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SEMI D18-0299 E © SEMI 19 99, 2001 1 SEMI D18-0299 E SPECIFICA TION FOR CASSETTES USED FOR HORIZONTA L TRANSPORT AND STORAGE OF FLA T P A NEL DISPL AY SUBSTRATES This specifica tion w as technic ally approved by the Flat…

SEMI D17-0200 © SEMI 1998, 2000 14

APPENDIX 1

NOTE: The material in this appendix is an official part of SEMI D17 and was approved by full letter ballot procedures on

December 15, 1999 by the North American Regional Standards Committee. Determination of the suitability of the material

herein is solely the responsibility of the user.

A1-1 Application Notes

A1-1.1 The shape of the teeth holding the substrates is not specified in this standard. The tooth surface that touches

the substrate should have a large radius to minimize stress on the substrate and tooth.

A1-1.2 Extra clearance (larger than the pitch) has been added below the bottom substrate (for non-random

sequential access to the substrates with a faster or less precise robot). To increase the stability of Type A Cassettes,

the points on the cassette bottom that are the most distant from the lines connecting each pair of coupling pins

should be made as close as practical to the horizontal datum plane so that the cassette cannot tip very far off of the

kinematic coupling.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for

any particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. These standards are subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI D18-0299

SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL

TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY

SUBSTRATES

This specification was technically approved by the Flat Panel Display Equipment Committee and is the direct

responsibility of the North American Flat Panel Display Committee. Current edition approved by the North

American Regional Standards Committee on August 15, 1998. Initially available at www.semi.org

September 1998; to be published February 1999.

This document was editorially modified in October 2000 to correct a formatting error. Changes were made

to Figure 5.

1 Purpose

1.1 This standard specifies the cassettes used to

horizontally transport and store glass substrates 0.7

mm-1.1 mm thick (max) in a flat panel display (FPD)

manufacturing facility.

2 Scope

2.1 This standard is intended to set an appropriate

level of specification that places minimal limits on

innovation while ensuring modularity and inter-

changeability at all mechanical interfaces. Most of the

requirements given in this specification are in the form

of algebraic expressions defining maximum or

minimum dimensions referenced from the length and

width of the intended substrate with very few required

surfaces. Only the mechanical interfaces for cassettes

are specified; no materials requirements or micro-

contamination limits are given. However, this standard

has been written so that cassettes of various designs and

materials can be manufactured in conformance with it.

3 Referenced Standards

NOTE: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

3.1 SEMI Standards

SEMI D3 — Quality Area Specification for Flat Panel

Display Substrates

SEMI D5 — Standard Size for Flat Panel Display

Substrates

SEMI D6 — Standard Edge Length and Thickness for

Flat Panel Display Mask Substrates

SEMI D9 —Definitions for Flat Panel Display

Substrates

SEMI D11 — Specification for Flat Panel Display

Glass Substrate Cassettes

SEMI D21 — Terminology for Flat Panel Display

Masks

SEMI E15 — Specification for Tool Load Port

SEMI E44 — Guide for Procurement and Acceptance

of Minienvironments

4 Terminology

4.1 bilateral datum plane — a vertical plane that

equally bisects the substrate and that is perpendicular to

both the horizontal and facial datum planes.

4.2 carrier capacity — the number of substrates that a

carrier holds.

4.3 cassette — (as defined in SEMI E44)

4.4 cassette bottom domain — volume (below z4

above the horizontal datum plane) that contains the

bottom of the cassette.

4.5 cassette bottom opening — an opening through the

cassette bottom domain that provides access to the glass

substrates for external roller drive mechanisms to move

substrates into/from the cassette.

4.6 cassette front — the area between the cassette top

and bottom domains through which substrates pass

during loading and unloading.

4.7 cassette rear — the area between the cassette top

and bottom domains opposite the cassette front.

4.8 cassette rear domains — volumes (from z4 above

the horizontal datum plane to z9 above the top

substrate) that contain rear columns which prevent the

substrates from exiting the cassette rear.

4.9 cassette placement sensing pads — surfaces on the

bottom of the cassette for triggering optical or

mechanical sensors.

4.10 cassette side domains — volumes (from z4 above

the horizontal datum plane to z9 above the top

substrate) that contain the mizo teeth and mizo plates

that support the substrates.

SEMI D18-0299

4.11 cassette top domain — volume (higher than z9

above the top substrate) that contains the top of the

cassette.

4.12 conveyor rails — features on the bottom of the

cassette for supporting the cassette on roller conveyors.

4.13 conveying surface



entire bottom surface of

cassette (z15 above the horizontal datum plane),

excluding the V-rail, V-groove, and float roller zones,

for supporting the cassette on roller conveyors

4.14 facial datum plane — a vertical plane that

equally bisects the substrates when the centers of the

substrates are aligned and that is parallel to the front

side of the carrier (where substrates are removed or

inserted) and is perpendicular to the bilateral datum

plane. On tool load ports, it is also parallel to the load

face plane (as defined in SEMI E15) on the side of the

tool where the carrier is loaded and unloaded.

4.15 first substrate end-effector clearance — the

distance (dimension z9) between the top of the cassette

bottom domain and the first nominal substrate seating

plane.

4.16 first nominal substrate height — the distance

(dimension z5) from the horizontal datum plane to the

first nominal substrate seating plane.

4.17 horizontal datum plane — load height as defined

in SEMI E15.

4.18 mizo plate — a plate that contains mizo teeth and

may provide structure to the cassette.

4.19 mizo teeth — elements that support the substrates

in the cassette.

4.20 nominal center line — the intersection of the

facial and bilateral datum planes.

4.21 nominal substrate seating plane — a horizontal

plane that contains the nominal bottom surface of the

substrate as it rests on the mizo teeth.

4.22 optical substrate sensing paths — lines of sight

for optically sensing the positions of the substrates.

4.23 robotic handling flanges — projections on the

cassette for handling of the cassette.

4.24 substrate extraction volume — the open space

for extracting a substrate from the cassette.

4.25 substrate pitch — the distance between adjacent

nominal substrate seating planes.

4.26 substrate set-down volume — the open space for

inserting and setting down a substrate in the cassette.

4.27 substrate pick-up volume — the space that

contains entire bottom of a substrate if the wafer is

pushed to the rear of the cassette.

5 Ordering Information

5.1 Intended Use — This standard is intended to

specify cassettes over a reasonable lifetime of use, not

just those in new condition. The purchaser needs to

specify the time period, the number of cycles and any

special conditions to which the cassettes will be

exposed. It is under these conditions that the cassettes

must remain in compliance with the requirements listed

in Section 6.

5.2 Temperature Ranges — The purchase of the

cassettes needs to specify three sets of temperatures to

which the cassettes might be exposed. An operating

temperature range is the set of environmental

temperatures in which the cassettes will remain in

compliance with the requirements listed in Section 6

(e.g. 23°C ± 5°C). A temporary temperature range is

the set of environmental temperatures to which the

cassettes can be exposed such that when the cassettes

return to the operating temperature range, the cassettes

will be in compliance with the requirements listed in

Section 6 (e.g. 90°C maximum during cleaning of the

cassette). Also, the purchaser needs to specify a range

of temperatures for the substrates that might be inserted

in the cassettes.

5.3 Pitch and Capacity Options — The purchaser

needs to specify the pitch and capacity of the cassettes.

Table 2 provides two options of pitch and capacity.

Additional pitch and capacity options are not yet

defined, but should be specified in the same manner.

5.4 Material — To be agreed upon between supplier

and user. Construction may be of one or more molded

or machines parts.

6 Requirements

6.1 Dimensions — Most of the dimensions of the

cassette are determined with respect to the three

orthogonal datum planes defined in that standard: the

horizontal datum plane, the facial datum plane, and the

bilateral datum plane (see Figure 1).

6.2 Cassette Physical Alignment Interface — The

cassette should be registered to the tool interface by one

of the three following types of registrations (Type A, B

or C). The locations of the registration features have

been chosen such that all three types may coexist on the

same cassette

6.2.1 Cassette Physical Alignment Interface-Type A —

This registration consists of three features (not

specified, but recommended to be inverted V-shaped