semi合集-English.pdf - 第1472页

SEMI 30.1-0200 © SEMI 1998, 2000 47 6. L, 2 1. L, 2 1. <ATTRID= “Process ProgramID”> 2. <AT TR DAT A= “M y R ec ip e”> 2. L, 2 1. <ATTRID= “ProcessL e vel”> 2. <ATT RDAT A= “My Le ve l”> 7. L, c 1…

SEMI 30.1-0200 © SEMI 1998, 2000 46

RELATED INFORMATION 2

APPLICATION NOTES

NOTE: The material contained in these Application Notes is not an official part of SEMI E30.1 and is not intended to modify or

supersede the official standard. Rather, these notes describe possible methods for implementing certain ISEM requirements

described by the standard and are included as reference material.

R2-1 Using ISEM Table Attributes to Specify Process Related Data Item Variable Values

R2-1.1 Section 11.1 (ISEM Table Data) allows the host to use ISEM Table attributes to specify product and process

related information related to the table data. The ISEM Variable Item Dictionary (Table 4) includes seven data items

intended to be used for this purpose. They are identified with the comment “This information may be added by the

host in the ISEM Tables.” Identifying the value of variable data items in Table attributes is not covered in use of

ISEM Tables. One method to accomplish this is to use attribute identifiers (ATTRIDn) that are the same identifiers

that are used for the equipment variable data items (Table R2-1). (This is very similar to the method specified in

Section 12.5 to identify values to override the default values of variable process program parameters using the “PP-

SELECT” remote commands).

Table R2-1 ISEM Variable Items and Their Equivalent ISEM Table Attribute Identifiers

Variable Item

(Table 4)

ISEM Table Attribute

Identifier

Description

Name Type

OperatorID DV OperatorID Identification of the operator of the inspection/review

equipment.

ProcessEquipmentID DV ProcessEquipmentID Identification of the process equipment used with the

current material immediately prior to the

inspection/review.

ProcessEquipmentLocation DV ProcessEquipmentLocation Location (code) of the process equipment used with the

current material immediately prior to the

inspection/review.

ProcessProgramID DV ProcessProgramID Identification of the process program used with the

process equipment used on the current material

immediately prior to the inspection/review.

ProcessLevel DV ProcessLevel Identification of the processing level of the current

material.

ProductID DV ProductID The product identification of the current material

inspected/reviewed.

ProcessRunID DV ProcessRunID Run identification for the process prior to current

inspection/review.

NOTE 1: The variable item may be identified using any appropriate SECS II data item format.

R2-2 Example ISEM Table with Item Attributes That Specify ISEM Variable Values Using S13,F13

Table Data Send

R2-2.1 Typical values for Data Items are indicated.

L, 8

1. <DATAID>

2. <OBJSPEC=null>

3. <TBLTYP=DefectData>

4. <TBLID=null>

5. <TBLCMD=1>

SEMI 30.1-0200 © SEMI 1998, 200047

6. L, 2

1. L, 2

1. <ATTRID= “ProcessProgramID”>

2. <ATTRDATA= “My Recipe”>

2. L, 2

1. <ATTRID= “ProcessLevel”>

2. <ATTRDATA= “My Level”>

7. L, c

1. <COLHDR1= “Insp_Anomaly ID”>

2. <COLHDR2= “Insp_Table specifier”>

3. <COLHDR3= “Insp_Coordinate X”

4. <COLHDR4= “Insp_Coordinate Y”

: // etc…as defined by Table 11.3.5

c. <COLHDRc>

8. L, r

1. L, c

1. <TBLELT11> // A[1..16]

2. <TBLELT12> // I4

3. <TBLELT13> // I4

4. ETC…

c. <TBLELT1c> // A

r. L, c

1. <TBLELTr1>

c. <TBLELTrc>

NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. These standards are subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E30.5-0302 © SEMI 2001, 20021

SEMI E30.5-0302

SPECIFICATION FOR METROLOGY SPECIFIC EQUIPMENT MODEL

This specification was technically approved by the Global Information and Control Committee and is the

direct responsibility of the North American Global Information and Control Committee. Current edition

approved by the North American Information and Control Committee on October 14 and November 27,

2001. Initially available at www.semi.org December 2001; to be published March 2002. Originally

published July 2001.

The complete specification for this product includes all

general requirements of SEMI E30.

1 Purpose

1.1 This document establishes a Specific Equipment

Model (SEM) for Metrology equipment (MSEM). The

MSEM consists of equipment characteristics and

behaviors that are applicable to this class of equipment

and are required to be implemented in addition to the

SEMI E30 fundamental requirements and additional

capabilities.

2 Scope

2.1 The scope of this document is limited to defining

the behavior of Metrology equipment as perceived by a

SEMI Equipment Communications Standard II (SECS

II/SEMI E5) host that complies with the SEMI E30

model. It defines the view of the equipment through the

SECS II link. It does not define the internal operation of

the equipment. It includes a specific processing state

model as the basis for all equipment behavior of this

class.

2.2 This document assumes that the SEMI E30

fundamental requirements and all additional capabilities

except those noted in SEMI E30 Capabilities Section in

this document have been implemented on the MSEM

equipment. This document expands the SEMI E30

Standard requirements and capabilities in the areas of

the processing state model, collection events, Process

Program management, remote commands, data item

variables, and coordinate systems.

2.3 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 The intent of this document is to facilitate the

integration of Metrology equipment into an automated

semiconductor factory. This document accomplishes

this by defining an operational model for Metrology

equipment as viewed by a factory automation

controller. This definition provides a standard host

interface and equipment operational behavior. This

document applies specifically to Metrology equipment

as used in a semiconductor factory environment. It is

possible that this methodology and techniques may

apply to other industries.

3.2 MSEM job parameters that specify material (e.g.,

carrier ID and substrate ID) and material locations (e.g.,

carrier location ID and carrier slot ID) are intended for

metrology equipment for 200 mm and smaller substrate.

4 Referenced Standards

NOTE 1: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

4.1 SEMI Standards

SEMI E5  SEMI Equipment Communications

Standard II (SECS II)

SEMI M20 — Specification for Establishing a Wafer

Coordinate System

SEMI M21  Assigning Addresses to Rectangular

Elements in a Cartesian Array

SEMI E37.1  High Speed Messaging Service

(HSMS-SS) Single Session

SEMI E58  Automated Reliability and Availability

Standard (ARAMS)

5 Terminology

5.1 Definitions

5.1.1 alignment, n. — a procedure in which a

coordinate system is established on a substrate or a

portion of a substrate.

5.1.2 alignment mark, n. — a feature on a substrate

selectively used for alignment.

5.1.3 alignment site, n. — a point within a feature on a

substrate selectively used for alignment.

5.1.4 cleanup, n. — deselection of the current Process

Program and removal of all material to output locations

and any equipment specific activities required to

transition the equipment into the IDLE state.