centiseconds shall be reported as “00.”
This requirement is for the reporting of the DateTime
attribute of the Clock object in Clock Services only;
other services may require greater resolution, in which
case the Clock Services DateTime attribute resolution
shall also be greater.
8.8 Required Services — Within a standards-compliant
Cluster Tool, a number of services must be supported,
at least to the fundamental requirements level. Due to
the specialization of the modules in a Cluster Tool as
detailed in the concepts section above, each module
type only needs to support a subset of the service
groups as shown in the message flow diagrams.
The services requirements for each module controller
are described in this section. An example of use of
services by a cluster controller is also given.
8.8.1 Transport Module Controller
• Material transfer functions for the end-to-end
establishment of material movement within the
cluster (supported through the Material Movement
services). Material transfer is set up through a
Transfer Job requested of the transport module by
the service-user (e.g., cluster controller).
• Material Handoff between the process and cassette
modules and the transport module (supported
through the Material Movement services).
• Exception capabilities to post and manage
exception conditions within the transport module
(supported through the Exception Management
services).
• Reporting of module variable data linked to events
to the service-user (supported through the Event
Reporting services).
• Access to standard objects of the specific services
above as required by the service-user (supported
through the Object services).
8.8.2 Cassette Module Controller
• Material I/O functions for the management of
moving cassettes in and out of the cluster as well as
for moving material between the cassette module
and the transport module (supported through the
Material Movement services). Material I/O is set
up through a Transfer Job requested of the cassette
module by the service-user (e.g., cluster
controller).
• Material Handoff between the cassette module and
the transport module (supported through the
Material Movement services).
• Exception capabilities to post and manage
exception conditions within the transport module
(supported through the Exception Management
services).
• Reporting of module variable data linked to events
to the service-user (supported through the Event
Reporting services).
• Access to standard objects of the specific services
above as required by the service-user (supported
through the Object services).
8.8.3 Process Module Controller
• Material processing functions (supported through
the Processing Management services). Processing
is specified through a Process job requested of the
process module by the service-user (e.g., cluster
controller).
• Recipe Management to verify and transfer recipes
between the process module and the service-user
(supported through the Processing Management
services).
• Material I/O functions for the management of
moving material in and out of the process module
(supported through the Material Movement
services). Material I/O is set up through a Transfer
job requested of the process module by the service-
user (e.g., cluster controller).
• Material Handoff between the process module and
the transport module (supported through the
Material Movement services).
• Exception capabilities to post and manage
exception conditions within the transport module
(supported through the Exception Management
services).
• Reporting of module variable data linked to events
to the service-user (supported through the Event
Reporting services).
• Access to standard objects of the specific services
above as required by the service-user (supported
through the Object services).
8.8.4 Example Cluster Controller
• Scheduling and primary module control.
Schedules Transfer and Process jobs in order to
SEMI E38-1296 © SEMI 1995, 1996 28
achieve the mission of the cluster tool, the
processing of material.
• Recipe management for storage, archival, and
editing of process module recipes (supported
through the Recipe Management services).
• Human interfaces for the attached process,
transport, and cassette modules (supported through
the Event Reporting and Object Service
definitions).
• Exception resolution services for making recovery
decisions on exception conditions within the
cluster (supported through the Exception
Management services).
SEMI E38-1296 © SEMI 1995, 199629
APPENDIX 1
APPLICATION NOTES
NOTE: This appendix was approved as a part of SEMI E38 by full letter ballot procedure.
A1-1 Factory Integration
The Cluster Tool Module Communications (CTMC)
Standard and its associated services define the
interactions of the cluster modules and the cluster
controller. The standard does not address the
communications between the cluster and an external
factory “host.” The SEMI standard which addresses the
equipment to host communications interface is SEMI
E30 (GEM).
The purpose of this application note is to discuss the
requirements and possible pitfalls of the factory host-
cluster tool interface. The bulk of the text will address
the use of the current (at this writing) version of GEM
(SEMI E30). However, some consideration will be
given to the possibility of direct access to the
components of the cluster through the cluster
communications environment.
A1-1.1 Direct Access to Cluster Modules — The
CTMC was designed to allow for interoperability
among the entities in a cluster. It is possible to add a
new entity to the cluster and share in this
interoperability. This means that a software application
that is “plugged” into the cluster communication
environment will have access to all of the cluster
modules via the standard message set. In this way, a
factory host computer can gain direct access to cluster
modules, by-passing the cluster controller.
While direct access to the cluster modules has some
advantages, intrusions into the cluster tool
communications environment can have a profound
effect on the system. Below are listed a few of the
positive benefits direct access can bring, followed by
some of the negatives of such an approach.
Positives:
• If the cluster controller does not have to act as the
intermediary in transactions between module and
host, it may be simplified.
• Direct access of the modules can be a more
efficient means of obtaining information.
• The factory host would have the flexibility to
perform scenarios which the cluster controller
suppliers had not imagined.
Negatives:
• A new, unplanned load on the cluster network may
have a negative impact on system performance. If
the delivered system’s network is highly loaded
and has been tuned for that load, added pressure on
the system may have unexpected results.
• Direct access of the cluster modules may have a
negative impact on system performance. The
cluster modules are performing the physical work
for the cluster. If they become busy answering
inquiries, it may detract from their speed of
processing. For example, a simple query, such as
temperature of chamber, may actually result in
messaging to the sensor itself along the same real-
time communication path used to open and close
valves, ect.
• System integrity of the cluster tool may be at risk if
an external entity (e.g., Factory Host) takes even
minor control actions. A changed equipment
constant may put the cluster controller out of synch
with its module. An external command to perform
an action may directly conflict with the cluster’s
current actions.
• The CTMC defines no access security to prevent
undesirable actions on the part of external entities.
If there is to be this sort of direct communication with
cluster modules, the implementer should exercise
extreme caution in the design of the add-on application.
It is recommended that no active control be attempted
and that no changes to the system configuration be
attempted (e.g., do not set attributes). If data is to be
accessed, it is best done by asynchronous event based
reporting, rather than by polling. Above all, it is
recommended that any plans to access the cluster
through the cluster communication environment be
discussed thoroughly with the system supplier.
A1-1.2 GEM Control of a Cluster Tool — This section
discusses the interactions between a cluster tool and
factory host. The basis for that communication is
assumed to be SEMI E30, the Generic Equipment
Model.
GEM was designed relative to the prevalent class of
equipment at that time: proprietary, single supplier, and
limited to a single process run at a time. The advent of
multi-chamber processing equipment and later of multi-
supplier cluster tools has changed the general
requirements set for the factory-equipment interface. In
the future, GEM may evolve to meet these new
requirements. Regardless, the point of this application
note is to explore how best to apply the existing factory