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SEMI E87-0705 © SEMI 1999, 2005 47 RELATED INFORMATION 1 CARRIER OBJECT ID NOTICE : This rel ated information is n o t an of ficial part of SEMI E87 , but was ap proved for publicat ion by f ull letter ball ot procedures…
SEMI E87-0705 © SEMI 1999, 2005 46
Equipment Danger Affected
Configuration Alarm Text Potential Imminent Operator Equipment Material
Carrier Verification Failure X X
Slot Map Read Failed X X X X
Slot Map Verification Failed X X X
Attempt To Use Out Of Service Load Port X X X
Carrier Presence Error X X X X
Carrier Placement Error X X X X
Carrier Dock/UnDock Failure X X X
Carrier Open/Close Failure X X X
Fixed and Internal
Buffer
Duplicate CarrierID X X
Internal Buffer
Equipment Only
Internal Buffer Carrier Move Failure X X X
Fixed & Internal
Buffer Equipment
Carrier Removal Error X X X X
20.3 Duplicate CarrierID
20.3.1 If the equipment receives a carrier with a CarrierID that is the same as that of another carrier present at the
equipment, the following rules shall apply:
1. The second carrier with a CarrierID shall not be processed.
2. If processing on the first carrier with the CarrierID has not begun, it should not be processed.
3. If processing on the first carrier has begun a Duplicate Carrier ID In Process event shall be issued to notify the
host.
21 Requirements for Compliance
21.1 Table 39 provides a checklist for CMS compliance.
Table 39 CMS Compliance Statement
Fundamental CMS Requirements CMS Section Implemented CMS Compliant
Load Port Numbering 9.1 Yes No Yes No
Carrier Slot Numbering 9.2 Yes No Yes No
Load Port Transfer State Model 9.3–9.4.3 Yes No Yes No
Carrier Object Implementation 10 Yes No Yes No
Load Port Reservation State Model
(internal buffer equipment)
12 Yes No Yes No
Load Port/Carrier Association State Model 13 Yes No Yes No
CarrierID Verification Support 14.2 Yes No Yes No
Slot Map Verification Support 14.3 Yes No Yes No
Services Implementation 16 Yes No Yes No
Additional Events Implementation 18 Yes No Yes No
Variable Data Definitions 19 Yes No Yes No
Alarms Implementation 20 Yes No Yes No
Additional CMS Capabilities CMS Section Implemented CMS Compliant
Load Port Reservation State Model
(fixed buffer equipment)
12 Yes No Yes No
Reservation Visible Signal 12.2 Yes No Yes No
SEMI E87-0705 © SEMI 1999, 2005 47
RELATED INFORMATION 1
CARRIER OBJECT ID
NOTICE: This related information is not an official part of SEMI E87, but was approved for publication by full
letter ballot procedures on December 15, 1999.
R1-1 Carrier Object ID
R1-1.1 The Carrier Object ID is derived as stated in the Table R1-1 Carrier ID derivation.
Table R1-1 CarrierID Derivation
Method of Original
Instantiation
CarrierID
Read
ID
Verifi-cation
Following Actions CarrierID = Parameter Required
by Service
1 Bind Successful Successful
and
equipment
based
Production equipment continues
with the carrier.
CarrierID in
Bind service.
Bind: CarrierID,
PortID, and
PropertiesList
2 Bind Successful Fails The carrier object instantiated via
the Bind message is destroyed and a
new carrier object with the
carrierID equal to the one
determined by the carrierID is
instantiated.
ProceedWithCarrier service is
received.
CarrierID
provided by
the CarrierID
read.
ProceedWith-Carrier:
CarrierID,
PropertiesList
3 Bind Successful Fails The carrier object instantiated via
the Bind message is destroyed and a
new carrier object with the
carrierID equal to the one
determined by the carrierID is
instantiated. CancelCarrier service
is received.
CarrierID
provided by
the CarrierID
read.
CancelCarrier:
CarrierID
4 Bind Fails NA ProceedWithCarrier service is
received and the carrierID matches
the carrierID provided by the Bind
service.
CarrierID
provided by
the Bind
service.
ProceedWith-Carrier:
CarrierID
5 Bind Fails NA CancelCarrier service is received
and the carrierID matches the
carrierID provided by the Bind
service.
CarrierID
provided by
the Bind
service.
CancelCarrier:
CarrierID
6 Carrier-Notification Successful Successful
and
equipment
based
Production equipment continues
with the carrier.
CarrierID in
Carrier-
Notification.
Carrier-Notification:
CarrierID and
PropertiesList
7 Carrier ID read Successful Successful
and Host
based
ProceedWithCarrier service is
received and the carrierID matches
the carrierID read by the
p
roduction
equipment.
CarrierID
read by
production
equipment.
ProceedWith-Carrier:
CarrierID and
PropertiesList, PortID
may be included.
8 CarrierID read Successful Fails and
Host based
A CancelCarrier service is received
and the carrierID matches the
carrierID read by the production
equipment.
CarrierID
read by
production
equipment.
CancelCarrier:
CarrierID
SEMI E87-0705 © SEMI 1999, 2005 48
Method of Original
Instantiation
CarrierID
Read
ID
Verifi-cation
Following Actions CarrierID = Parameter Required
by Service
9 The method of
original
instantiation is
defined following
the carrierID read
fail and is described
in column titled
following actions.
Fails NA A ProceedWithCarrier service is
received and the carrierID is
provided in the service.
CarrierID
provided by
the Proceed-
WithCarrier
service.
ProceedWith-Carrier
: CarrierID, PortID,
PropertiesList
10 The method of
original
instantiation is
defined following
the carrierID read
fail and is described
in the column titled
Following Actions.
A CancelCarrier service is received
and the carrierID is the one
provided by the CancelCarrier.
CarrierID
provided by
the Cancel-
Carrier
service.
CancelCarrier:
CarrierID, PortID
R1-2 Scenarios
R1-2.1 The scenarios listed here are not a requirement of this standard. They are provided to aid in the
understanding of the document. These scenarios are not an exhaustive set of all possible scenarios. The scenarios
presented are typical or common scenarios encountered when using this standard.
R1-2.2 Normal Roundtrip 1
R1-2.2.1 Assumptions: Fixed buffer production equipment, FOUP, Host based verification
R1-2.2.2 Indicated states: LTS = Load Port Transfer State, LCAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status
Table R1-2 Normal Roundtrip 1
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Loading transfer starts. H<-E TransferBlocked
2 Loading transfer completes.
NA (T) (T)
3 CarrierID is read. H<-E WaitingForHost
4 CarrierID is verified by host, and result is OK.
WFH
5 Host commands to proceed. H->E ProceedWithCarrier
6 Carrier is docked.
SNR
7 Slot map is read. H<-E WaitingForHost
8 Slot map is verified by host, and result is OK.
WFH
9 Host commands to proceed. H->E ProceedWithCarrier
10 Process starts.
11 Process completes.
TB
12 Carrier is undocked. H<-E ReadyToUnload RTU
13 Unloading transfer starts. H<-E TransferBlocked TB
A
IVO
SVO
14 Unloading transfer completes. H<-E ReadyToLoad RTL NA (T) (T)
R1-2.3 Normal Roundtrip 2
R1-2.3.1 Assumptions: Fixed buffer production equipment, FOUP, Production equipment based verification, Bind
Service received