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SEMI F64-0701 © SEMI 2001 7 Figure 3 Q and P 1 versus t: Data Presentation for Meth od A-1 (see App endix 1) Figure 4 Q and P 1 versus t: Data Presentation for Meth od A-2 (see App endix 1)
SEMI F64-0701 © SEMI 2001 6
17 Illustrations
Flow
Standard
P
DUT
P
Vio
P2
P1
Vii
Pressure
Control
Device
Figure 1
Test Schematic for Methods A, A
1
, A
2
, and B
Flow
Standard
P
DUT
P
Pump
Vip
MV
Vio
Vent
P2
P1
Vii
Figure 2
Test Schematic for Method C
SEMI F64-0701 © SEMI 20017
Figure 3
Q and P
1
versus t: Data Presentation for Method A-1 (see Appendix 1)
Figure 4
Q and P
1
versus t: Data Presentation for Method A-2 (see Appendix 1)
SEMI F64-0701 © SEMI 2001 8
Figure 5
Q and P
2
versus t: Data Presentation for Method C (see Appendix 1)