semi合集-English.pdf - 第6907页
SEMI S8-0705 © SEMI 1995, 2005 4 5.2.17 frequentl y used — used in processing or job cycle at leas t once every hour. Multiple tool op eration by a single operator should be considere d. 5.2.18 human error — errors whic …
SEMI S8-0705 © SEMI 1995, 2005 3
Waters, Thomas, et. al., Application Manual for the Revised NIOSH Lifting Equation, U.S. Department of Health
and Human Services (NIOSH), Cincinnati, OH, 1994.
A. Mital, A.S. Nicholson, M.M. Ayoub: A Guide to Manual Materials Handling, Taylor and Francis, London, 1993.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 MAWL — Maximum Acceptable Weight of Lift
5.1.2 MMH — Manual Material Handling
5.1.3 SESC — Supplier Ergonomics Success Criteria (See Appendix 1.)
5.2 Definitions
5.2.1 administrative controls — administrative controls modify the way in which a job is performed without
involving equipment design. They are non-engineering controls which include: job rotation, job enlargement, work-
rest scheduling, micro-breaks, and stretching exercises. Engineering controls are preferred over administrative
controls.
5.2.2 anthropometric considerations — design considerations based upon anthropometric (e.g., size and strength)
limitations of user personnel.
5.2.3 anthropometry — description of the physical measurement of humans (e.g., size, strength).
5.2.4 cognitive — relating to human information processing, perception, and attention.
5.2.5 critical controls and displays — controls and displays which prevent the equipment from entering, or indicate
that equipment is entering an unsafe condition in which hazards to personnel or damage to equipment may occur.
Emergency Off (EMO) switches, interlock defeat indicators, and malfunction alarms are examples of critical
controls and displays.
5.2.6 cumulative trauma disorder — a disorder which results from the accumulation of stresses (e.g., forces,
repetitive movements, etc.) to a body part over a period of time.
5.2.7 duration — the length of time of a cycle or the entire task, which represents the time of exposure to single or
multiple risk factors.
5.2.8 emergency off (EMO) — a control circuit which, when activated, places the equipment into a safe shutdown
condition.
5.2.9 engineering control — a method to eliminate or mitigate a hazard through equipment design.
5.2.10 ergonomic-related hazard — an equipment or workplace condition that creates stress to the user that
contributes to the risk of developing either an acute injury or a cumulative trauma disorder.
5.2.11 ergonomic issues — those issues dealing with the user’s physical and cognitive needs, capabilities, and
human performance limitations in relation to the design of machines, tasks, and other features of the human’s
working environment.
5.2.12 ergonomics — the study of human mental and physical capability in relation to the working environment and
the equipment operated by the worker.
5.2.13
excessive reach — a reach which may result in biomechanical or other stress to the user.
5.2.14 extended reach — a reach which requires either stretching, stooping, crouching, bending forward at the waist
greater than 20 degrees, or shoulder flexion or abduction greater than 45 degrees.
5.2.15 force — the mechanical effort to accomplish a specific movement or exertion. These include: static
exertions, which produce no motion but have significant duration; dynamic exertions, which are motions including
lifting, pushing, pulling; and contact stress, which is localized pressure exerted against the skin by an external force.
5.2.16 frequency — how often a task is performed over time.
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5.2.17 frequently used — used in processing or job cycle at least once every hour. Multiple tool operation by a
single operator should be considered.
5.2.18 human error — errors which include: failure to perform a required function; performing a function that has
an undesirable consequence; failure to recognize and correct a hazardous condition; or inadequate or incorrect
response to a contingency.
5.2.19 inadvertent actuation — accidental or unintentional activation or deactivation of a control.
5.2.20 infrequently used — used in processing or job cycle less frequently than once every hour. Multiple tool
operation by a single operator should be considered.
5.2.21 installation — the activities performed after the equipment is received at a user site through preparation for
initial service, including transportation, lifting, uncrating, placement, leveling, and facilities fit up.
5.2.22 lateral pinch — grip in which the object is held between the thumb and the side of the index finger (often
referred to as key grip).
5.2.23 maintenance — planned or unplanned activities intended to keep equipment in good working order.
5.2.24 mock up — a full size physical model of the equipment, generally made of relatively inexpensive materials,
used for human factors evaluation.
5.2.25 neutral posture — the position of the human body in which the joints are least stressed. Generally, the body
in its neutral position is standing erect with the eyes looking forward, and the arms hanging by the sides.
5.2.26 non-neutral (awkward) postures — The position of a joint(s) away from its neutral, or least stressed, posture.
5.2.27 normal line of sight — the line extending from the eyes, perpendicular to the interoccular line and 15 degrees
below the horizontal position of the eye.
5.2.28 operation — consists of functions by which the operator causes the equipment to perform its intended
purpose; these may include loading product and setting or manipulating external controls.
5.2.29 operator — a user that interacts with the equipment only to the degree necessary for the equipment to
perform its intended function.
5.2.30 override — to take precedence over the current control system state.
5.2.31 palmar pinch — grip where the fingers press against the palm of the hand, with the object held between the
fingers and the palm. Thumb is not used (e.g., picking up a sheet of plywood).
5.2.32 personal protective equipment (PPE) — equipment and clothing worn to reduce potential for personal injury
from hazards associated with the task to be performed (e.g., chemical gloves, respirators, safety glasses, etc.). In the
context of this document, cleanroom attire (e.g., gloves, smocks, booties, hoods) is not considered personal
protective equipment.
5.2.33 power grip — a grip in which the fingers and thumb wrap entirely around the handle such that the thumb
contacts or overlaps the index finger.
5.2.34 postural stress — stress occurring when a body position places undue load on the muscles, tendons, nerves,
and blood vessels, or produces pressure on a joint.
5.2.35 primary viewing area — the 30 degree cone around the normal line of site (15 degrees above, below, and to
either side of the line of sight).
5.2.36 problem tasks — tasks which have been defined as presenting ergonomically incorrect conditions that are
likely to cause biomechanical stresses or injury to personnel, misoperation, or damage to equipment or the product.
5.2.37 risk factors — those elements of the design which allow an increased potential for injury/illness to
personnel, or for damage to equipment, environment, or product.
5.2.38 semiconductor manufacturing equipment — equipment used in the design, development, manufacture,
assembly, measurement and test of semiconductors, and associated semiconductor support processes.
5.2.39 service — unplanned activities intended to return equipment, which has failed, to good working order.
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5.2.40 static posture — a fixed position, with minimal movement of the particular body parts.
5.2.41 stooping — bending the head and shoulders, or the general body, forward and downward from an erect
position.
5.2.42 task — a group of related job elements performed within the work cycle and directed toward a specific
objective.
5.2.43 task analysis — an analytical process employed to determine the specific actions required of the user when
operating, maintaining, or servicing equipment, or doing work on single or multiple tools. Within each task, steps
are described in terms of the perception, decision-making, memory storage, posture, and biomechanical
requirements, as well as the expected errors.
5.2.44 tip pinch — grip in which the object is held between the tips of the thumb and index finger.
5.2.45 user — person interacting with the equipment. Users may include operators, maintainers, service personnel,
and others.
5.2.46 user population — a specific cross section of persons that may reasonably be expected to interact with the
equipment to perform operation, maintenance, or service tasks.
5.2.47 validation testing — testing to confirm effectiveness of design. An item’s “effectiveness” is viewed in terms
of its functional design, specific to SEMI S8.
5.2.48 WIP nest — a storage structure for Work in Process (WIP).
5.2.49 work environment — the location where semiconductor devices and associated support processes are
designed, developed, manufactured, assembled, measured, and tested.
5.2.50 workplace layout — the physical arrangement of equipment in the facility.
5.2.51 workspace — the available area where the user is expected to operate, maintain, and service the equipment.
5.2.52 workstation — the location where equipment controls and displays are found or the location of
loading/unloading of material.
6 General Guidelines
6.1 Ergonomics-Related Safety Issues — Ergonomics-related safety issues may exist whenever equipment design,
installation, operation, service, or maintenance factors result in task demands that exceed the information processing
or physical capabilities of properly trained users. For example, ergonomics-related safety issues may result from:
6.1.1 Static or awkward postures,
6.1.2 Repetitive motion,
6.1.3 Poor access, inadequate clearance, and excessive reach,
6.1.4 Lifting of heavy or bulky components,
6.1.5 Displays that are difficult to read or understand,
6.1.6 Controls that are confusing to operate or require too much force, and
6.1.7
Use of non-specific warnings or faults to communicate machine problems.
6.2 Safety-related issues should be designed out or otherwise reduced to an acceptable level prior to production.
Ergonomics-related safety issues are reduced by implementing sound ergonomics engineering principles in design,
and structuring job requirements around human performance capabilities and limitations.
6.3 Equipment should be designed to reduce or eliminate the potential types of error caused by human-machine or
human-task mismatch (e.g., inadvertent actuation, errors of omission or commission).
6.4 Engineering controls are the preferred means to reduce hazards. Where an engineering approach to ergonomic
hazard control is not feasible, the user should implement administrative controls to mitigate hazards by reducing the
duration, frequency, or severity of exposure.